JPS6243637U - - Google Patents

Info

Publication number
JPS6243637U
JPS6243637U JP13654585U JP13654585U JPS6243637U JP S6243637 U JPS6243637 U JP S6243637U JP 13654585 U JP13654585 U JP 13654585U JP 13654585 U JP13654585 U JP 13654585U JP S6243637 U JPS6243637 U JP S6243637U
Authority
JP
Japan
Prior art keywords
container
carrier gas
constant temperature
raw material
bubbler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13654585U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13654585U priority Critical patent/JPS6243637U/ja
Publication of JPS6243637U publication Critical patent/JPS6243637U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第1図は本考案の一実施例の構成図、第2図は
従来例のバブラの構成図である。 1……キヤリアガス・パイプ、2……密閉容器
、3……原料液体、4……泡、5……熱媒体、6
……恒温槽、7……空洞、8,16……パイプ先
端、9……ガス入口、10……ガス出口、11…
…マスフローコントローラ、12,13,14…
…バルブ、15……パイプ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 液体原料を貯える容器と、この容器を一定温度
    に保つ恒温機構と、前記容器中の液体原料の中に
    キヤリアガスを通過させバブリングさせるキヤリ
    アガスパイプとを備えたバブラにおいて、前記キ
    ヤリアガスパイプの途中の一定温度に保たれる部
    分に所定容積の空洞部を設けたことを特徴とする
    バブラ。
JP13654585U 1985-09-05 1985-09-05 Pending JPS6243637U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13654585U JPS6243637U (ja) 1985-09-05 1985-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13654585U JPS6243637U (ja) 1985-09-05 1985-09-05

Publications (1)

Publication Number Publication Date
JPS6243637U true JPS6243637U (ja) 1987-03-16

Family

ID=31039758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13654585U Pending JPS6243637U (ja) 1985-09-05 1985-09-05

Country Status (1)

Country Link
JP (1) JPS6243637U (ja)

Similar Documents

Publication Publication Date Title
JPS6243637U (ja)
JPS61128474U (ja)
JPS6187661U (ja)
JPS61150050U (ja)
JPS6294017U (ja)
JPH0363749U (ja)
JPS59178332U (ja) 水素ガス供給装置
JPH0463992U (ja)
JPH01149964U (ja)
JPS6262221U (ja)
JPS61125367U (ja)
JPS61117196U (ja)
JPS61178057U (ja)
JPS6259161U (ja)
JPS63168838U (ja)
JPS6170000U (ja)
JPS61127460U (ja)
JPS61197542U (ja)
JPH0366406U (ja)
JPS61187993U (ja)
JPS6249231U (ja)
JPS6419607U (ja)
JPS61123097U (ja)
JPS61142254U (ja)
JPS63142623U (ja)