JPS624389A - Flexible circuit board - Google Patents

Flexible circuit board

Info

Publication number
JPS624389A
JPS624389A JP14370785A JP14370785A JPS624389A JP S624389 A JPS624389 A JP S624389A JP 14370785 A JP14370785 A JP 14370785A JP 14370785 A JP14370785 A JP 14370785A JP S624389 A JPS624389 A JP S624389A
Authority
JP
Japan
Prior art keywords
flexible circuit
circuit board
coil
film
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14370785A
Other languages
Japanese (ja)
Inventor
浜村 清人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP14370785A priority Critical patent/JPS624389A/en
Publication of JPS624389A publication Critical patent/JPS624389A/en
Pending legal-status Critical Current

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  • Optical Recording Or Reproduction (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Windings For Motors And Generators (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、絶縁フィルム上に導体回路を形成したフレ
キシブル回路板に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a flexible circuit board in which a conductive circuit is formed on an insulating film.

〔発明の技術的背景〕[Technical background of the invention]

一般にコイル状の導体回路を有するフレキシブル回路板
は、薄形マイクロモーターやコンiぐクトディスクプレ
ーヤーのピックアップヘッド等の薄形コイルの性能向上
という点で注目されている。
In general, flexible circuit boards having coil-shaped conductor circuits are attracting attention from the viewpoint of improving the performance of thin coils such as thin micro motors and pickup heads of convex disc players.

ところで薄形コイルは特開昭57−37898号(厚膜
ファインパターン)や特開昭56−78342号(印刷
回路)等の例に見られるが、フォトエツチング加工や複
雑なめっき工程を含んでいる。
By the way, examples of thin coils can be seen in JP-A No. 57-37898 (thick film fine pattern) and JP-A 56-78342 (printed circuit), but they involve photo-etching and complicated plating processes. .

即ち、従来のビックアップヘッド用の薄形コイル、つま
シはフレキシブル回路板は第6図に示すように構成され
る。図示のように、4リイミドフイルム等の絶縁フィル
ム1には、ぎツチ130ttm、 @ 100μm、厚
さ75μmの鋼よりなる導体2で、絶縁フィルムの両面
に、コイル回路3−1.3−2.3−3.3−4が形成
されている。このコイル回路3−1.3−2.3−3゜
3−4は、電極4−1.4−2から通電され、両面のコ
イル回路を接続するスルーホール5−1゜5−2.5−
3.5−4が夫々直列に設けられている。
That is, the conventional thin coil, claw, and flexible circuit board for a big-up head are constructed as shown in FIG. As shown in the figure, an insulating film 1 such as a 4-limide film has a conductor 2 made of steel with a joint of 130 ttm @ 100 μm and a thickness of 75 μm, and a coil circuit 3-1.3-2 is installed on both sides of the insulating film. .3-3.3-4 is formed. This coil circuit 3-1.3-2.3-3゜3-4 is energized from the electrode 4-1.4-2, and the through hole 5-1゜5-2.5 connects the coil circuits on both sides. −
3.5-4 are provided in series, respectively.

次K、第7図を参照して従来の製造方法について説明す
る。
Next, a conventional manufacturing method will be explained with reference to FIG.

