JPS6244613A - 膜厚測定装置 - Google Patents
膜厚測定装置Info
- Publication number
- JPS6244613A JPS6244613A JP18494885A JP18494885A JPS6244613A JP S6244613 A JPS6244613 A JP S6244613A JP 18494885 A JP18494885 A JP 18494885A JP 18494885 A JP18494885 A JP 18494885A JP S6244613 A JPS6244613 A JP S6244613A
- Authority
- JP
- Japan
- Prior art keywords
- light
- film thickness
- film
- conversion circuit
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 28
- 238000005259 measurement Methods 0.000 claims abstract description 19
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 239000013307 optical fiber Substances 0.000 claims abstract description 9
- 238000004364 calculation method Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 5
- 230000002123 temporal effect Effects 0.000 claims description 4
- 239000010408 film Substances 0.000 abstract description 38
- 239000010409 thin film Substances 0.000 abstract description 19
- 238000005530 etching Methods 0.000 abstract description 10
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 230000010287 polarization Effects 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000009304 pastoral farming Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 206010033557 Palpitations Diseases 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18494885A JPS6244613A (ja) | 1985-08-22 | 1985-08-22 | 膜厚測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18494885A JPS6244613A (ja) | 1985-08-22 | 1985-08-22 | 膜厚測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244613A true JPS6244613A (ja) | 1987-02-26 |
| JPH0381083B2 JPH0381083B2 (enrdf_load_stackoverflow) | 1991-12-27 |
Family
ID=16162154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18494885A Granted JPS6244613A (ja) | 1985-08-22 | 1985-08-22 | 膜厚測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244613A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2692120C1 (ru) * | 2018-11-01 | 2019-06-21 | федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" | Способ определения толщины покрытия в ходе процесса плазменно-электролитического оксидирования |
-
1985
- 1985-08-22 JP JP18494885A patent/JPS6244613A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2692120C1 (ru) * | 2018-11-01 | 2019-06-21 | федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" | Способ определения толщины покрытия в ходе процесса плазменно-электролитического оксидирования |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0381083B2 (enrdf_load_stackoverflow) | 1991-12-27 |
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