JPS6239736B2 - - Google Patents
Info
- Publication number
- JPS6239736B2 JPS6239736B2 JP55182471A JP18247180A JPS6239736B2 JP S6239736 B2 JPS6239736 B2 JP S6239736B2 JP 55182471 A JP55182471 A JP 55182471A JP 18247180 A JP18247180 A JP 18247180A JP S6239736 B2 JPS6239736 B2 JP S6239736B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- photoconductive layer
- layer
- halogen
- image forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 125000005843 halogen group Chemical group 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 5
- 239000011159 matrix material Substances 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 125000004429 atom Chemical group 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 66
- 239000007789 gas Substances 0.000 description 42
- 229910021417 amorphous silicon Inorganic materials 0.000 description 30
- 238000000034 method Methods 0.000 description 27
- 239000000758 substrate Substances 0.000 description 20
- 238000000151 deposition Methods 0.000 description 16
- 230000008021 deposition Effects 0.000 description 16
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 14
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 13
- 239000012535 impurity Substances 0.000 description 12
- 229910052736 halogen Inorganic materials 0.000 description 11
- 150000002367 halogens Chemical class 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- -1 SiH 4 Chemical class 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 150000003377 silicon compounds Chemical class 0.000 description 9
- 239000002994 raw material Substances 0.000 description 8
- 239000000460 chlorine Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 238000009835 boiling Methods 0.000 description 5
- 150000002366 halogen compounds Chemical class 0.000 description 5
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 4
- 238000007743 anodising Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 235000006408 oxalic acid Nutrition 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 229910052794 bromium Inorganic materials 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 235000011187 glycerol Nutrition 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910018134 Al-Mg Inorganic materials 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 2
- 229910018182 Al—Cu Inorganic materials 0.000 description 2
- 229910018467 Al—Mg Inorganic materials 0.000 description 2
- 229910018464 Al—Mg—Si Inorganic materials 0.000 description 2
- 229910018520 Al—Si Inorganic materials 0.000 description 2
- 229910002482 Cu–Ni Inorganic materials 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- 229910000551 Silumin Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 229910018131 Al-Mn Inorganic materials 0.000 description 1
- 229910018461 Al—Mn Inorganic materials 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910017518 Cu Zn Inorganic materials 0.000 description 1
- 229910017758 Cu-Si Inorganic materials 0.000 description 1
- 229910017752 Cu-Zn Inorganic materials 0.000 description 1
- 229910017818 Cu—Mg Inorganic materials 0.000 description 1
- 229910017931 Cu—Si Inorganic materials 0.000 description 1
- 229910017943 Cu—Zn Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229910018110 Se—Te Inorganic materials 0.000 description 1
- 229910003691 SiBr Inorganic materials 0.000 description 1
- 241000519995 Stachys sylvatica Species 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 150000002291 germanium compounds Chemical class 0.000 description 1
- 229910052986 germanium hydride Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 102220056930 rs534282225 Human genes 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052990 silicon hydride Inorganic materials 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/10—Bases for charge-receiving or other layers
- G03G5/104—Bases for charge-receiving or other layers comprising inorganic material other than metals, e.g. salts, oxides, carbon
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
- G03G5/08214—Silicon-based
- G03G5/08221—Silicon-based comprising one or two silicon based layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/14—Inert intermediate or cover layers for charge-receiving layers
- G03G5/142—Inert intermediate layers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Photoreceptors In Electrophotography (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55182471A JPS57104938A (en) | 1980-12-22 | 1980-12-22 | Image forming member for electrophotography |