先f、/リイミドフィルム等のベースフィルム6は、両
面に銅薄膜電極を接着した比較的厚い材料から表ってい
る。スルーホール7はプレス加工等で小孔が穿設され、
スルーホールめりきが施されている。このスルーホール
めりきは、粗面化や触媒付与等の表面処理をした後、化
学めっきで銅を0.5〜1μm全面めっきする一連の複
雑な方法である。次に、スルーホールめっき後、任意寸
法のコイル回路をフォトマスクを利用して、フォトエツ
チング加工する。導体8−1゜8−2の断面は銅はくの
一部9−1.9−2゜9−3表面に化学鋼めっき膜I 
O−2,10−2゜10−3を有し、更に電気鋼めりき
11−1゜11−2.11−3を約30μm施す。次に
、接着材12−1.12−2を介してポリイミドフィル
ム等のカバーフィルム13−1.13−2を接着して、
フレキシブル回路板を完成する。
The base film 6, such as a /Liimide film, emerges from a relatively thick material with copper thin film electrodes adhered to both sides. The through hole 7 is a small hole made by press processing etc.
It has through-hole markings. This through-hole plating is a series of complex methods in which after surface treatments such as roughening and catalyst application, the entire surface is plated with copper to a thickness of 0.5 to 1 μm using chemical plating. Next, after through-hole plating, a coil circuit of arbitrary dimensions is photoetched using a photomask. The cross section of the conductor 8-1゜8-2 is a part of the copper foil 9-1.9-2゜9-3 has a chemical steel plating film I on its surface.
O-2,10-2°10-3, and electrical steel plating 11-1°11-2.11-3 is applied to a thickness of about 30 μm. Next, a cover film 13-1.13-2 such as a polyimide film is bonded via an adhesive 12-1.12-2,
Complete the flexible circuit board.

必要とあれば、剥離紙14付きの両面液゛着膜15を付
着した)、電極4−1.4−2に半田や金めつき等を施
し、組立てし易いように加工する。
If necessary, solder, gold plating, etc. are applied to the electrodes 4-1, 4-2 (on which a double-sided liquid film 15 with release paper 14 is attached), and processed to facilitate assembly.

〔背景技術の問題点〕[Problems with background technology]

上記従来例においては、コイル回路を形成する導体導体
間の隙間が製造方法上の理由で厚さよシ小さく出来離い
。例えば、化学めりき工程や、フォトエツチング加工等
の複雑な工程が多く、導体の占有率は、これらの工程の
寸法ばらつきが大きいため、低くなりがちであった。こ
のため、薄形コイルの性能を低下させていた。
In the above conventional example, the gap between the conductors forming the coil circuit is smaller than the thickness due to the manufacturing method. For example, there are many complicated processes such as chemical plating processes and photoetching processes, and the occupancy rate of the conductor tends to be low because of large dimensional variations in these processes. For this reason, the performance of the thin coil has been degraded.

〔発明の目的〕[Purpose of the invention]

この発明の目的は、寸法ばらつきの出易い工程を減らし
、コイル導体の占有率を高めたフレキシブル回路板を提
供することである。
An object of the present invention is to provide a flexible circuit board that reduces the number of steps that tend to cause dimensional variations and increases the occupancy rate of coil conductors.

〔発明の概要〕[Summary of the invention]

この発明は、導体パターンを電着によシマスター基板上
に形成し、これを絶縁フィルムに転写してなるフレキシ
ブル回路板である。
The present invention is a flexible circuit board in which a conductive pattern is formed on a master substrate by electrodeposition and then transferred to an insulating film.

〔発明の実施例〕[Embodiments of the invention]

この発明のフレキシブル回路板は、第1図に示すように
構成され、絶縁フィルム19に、電着金属IB−1,1
8−2,18−3からなる導体パターンを転写してなり
ている。この場合、上記絶縁フィルム19はポリイミド
フィルム等か゛らなシ、上記電着金属1B−1,18−
2゜18−3は銅、金、銀等からなっている。なお、2
0−1.20−2.20−3は、電着マスター基板に形
成された導体ツクターンの跡である。
The flexible circuit board of the present invention is constructed as shown in FIG.
It is formed by transferring a conductor pattern consisting of 8-2 and 18-3. In this case, the insulating film 19 is made of a polyimide film or the like, or the electrodeposited metal 1B-1, 18-
2°18-3 is made of copper, gold, silver, etc. In addition, 2
0-1.20-2.20-3 are traces of conductor turns formed on the electrodeposited master substrate.

次に、第2図を参照して、上記フレキシブル回路板の製
造方法について説明する。
Next, a method for manufacturing the flexible circuit board will be described with reference to FIG.

