JPS6244250U - - Google Patents
Info
- Publication number
- JPS6244250U JPS6244250U JP13592485U JP13592485U JPS6244250U JP S6244250 U JPS6244250 U JP S6244250U JP 13592485 U JP13592485 U JP 13592485U JP 13592485 U JP13592485 U JP 13592485U JP S6244250 U JPS6244250 U JP S6244250U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic substrate
- detection element
- element section
- gas
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13592485U JPS6244250U (enExample) | 1985-09-04 | 1985-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13592485U JPS6244250U (enExample) | 1985-09-04 | 1985-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6244250U true JPS6244250U (enExample) | 1987-03-17 |
Family
ID=31038570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13592485U Pending JPS6244250U (enExample) | 1985-09-04 | 1985-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244250U (enExample) |
-
1985
- 1985-09-04 JP JP13592485U patent/JPS6244250U/ja active Pending