JPS6237083U - - Google Patents

Info

Publication number
JPS6237083U
JPS6237083U JP12811885U JP12811885U JPS6237083U JP S6237083 U JPS6237083 U JP S6237083U JP 12811885 U JP12811885 U JP 12811885U JP 12811885 U JP12811885 U JP 12811885U JP S6237083 U JPS6237083 U JP S6237083U
Authority
JP
Japan
Prior art keywords
discharge electrode
electrode plate
divided
electrode plates
frequency power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12811885U
Other languages
English (en)
Japanese (ja)
Other versions
JPS641958Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12811885U priority Critical patent/JPS641958Y2/ja
Publication of JPS6237083U publication Critical patent/JPS6237083U/ja
Application granted granted Critical
Publication of JPS641958Y2 publication Critical patent/JPS641958Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP12811885U 1985-08-21 1985-08-21 Expired JPS641958Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12811885U JPS641958Y2 (enrdf_load_html_response) 1985-08-21 1985-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12811885U JPS641958Y2 (enrdf_load_html_response) 1985-08-21 1985-08-21

Publications (2)

Publication Number Publication Date
JPS6237083U true JPS6237083U (enrdf_load_html_response) 1987-03-05
JPS641958Y2 JPS641958Y2 (enrdf_load_html_response) 1989-01-18

Family

ID=31023499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12811885U Expired JPS641958Y2 (enrdf_load_html_response) 1985-08-21 1985-08-21

Country Status (1)

Country Link
JP (1) JPS641958Y2 (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001168044A (ja) * 1999-12-14 2001-06-22 Sharp Corp プラズマｃｖｄ装置およびそれを用いた薄膜製造方法並びに薄膜太陽電池の製造方法
JP2009231247A (ja) * 2008-03-25 2009-10-08 Tokyo Electron Ltd プラズマ処理装置及び高周波電力の供給方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001168044A (ja) * 1999-12-14 2001-06-22 Sharp Corp プラズマｃｖｄ装置およびそれを用いた薄膜製造方法並びに薄膜太陽電池の製造方法
JP2009231247A (ja) * 2008-03-25 2009-10-08 Tokyo Electron Ltd プラズマ処理装置及び高周波電力の供給方法

Also Published As

Publication number Publication date
JPS641958Y2 (enrdf_load_html_response) 1989-01-18

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