先ず、同図(a)に示すように、ガラス等の平坦表革導
体基板16の片面に蒸着クロム等からなシ、フォトエツ
チング加工にて所定形状の薄膜電極11−1.11−2
.17−3を形成し、電着用マスター基板を形成する。
First, as shown in Figure (a), a thin film electrode 11-1, 11-2 of a predetermined shape is formed by photo-etching on one side of a flat leather conductor substrate 16 made of glass or the like using vapor-deposited chromium or the like.
.. 17-3 is formed to form a master substrate for electrodeposition.

この場合、寸法や形状は、コイル等の導体や多層配線の
接続部等回路の機能に応じて、任意に設計される。
In this case, the dimensions and shape are arbitrarily designed depending on the function of the circuit, such as the conductor such as a coil and the connection portion of multilayer wiring.

そして、コイル導体の占有率を高めるため、一部の薄膜
電極17−1.17−2は例えばピッチ約130μm1
幅約20μm、厚さ約0.1μmとした微細なパターン
が良い。
In order to increase the occupancy rate of the coil conductor, some of the thin film electrodes 17-1, 17-2 have a pitch of about 130 μm1, for example.
A fine pattern with a width of about 20 μm and a thickness of about 0.1 μm is good.

次K、同図(b) K示すように、硫酸鋼等を含む電気
めりき液中で、薄膜電極17−1.17−2゜17−3
上に約50#Iの厚さの電着金属1B−1。
Next K, same figure (b) As shown in K, the thin film electrode 17-1.17-2゜17-3
Electrodeposited metal 1B-1 about 50#I thick on top.

18−2.18−3を形成する。この場合、電着金属1
B−1,18−2,18−3は経済的な鋼が喪いが、電
気伝導性の良い金や鎖等のいずれか又は多層組合わせて
も、同様な結果となる。
Form 18-2.18-3. In this case, electrodeposited metal 1
B-1, 18-2, and 18-3 are not economical steels, but the same results can be obtained by using gold, chain, etc., which have good electrical conductivity, or by combining them with multiple layers.

次に、同図(、)に示すように、ポリイミドなどの絶縁
樹脂や絶縁フェス等を薄く塗布し、電着金属18−1.
18−2.18−3と固着した絶縁体フィルム19を形
成する。
Next, as shown in FIG.
18-2. An insulating film 19 fixed to 18-3 is formed.

次に、同図(d)に示すように、転写工程に入るが、こ
の転写工程は絶縁体フィルム19を機械的に引き剥がす
ことで達成することが出来る。
Next, as shown in FIG. 4(d), a transfer process begins, which can be accomplished by mechanically peeling off the insulating film 19.

こうして所望のフレキシブル回路板24が得られる。In this way, the desired flexible circuit board 24 is obtained.

薄膜電極12−1.17−2.17−3の残った不導体
基板16は、電鋳用マスターとして何回も転写に使える
The nonconductor substrate 16 with the thin film electrodes 12-1.17-2.17-3 remaining can be used for transfer many times as a master for electroforming.

以上の方法は、上記絶縁体フィルム19の厚さを極めて
薄くすることと、電着金属1B−1゜18−2.18−
3の厚さを厚くすることができ、薄形コイルに適用した
場合には、コイル回路の性能向上に役立つ。
The above method involves making the thickness of the insulating film 19 extremely thin and depositing metal 1B-1゜18-2.18-
3 can be made thicker, and when applied to a thin coil, it is useful for improving the performance of the coil circuit.

このようにして作られた本発明のフレキクプル回路板は
、別々に作られたものを積層して組立てることも出来る
。第3図は、この実施例を示し、第1のフレキシブル回
路板24−1と第2のフレキシブル回路板24−2とを
接着層21を介して貼シ合せたものである。特に、電着
金属面を対向させた場合、電着金属面側は薄膜電極から
離れて出来た凹溝20−1.20−2゜20−3を有し
ているが、突起のない平坦面が得られるので、同図に示
すように、極めて薄い接着層(絶縁薄膜)21とするこ
とが出来る。
The flexible circuit board of the present invention thus produced can also be assembled by laminating separately produced circuit boards. FIG. 3 shows this embodiment, in which a first flexible circuit board 24-1 and a second flexible circuit board 24-2 are pasted together with an adhesive layer 21 interposed therebetween. In particular, when the electrodeposited metal surfaces face each other, the electrodeposited metal surface side has a groove 20-1. Therefore, as shown in the figure, an extremely thin adhesive layer (insulating thin film) 21 can be obtained.

