JPS6238348Y2 - - Google Patents
Info
- Publication number
- JPS6238348Y2 JPS6238348Y2 JP1985145895U JP14589585U JPS6238348Y2 JP S6238348 Y2 JPS6238348 Y2 JP S6238348Y2 JP 1985145895 U JP1985145895 U JP 1985145895U JP 14589585 U JP14589585 U JP 14589585U JP S6238348 Y2 JPS6238348 Y2 JP S6238348Y2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- crystal
- cut
- resonator
- crystal resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000001259 photo etching Methods 0.000 description 4
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985145895U JPS6238348Y2 (fi) | 1985-09-25 | 1985-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985145895U JPS6238348Y2 (fi) | 1985-09-25 | 1985-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6168522U JPS6168522U (fi) | 1986-05-10 |
| JPS6238348Y2 true JPS6238348Y2 (fi) | 1987-09-30 |
Family
ID=30704146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985145895U Expired JPS6238348Y2 (fi) | 1985-09-25 | 1985-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6238348Y2 (fi) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4888886A (fi) * | 1972-02-21 | 1973-11-21 | ||
| JPS50790A (fi) * | 1973-05-02 | 1975-01-07 | ||
| JPS50153891A (fi) * | 1974-05-14 | 1975-12-11 | ||
| JPS5160189A (en) * | 1974-11-09 | 1976-05-25 | Suwa Seikosha Kk | Suishoshindoshi |
| JPS51140065A (en) * | 1975-05-28 | 1976-12-02 | Aisin Seiki Co Ltd | Change gear |
-
1985
- 1985-09-25 JP JP1985145895U patent/JPS6238348Y2/ja not_active Expired
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4888886A (fi) * | 1972-02-21 | 1973-11-21 | ||
| JPS50790A (fi) * | 1973-05-02 | 1975-01-07 | ||
| JPS50153891A (fi) * | 1974-05-14 | 1975-12-11 | ||
| JPS5160189A (en) * | 1974-11-09 | 1976-05-25 | Suwa Seikosha Kk | Suishoshindoshi |
| JPS51140065A (en) * | 1975-05-28 | 1976-12-02 | Aisin Seiki Co Ltd | Change gear |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6168522U (fi) | 1986-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4418299A (en) | Face-shear mode quartz crystal vibrators and method of manufacture | |
| US3969641A (en) | Quartz crystal vibrator | |
| JPS583602B2 (ja) | スイシヨウシンドウシ | |
| JP3729249B2 (ja) | 振動片の製造方法、振動片、振動片を有する振動子、発振器及び携帯電話装置 | |
| JPS6025926B2 (ja) | 水晶振動子 | |
| KR20120135058A (ko) | 압전 진동 소자, 압전 진동 소자의 제조 방법, 압전 진동자, 전자 디바이스 및, 전자 기기 | |
| EP0483358A1 (en) | Ultra thin quartz crystal filter element of multiple mode | |
| GB1560537A (en) | Piezoelectric microresonator | |
| US5376221A (en) | Process for mass producing high frequency crystal resonators | |
| JPS6238348Y2 (fi) | ||
| JP2001053036A (ja) | ダイシングブレード及び圧電素板 | |
| JPS6119556Y2 (fi) | ||
| JPS6028406B2 (ja) | 小型輪郭すべり水晶振動子の製造方法 | |
| JPS5850044B2 (ja) | 厚みすべり振動子 | |
| JPH0230207A (ja) | 水晶振動子及びその製造方法 | |
| JP2929107B2 (ja) | 水晶振動子の製造方法 | |
| JPS6364926B2 (fi) | ||
| EP0019632A1 (en) | Quartz crystal resonator | |
| JPS5844649Y2 (ja) | 薄型輪郭すべり振動子 | |
| JPS6410128B2 (fi) | ||
| JPS5847884B2 (ja) | 短辺水晶振動子 | |
| JPH0129088B2 (fi) | ||
| CN117254788A (zh) | 一种微机电系统谐振器 | |
| JPS6016108Y2 (ja) | 音叉型水晶振動子 | |
| JPH0590878A (ja) | 幅縦水晶振動子 |