JPS6237162Y2 - - Google Patents

Info

Publication number

JPS6237162Y2

JPS6237162Y2 JP3967480U JP3967480U JPS6237162Y2 JP S6237162 Y2 JPS6237162 Y2 JP S6237162Y2 JP 3967480 U JP3967480 U JP 3967480U JP 3967480 U JP3967480 U JP 3967480U JP S6237162 Y2 JPS6237162 Y2 JP S6237162Y2

Authority

JP

Japan

Prior art keywords

gas

detector

oxygen concentration

flow rate

measuring device

Prior art date

1980-03-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
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• 239000007789 gas Substances 0.000 claims description 32
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
• 239000001301 oxygen Substances 0.000 claims description 13
• 229910052760 oxygen Inorganic materials 0.000 claims description 13
• 238000005259 measurement Methods 0.000 claims description 4
• 239000007784 solid electrolyte Substances 0.000 claims description 3
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 18
• 239000002184 metal Substances 0.000 description 6
• 238000010586 diagram Methods 0.000 description 5
• 230000000694 effects Effects 0.000 description 2
• 230000004043 responsiveness Effects 0.000 description 2
• CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
• 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
• 239000012530 fluid Substances 0.000 description 1
• 230000004044 response Effects 0.000 description 1
• ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 1