又、第1および第2のフレキシブル回路板の導体を相互
に電気的に接続して多層配線するときは、第4図に示す
ように、接続部22を電気溶接機の電極で加圧し、絶縁
薄膜21を破壊して溶接することができる。
When the conductors of the first and second flexible circuit boards are electrically connected to each other for multilayer wiring, as shown in FIG. The thin film 21 can be destroyed and welded.

また本発明のフレキシブル回路板は、従来技術と同様に
必要ならば、剥離紙23付きの両面接着膜24を付着し
たり、通電部の電極等に半田やめりきを施してもよい。
Further, in the flexible circuit board of the present invention, as in the prior art, if necessary, a double-sided adhesive film 24 with a release paper 23 may be attached, or the electrodes of the current-carrying parts may be soldered or plated.

尚、電鋳用マスター基板の他の例を挙げれば、第5図(
a)、(b)に示すようなものがあシ、図中、25はガ
ラス基板、26は厚さ100OXOCr層、27は厚さ
500XのPd層、28は厚さ1 μmのAu層、29
は厚さ5001のCr層、30は厚さ1μmの5io2
層、31は厚さ10001のTi層である。5tO2層
30には所定の回路IJ?ターンの開孔部35が形成さ
れていて、電着時のマスクとなシ、そこから露出する滑
らかな金属表面を有するCr層29上に金属が電着され
る。これらの電鋳用マスターによれば、Cr層29の地
下としてAu 、 Pd 、 Cu等の導電性の高い通
電層を用いているので、通電部より遠い部分においても
近い部分と同様の均一な電着厚さを得ることができる。
Other examples of electroforming master substrates are shown in Figure 5 (
As shown in a) and (b), in the figure, 25 is a glass substrate, 26 is a 100XOCr layer with a thickness, 27 is a Pd layer with a thickness of 500X, 28 is an Au layer with a thickness of 1 μm, 29
is a Cr layer with a thickness of 5001, and 30 is a 5io2 layer with a thickness of 1 μm.
Layer 31 is a Ti layer with a thickness of 10,001 mm. The 5tO2 layer 30 has a predetermined circuit IJ? Metal is electrodeposited on the Cr layer 29 having a smooth metal surface exposed from the turn opening 35 which serves as a mask during electrodeposition. According to these electroforming masters, since a highly conductive current-carrying layer made of Au, Pd, Cu, etc. is used below the Cr layer 29, even parts far from the current-carrying part can receive the same uniform current as near parts. You can get the desired thickness.

従って、これを用いて作られるフレキシブル回路板の、
例えばコイル導体の厚さを均一化でき、微細化や導体の
空間占積率を高めることができる。
Therefore, the flexible circuit board made using this
For example, the thickness of the coil conductor can be made uniform, miniaturization, and the space factor of the conductor can be increased.

また、電着金属の転写に幽りては、上述の実施例に限ら
ず、接着層を形成した絶縁フィルムを、電着金属を形成
した電鋳マスター基板に貼シ合せ、絶縁フィルムを剥す
ことによりて行なうこともできる。
In addition, with regard to the transfer of electrodeposited metal, the method is not limited to the above-mentioned embodiments, but it is also possible to laminate an insulating film on which an adhesive layer is formed to an electroforming master substrate on which an electrodeposited metal is formed, and then peel off the insulating film. It can also be done by

〔発明の効果〕〔Effect of the invention〕

この発明によれば、得られたコイル回路の導体の占有率
は、従来より約5%高く出来、動作時の発熱が軽減され
、安定したコイル特性が得られる。又、この発明によれ
ば、コイル回路等の微細な部分に寸法ばらつきが発生し
易い複雑な工程を、無くすことが出来る。
According to the present invention, the occupancy rate of the conductor in the obtained coil circuit can be increased by about 5% compared to the conventional method, heat generation during operation is reduced, and stable coil characteristics can be obtained. Further, according to the present invention, it is possible to eliminate complicated processes that tend to cause dimensional variations in minute parts such as coil circuits.

