JPS6238373A - Characteristic measuring instrument for semiconductor device - Google Patents

Abstract

PURPOSE:To deal with the generation of a continuous defect in measured value during measurement automatically by providing a tester for measuring electric characteristics of a semiconductor device, the 1st measuring circuit part, the 2nd measuring circuit part, etc. CONSTITUTION:A socket 103 for the semiconductor device to be measured and a measuring circuit part 102 are coupled by wiring 12 to form the 1st measuring circuit part. A semiconductor device 14 having reference electric characteristics is mounted through a changeover relay 13 while branched from the wiring 12 and then the 2nd measuring circuit part 21 for measuring electric characteristics of it is provided. Then, the tester is allowed to measure electric characteristics of either of the semiconductor devices through the changeover relay 13. If abnormality is recognized, the tester 10 enters self-diagnostic operation and an alarm sounds in case of NG. When the tester diagnoses itself as a normal tester, the changeover relay 13 is operated and the reference device 14 begins to be measured. When the result is OK, the test is restarted, but when NG, an alarm is generated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a characteristic measuring device for a semiconductor device, and is particularly used for measuring the electrical characteristics of a semiconductor device.

[Technical background of the invention]

A circuit to be measured is contained within the measurement circuit section (measurement head) of an electrical property measurement device for semiconductor devices.

It is also equipped with wiring, sockets, etc., and is connected to the tester. FIG. 4 illustrates a conventional measuring device.

In the figure, reference numeral 101 denotes a measurement circuit section, a socket that houses a measurement circuit 102 and into which a semiconductor device under test is inserted.
Nido103. It has a tester cable connector 104, and electrical wiring 105a, 105b, . . . is provided between the circuit, the socket, and the tester cable connector. Also.

Tester cable 1 is connected to tester cable connector 104.
A tester 107 is connected via 06.

The system was set to interrupt the measurement and sound an alarm if several consecutive failures occurred during measurement.

[Problems with background technology]

The above-mentioned conventional measuring device detects (i) the operating condition of the tester, (it) abnormalities such as disconnections in the circuit or wiring in the measuring circuit, and (in) when abnormal measured values occur continuously during measurement.
81g It is necessary to stop the equipment and check for abnormalities in the product lot of ICs under test, but since this poses a major hindrance to production, it is necessary to set the number of consecutive failures in the measured values before proceeding to check. It was a big problem.

[Purpose of the invention]

In view of the conventional problems, the present invention provides an improved measuring device that can deal with continuous failures in measured values during measurement and automatically take measures.

[Summary of the invention]

A characteristic measuring device for a semiconductor device according to the present invention includes a tester (10) that measures the electrical characteristics of a semiconductor device, and a first measuring circuit that is connected to the tester and measures the electrical characteristics of the semiconductor device to be measured. part (11) and the first
A circuit switching section (13) controlled by a tester is included in the measurement circuit section of
A second measuring circuit section (2
1).

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIGS. 1 to 3. In addition, in the description, parts that are the same as in the prior art are indicated by the same reference numerals as in the prior art in the drawings, and the description thereof will be omitted.

In FIG. 1, the first measurement circuit section 11 is located between the socket l-103 for the semiconductor device under test and the measurement circuit section 102.
A semiconductor device 14 whose electrical characteristics are the standard is branched from the electrical wiring 12 through a switching relay 13 which is a circuit switching section.
A second measuring circuit section 21 is connected to the second measuring circuit section 21, which measures the electrical characteristics of the electrical characteristics.

The tester 10 is a switching relay and can measure the electrical characteristics of either of the bidirectional conductor devices.

The operation of the apparatus configured as described above will be explained with reference to FIG. 2 below. First, the semiconductor device to be measured 1, for example, TA 71
76 AP with standard electrical characteristics is determined as the reference semiconductor device 14, and this is set. Further, the number of times that the measured value has continuously fallen into the defective range, for example, 5, is set as an abnormality and placed in the tester. Then, when the above-mentioned abnormality is recognized, the tester moves to self-diagnosis, and if it is NG, an alarm is issued and an alarm sounds. Tester self-diagnosis is OK
In this case, the switching relay is activated and the measurement of the reference semiconductor device is started. If it is OK, the test will be restarted, but if it is not, a warning will be issued and an alarm will sound.

In the end, if some kind of countermeasure is required, a warning will be issued and restoration measures will be required, but otherwise the measurement will proceed automatically.

FIG. 3 shown next is a practical example of the wiring and arrangement of the measuring device.

Note that the tester is set to automatically perform a check not only when an abnormality occurs as described above, but also when a certain number of measurements is reached, so 8I! ! The reliability of the design can be significantly improved.

〔Effect of the invention〕

According to this invention, when consecutively defective measured values are found during continuous measurement of the characteristics of a semiconductor device, it is automatically determined whether the product is defective, the tester is defective, or the measuring section is defective. can be detected. In addition, there is an advantage that countermeasures can be taken by issuing an alarm for cases other than product defects, contributing to process automation.

In addition, since the device is checked not only when an abnormality occurs, but also periodically, for example, every 100 measurements, stable measurements are possible and the yield is improved.

[Brief explanation of drawings]

Figures 1 to 3 relate to embodiments of the present invention;
The figure is a layout diagram showing an overview of a measuring device according to one embodiment, FIG. 2 is a block diagram showing the operation of the device, FIG. 3 is an actual wiring diagram of an example of the device, and FIG. 4 is an overview of a conventional measuring device. FIG.

Claims (1)

[Claims] a tester that measures the electrical characteristics of a semiconductor device; a first measurement circuit section connected to the tester that measures the electrical characteristics of the semiconductor device to be measured; 1. A characteristic measuring device for a semiconductor device, comprising: a second measuring circuit section which is provided in parallel via a circuit switching section, and which mounts a reference semiconductor device and measures electrical characteristics thereof.