JPS6237154U - - Google Patents
Info
- Publication number
- JPS6237154U JPS6237154U JP12876285U JP12876285U JPS6237154U JP S6237154 U JPS6237154 U JP S6237154U JP 12876285 U JP12876285 U JP 12876285U JP 12876285 U JP12876285 U JP 12876285U JP S6237154 U JPS6237154 U JP S6237154U
- Authority
- JP
- Japan
- Prior art keywords
- main
- valve
- evacuated
- exhaust
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12876285U JPS6237154U (fr) | 1985-08-23 | 1985-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12876285U JPS6237154U (fr) | 1985-08-23 | 1985-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237154U true JPS6237154U (fr) | 1987-03-05 |
Family
ID=31024718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12876285U Pending JPS6237154U (fr) | 1985-08-23 | 1985-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237154U (fr) |
-
1985
- 1985-08-23 JP JP12876285U patent/JPS6237154U/ja active Pending
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