JPS6237054U - - Google Patents

Info

Publication number
JPS6237054U
JPS6237054U JP12900485U JP12900485U JPS6237054U JP S6237054 U JPS6237054 U JP S6237054U JP 12900485 U JP12900485 U JP 12900485U JP 12900485 U JP12900485 U JP 12900485U JP S6237054 U JPS6237054 U JP S6237054U
Authority
JP
Japan
Prior art keywords
plasma
vacuum chamber
processing apparatus
shower tube
molded article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12900485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0315531Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12900485U priority Critical patent/JPH0315531Y2/ja
Publication of JPS6237054U publication Critical patent/JPS6237054U/ja
Application granted granted Critical
Publication of JPH0315531Y2 publication Critical patent/JPH0315531Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP12900485U 1985-08-24 1985-08-24 Expired JPH0315531Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12900485U JPH0315531Y2 (enrdf_load_stackoverflow) 1985-08-24 1985-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12900485U JPH0315531Y2 (enrdf_load_stackoverflow) 1985-08-24 1985-08-24

Publications (2)

Publication Number Publication Date
JPS6237054U true JPS6237054U (enrdf_load_stackoverflow) 1987-03-05
JPH0315531Y2 JPH0315531Y2 (enrdf_load_stackoverflow) 1991-04-04

Family

ID=31025188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12900485U Expired JPH0315531Y2 (enrdf_load_stackoverflow) 1985-08-24 1985-08-24

Country Status (1)

Country Link
JP (1) JPH0315531Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0315531Y2 (enrdf_load_stackoverflow) 1991-04-04

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