JPS624231B2 - - Google Patents

Info

Publication number
JPS624231B2
JPS624231B2 JP56205613A JP20561381A JPS624231B2 JP S624231 B2 JPS624231 B2 JP S624231B2 JP 56205613 A JP56205613 A JP 56205613A JP 20561381 A JP20561381 A JP 20561381A JP S624231 B2 JPS624231 B2 JP S624231B2
Authority
JP
Japan
Prior art keywords
stamp
scanning
group
stamps
engraved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56205613A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58107339A (ja
Inventor
Takanobu Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP56205613A priority Critical patent/JPS58107339A/ja
Publication of JPS58107339A publication Critical patent/JPS58107339A/ja
Publication of JPS624231B2 publication Critical patent/JPS624231B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41CPROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00Forme preparation
    • B41C1/02Engraving; Heads therefor
    • B41C1/04Engraving; Heads therefor using heads controlled by an electric information signal

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Laser Beam Processing (AREA)
JP56205613A 1981-12-19 1981-12-19 レ−ザ−ビ−ムによる印判彫刻方法 Granted JPS58107339A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56205613A JPS58107339A (ja) 1981-12-19 1981-12-19 レ−ザ−ビ−ムによる印判彫刻方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56205613A JPS58107339A (ja) 1981-12-19 1981-12-19 レ−ザ−ビ−ムによる印判彫刻方法

Publications (2)

Publication Number Publication Date
JPS58107339A JPS58107339A (ja) 1983-06-27
JPS624231B2 true JPS624231B2 (zh) 1987-01-29

Family

ID=16509770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56205613A Granted JPS58107339A (ja) 1981-12-19 1981-12-19 レ−ザ−ビ−ムによる印判彫刻方法

Country Status (1)

Country Link
JP (1) JPS58107339A (zh)

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* Cited by examiner, † Cited by third party
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US10844486B2 (en) 2009-04-06 2020-11-24 Asm Ip Holding B.V. Semiconductor processing reactor and components thereof
US10804098B2 (en) 2009-08-14 2020-10-13 Asm Ip Holding B.V. Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
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