尚、この発明の適用範囲は、上記実施例に止どまらず、
薄形モーターのコイルや、小形フレキシブル回路板とし
て有用であることは、明らかである。特に、微細な導体
回路では、繰返しフォトエツチングや化学めっきする時
に発生する断線やシ1−ト不良を解消することが出来、
小形化、薄形化には不可欠である。
Note that the scope of application of this invention is not limited to the above embodiments,
It is clear that it is useful as a thin motor coil or a small flexible circuit board. In particular, for fine conductor circuits, it is possible to eliminate disconnections and sheet defects that occur during repeated photoetching and chemical plating.
This is essential for miniaturization and thinning.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例に係るフレキシブル回路板
を示す概略断面図、第2図(a)〜(d)はこの発明の
一実施例に係るフレキシブル回路板の製造方法を示す概
略断面図、第3図及び第4図はこの発明のフレキシブル
回路板の使用例を示す図、第5図(a) 、 (b)は
この発明の製造方法で用いる電鋳用マスターの例を示す
断面図、第6図はコンパクトディスクプレーヤーのピッ
クアップヘッドに用いるコイル回路を有するフレキシツ
ル回路板を示す概略平面図、第7図はフォトエツチング
加工と化学めりき工程を含む従来技術で製造されたフレ
キシブル回路板を示す概略断面図である。 16・・・不導体基板、27−J、27−2゜11−3
・・・薄膜電極、1B−1,18−2゜18−3・・・
電着金属、19・・・絶縁体、20−1゜20−2.2
0−3・・・凹溝、21・・・絶縁薄膜。 出願人代理人 弁理士 鈴 江 武 彦第1図 第5図 第6図 1!7図
FIG. 1 is a schematic cross-sectional view showing a flexible circuit board according to an embodiment of the present invention, and FIGS. 2(a) to (d) are schematic cross-sections showing a method for manufacturing a flexible circuit board according to an embodiment of the present invention. Figures 3 and 4 are views showing examples of the use of the flexible circuit board of the present invention, and Figures 5(a) and 5(b) are cross-sectional views showing examples of the electroforming master used in the manufacturing method of the present invention. 6 is a schematic plan view showing a flexible circuit board with a coil circuit used in a pickup head of a compact disc player, and FIG. 7 is a flexible circuit board manufactured using conventional techniques including photoetching and chemical plating processes. FIG. 16... Nonconductor substrate, 27-J, 27-2°11-3
... Thin film electrode, 1B-1, 18-2゜18-3...
Electrodeposited metal, 19...Insulator, 20-1°20-2.2
0-3... Concave groove, 21... Insulating thin film. Applicant's Representative Patent Attorney Takehiko Suzue Figure 1 Figure 5 Figure 6 Figure 1!7

Claims (1)

【特許請求の範囲】[Claims] マスター基板上に所定のパターンで電着した金属を、絶
縁フィルムに転写してなるフレキシブル回路板。
A flexible circuit board made by electrodepositing metal in a predetermined pattern on a master board and transferring it to an insulating film.
JP14370785A 1985-06-29 1985-06-29 Flexible circuit board Pending JPS624389A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14370785A JPS624389A (en) 1985-06-29 1985-06-29 Flexible circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14370785A JPS624389A (en) 1985-06-29 1985-06-29 Flexible circuit board

Publications (1)

Publication Number Publication Date
JPS624389A true JPS624389A (en) 1987-01-10

Family

ID=15345101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14370785A Pending JPS624389A (en) 1985-06-29 1985-06-29 Flexible circuit board

Country Status (1)

Country Link
JP (1) JPS624389A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004319781A (en) * 2003-04-16 2004-11-11 Shin Etsu Polymer Co Ltd Flexible printed circuit board and its manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004319781A (en) * 2003-04-16 2004-11-11 Shin Etsu Polymer Co Ltd Flexible printed circuit board and its manufacturing method

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