JPS61128474U - - Google Patents

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Publication number
JPS61128474U
JPS61128474U JP1043285U JP1043285U JPS61128474U JP S61128474 U JPS61128474 U JP S61128474U JP 1043285 U JP1043285 U JP 1043285U JP 1043285 U JP1043285 U JP 1043285U JP S61128474 U JPS61128474 U JP S61128474U
Authority
JP
Japan
Prior art keywords
helium gas
temperature helium
gas control
cooling fluid
cooling chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1043285U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1043285U priority Critical patent/JPS61128474U/ja
Publication of JPS61128474U publication Critical patent/JPS61128474U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案に係わる高温ヘリウムガス制御
弁の一実施例を示す縦断側面図、第２図は従来の
高温ヘリウムガス制御弁を示す縦断側面図である
。 １……高温ヘリウムガス、５……弁体、６，７
……弁座、１０……弁本体、２１，２６，３１…
…冷却室、１９，２０，２２，２３，２４，２５
，２７，２９，３０，３２，３３……冷却流体通
路、１８，２４，２８……冷却流体。

Claims (1)

    【実用新案登録請求の範囲】
  1. 高温ヘリウムガス制御弁を構成する各部分のう
    ち高温ヘリウムガスに接する部分の内部に冷却室
    と同冷却室に冷却流体を給排する冷却流体通路と
    を設けたことを特徴とする高温ヘリウムガス制御
    弁。
JP1043285U 1985-01-30 1985-01-30 Pending JPS61128474U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1043285U JPS61128474U (ja) 1985-01-30 1985-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1043285U JPS61128474U (ja) 1985-01-30 1985-01-30

Publications (1)

Publication Number Publication Date
JPS61128474U true JPS61128474U (ja) 1986-08-12

Family

ID=30491613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1043285U Pending JPS61128474U (ja) 1985-01-30 1985-01-30

Country Status (1)

Country Link
JP (1) JPS61128474U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100962272B1 (ko) 2008-04-21 2010-06-11 (주)일진에너지 고온 고압 밸브
JP2019175636A (ja) * 2018-03-28 2019-10-10 株式会社豊田中央研究所 沸騰冷却式バルブ、沸騰冷却式ｃｏ２分離器、ｓｏｆｃシステム、ｓｏｅｃシステム、及びｒ−ｓｏｃシステム
KR20220001456U (ko) * 2020-12-15 2022-06-22 메트소 오토텍 핀란드 오이 피드 게이트 밸브 장치 및 야금로

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607379B2 (ja) * 1977-10-07 1985-02-23 東芝セラミツクス株式会社 ウエハー加熱用治具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607379B2 (ja) * 1977-10-07 1985-02-23 東芝セラミツクス株式会社 ウエハー加熱用治具

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100962272B1 (ko) 2008-04-21 2010-06-11 (주)일진에너지 고온 고압 밸브
JP2019175636A (ja) * 2018-03-28 2019-10-10 株式会社豊田中央研究所 沸騰冷却式バルブ、沸騰冷却式ｃｏ２分離器、ｓｏｆｃシステム、ｓｏｅｃシステム、及びｒ−ｓｏｃシステム
KR20220001456U (ko) * 2020-12-15 2022-06-22 메트소 오토텍 핀란드 오이 피드 게이트 밸브 장치 및 야금로

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