JPS6244355Y2 - - Google Patents
Info
- Publication number
- JPS6244355Y2 JPS6244355Y2 JP5095380U JP5095380U JPS6244355Y2 JP S6244355 Y2 JPS6244355 Y2 JP S6244355Y2 JP 5095380 U JP5095380 U JP 5095380U JP 5095380 U JP5095380 U JP 5095380U JP S6244355 Y2 JPS6244355 Y2 JP S6244355Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- space
- extraction device
- way valve
- leak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 53
- 238000000605 extraction Methods 0.000 claims description 9
- 238000012795 verification Methods 0.000 claims description 9
- 239000012159 carrier gas Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 229910052753 mercury Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5095380U JPS6244355Y2 (enrdf_load_stackoverflow) | 1980-04-17 | 1980-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5095380U JPS6244355Y2 (enrdf_load_stackoverflow) | 1980-04-17 | 1980-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56153846U JPS56153846U (enrdf_load_stackoverflow) | 1981-11-17 |
| JPS6244355Y2 true JPS6244355Y2 (enrdf_load_stackoverflow) | 1987-11-21 |
Family
ID=29645872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5095380U Expired JPS6244355Y2 (enrdf_load_stackoverflow) | 1980-04-17 | 1980-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244355Y2 (enrdf_load_stackoverflow) |
-
1980
- 1980-04-17 JP JP5095380U patent/JPS6244355Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56153846U (enrdf_load_stackoverflow) | 1981-11-17 |
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