| US06/328,107 US4416962A (en) | 1980-12-22 | 1981-12-07 | Electrophotographic member having aluminum oxide layer |
| GB8138599A GB2092324B (en) | 1980-12-22 | 1981-12-22 | Electrophotographic image-forming member |
| DE19813150865 DE3150865A1 (de) | 1980-12-22 | 1981-12-22 | "bilderzeugungselement fuer elektrofotografische zwecke" |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55182471A JPS57104938A (en) | 1980-12-22 | 1980-12-22 | Image forming member for electrophotography |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57104938A JPS57104938A (en) | 1982-06-30 |
| JPS6239736B2 true JPS6239736B2 (US20080293856A1-20081127-C00150.png) | 1987-08-25 |
Family
ID=16118837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55182471A Granted JPS57104938A (en) | 1980-12-22 | 1980-12-22 | Image forming member for electrophotography |
Country Status (4)
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6456246U (US20080293856A1-20081127-C00150.png) * | 1987-10-05 | 1989-04-07 | ||
| JPH01133931U (US20080293856A1-20081127-C00150.png) * | 1988-03-03 | 1989-09-12 | ||
| JPH0255950U (US20080293856A1-20081127-C00150.png) * | 1988-10-18 | 1990-04-23 |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59193463A (ja) * | 1983-04-18 | 1984-11-02 | Canon Inc | 電子写真用光導電部材 |
| JPH0627948B2 (ja) * | 1983-07-15 | 1994-04-13 | キヤノン株式会社 | 光導電部材 |
| JPS6028662A (ja) * | 1983-07-27 | 1985-02-13 | Stanley Electric Co Ltd | 電子写真用アモルフアスシリコン感光体 |
| US4609604A (en) * | 1983-08-26 | 1986-09-02 | Canon Kabushiki Kaisha | Photoconductive member having a germanium silicon photoconductor |
| DE3616607A1 (de) * | 1985-05-17 | 1986-11-20 | Ricoh Co., Ltd., Tokio/Tokyo | Lichtempfindliches material fuer die elektrophotographie |
| DE3528428A1 (de) * | 1985-08-08 | 1987-02-19 | Standard Elektrik Lorenz Ag | Elektrofotografisches aufzeichnungselement verfahren zur herstellung und verwendung desselben |
| GB2191511A (en) * | 1986-06-10 | 1987-12-16 | Komatsu Mfg Co Ltd | Fabricating an electro-photographic photosensor |
| JPH0782240B2 (ja) * | 1986-09-04 | 1995-09-06 | 富士ゼロックス株式会社 | 電子写真感光体 |
| JP2535924B2 (ja) * | 1987-07-03 | 1996-09-18 | 富士ゼロックス株式会社 | 電子写真用感光体 |
| JP2596024B2 (ja) * | 1987-12-15 | 1997-04-02 | 富士ゼロックス株式会社 | 電子写真感光体 |
| JPH0797227B2 (ja) * | 1988-03-25 | 1995-10-18 | 富士ゼロックス株式会社 | 電子写真用感光体 |
| JPH0222664A (ja) * | 1988-07-11 | 1990-01-25 | Fuji Electric Co Ltd | 電子写真感光体の製造方法 |
| JPH03109569A (ja) * | 1989-09-25 | 1991-05-09 | Fuji Xerox Co Ltd | 電子写真感光体及びその製造方法 |
| EP1179751B1 (en) * | 2000-08-08 | 2005-11-02 | Canon Kabushiki Kaisha | Electrophotographic photosensitive member, process for production thereof, process cartridge and electrophotographic apparatus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL259610A (US20080293856A1-20081127-C00150.png) * | 1959-12-30 | |||
| DE2746967C2 (de) * | 1977-10-19 | 1981-09-24 | Siemens AG, 1000 Berlin und 8000 München | Elektrofotographische Aufzeichnungstrommel |
| US4265991A (en) * | 1977-12-22 | 1981-05-05 | Canon Kabushiki Kaisha | Electrophotographic photosensitive member and process for production thereof |
| US4217374A (en) * | 1978-03-08 | 1980-08-12 | Energy Conversion Devices, Inc. | Amorphous semiconductors equivalent to crystalline semiconductors |
| US4226898A (en) * | 1978-03-16 | 1980-10-07 | Energy Conversion Devices, Inc. | Amorphous semiconductors equivalent to crystalline semiconductors produced by a glow discharge process |
-
1980
- 1980-12-22 JP JP55182471A patent/JPS57104938A/ja active Granted
-
1981
- 1981-12-07 US US06/328,107 patent/US4416962A/en not_active Expired - Lifetime
- 1981-12-22 DE DE19813150865 patent/DE3150865A1/de active Granted
- 1981-12-22 GB GB8138599A patent/GB2092324B/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6456246U (US20080293856A1-20081127-C00150.png) * | 1987-10-05 | 1989-04-07 | ||
| JPH01133931U (US20080293856A1-20081127-C00150.png) * | 1988-03-03 | 1989-09-12 | ||
| JPH0255950U (US20080293856A1-20081127-C00150.png) * | 1988-10-18 | 1990-04-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2092324B (en) | 1984-09-19 |
| DE3150865C2 (US20080293856A1-20081127-C00150.png) | 1988-07-28 |
| US4416962A (en) | 1983-11-22 |
| GB2092324A (en) | 1982-08-11 |
| DE3150865A1 (de) | 1982-08-19 |
| JPS57104938A (en) | 1982-06-30 |
