JPS6245327A - レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法 - Google Patents

レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法

Info

Publication number
JPS6245327A
JPS6245327A JP18368085A JP18368085A JPS6245327A JP S6245327 A JPS6245327 A JP S6245327A JP 18368085 A JP18368085 A JP 18368085A JP 18368085 A JP18368085 A JP 18368085A JP S6245327 A JPS6245327 A JP S6245327A
Authority
JP
Japan
Prior art keywords
laser
compound
infrared
irradiation
fluoromonosilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18368085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513685B2 (enrdf_load_stackoverflow
Inventor
Shigeyoshi Arai
重義 荒井
Masatsugu Kamioka
上岡　正嗣
Yoichi Ishikawa
洋一 石川
Shohei Isomura
磯村　昌平
Kyoko Sugita
杉田　恭子
Tatsuhiko Motomiya
本宮　達彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
RIKEN
Original Assignee
Shin Etsu Chemical Co Ltd
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, RIKEN filed Critical Shin Etsu Chemical Co Ltd
Priority to JP18368085A priority Critical patent/JPS6245327A/ja
Priority to US06/824,222 priority patent/US4824537A/en
Priority to DE8686101539T priority patent/DE3664569D1/de
Priority to CA000501270A priority patent/CA1285371C/en
Priority to EP86101539A priority patent/EP0190758B1/en
Publication of JPS6245327A publication Critical patent/JPS6245327A/ja
Publication of JPH0513685B2 publication Critical patent/JPH0513685B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Silicon Compounds (AREA)
JP18368085A 1985-02-06 1985-08-21 レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法 Granted JPS6245327A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP18368085A JPS6245327A (ja) 1985-08-21 1985-08-21 レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法
US06/824,222 US4824537A (en) 1985-02-06 1986-01-30 Working substances used in laser isotope separation and method of laser isotope separation
DE8686101539T DE3664569D1 (en) 1985-02-06 1986-02-06 Process for a laser isotope separation of silicon
CA000501270A CA1285371C (en) 1985-02-06 1986-02-06 Working substances used in laser isotope separation and method of laserisotope separation
EP86101539A EP0190758B1 (en) 1985-02-06 1986-02-06 Process for a laser isotope separation of silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18368085A JPS6245327A (ja) 1985-08-21 1985-08-21 レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法

Publications (2)

Publication Number Publication Date
JPS6245327A true JPS6245327A (ja) 1987-02-27
JPH0513685B2 JPH0513685B2 (enrdf_load_stackoverflow) 1993-02-23

Family

ID=16140043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18368085A Granted JPS6245327A (ja) 1985-02-06 1985-08-21 レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法

Country Status (1)

Country Link
JP (1) JPS6245327A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0513685B2 (enrdf_load_stackoverflow) 1993-02-23

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