JPS62405Y2 - - Google Patents

Info

Publication number
JPS62405Y2
JPS62405Y2 JP1982046338U JP4633882U JPS62405Y2 JP S62405 Y2 JPS62405 Y2 JP S62405Y2 JP 1982046338 U JP1982046338 U JP 1982046338U JP 4633882 U JP4633882 U JP 4633882U JP S62405 Y2 JPS62405 Y2 JP S62405Y2
Authority
JP
Japan
Prior art keywords
chamber
diaphragm
intermediate chamber
case
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982046338U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58148302U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4633882U priority Critical patent/JPS58148302U/ja
Publication of JPS58148302U publication Critical patent/JPS58148302U/ja
Application granted granted Critical
Publication of JPS62405Y2 publication Critical patent/JPS62405Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP4633882U 1982-03-30 1982-03-30 ダイヤフラム式バキユ−ムアクチユエ−タ Granted JPS58148302U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4633882U JPS58148302U (ja) 1982-03-30 1982-03-30 ダイヤフラム式バキユ−ムアクチユエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4633882U JPS58148302U (ja) 1982-03-30 1982-03-30 ダイヤフラム式バキユ−ムアクチユエ−タ

Publications (2)

Publication Number Publication Date
JPS58148302U JPS58148302U (ja) 1983-10-05
JPS62405Y2 true JPS62405Y2 (cs) 1987-01-08

Family

ID=30057338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4633882U Granted JPS58148302U (ja) 1982-03-30 1982-03-30 ダイヤフラム式バキユ−ムアクチユエ−タ

Country Status (1)

Country Link
JP (1) JPS58148302U (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474881U (cs) * 1977-11-07 1979-05-28

Also Published As

Publication number Publication date
JPS58148302U (ja) 1983-10-05

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