JPS62135430U - - Google Patents

Info

Publication number
JPS62135430U
JPS62135430U JP2313286U JP2313286U JPS62135430U JP S62135430 U JPS62135430 U JP S62135430U JP 2313286 U JP2313286 U JP 2313286U JP 2313286 U JP2313286 U JP 2313286U JP S62135430 U JPS62135430 U JP S62135430U
Authority
JP
Japan
Prior art keywords
forming tank
film forming
cleaning brush
thin film
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2313286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2313286U priority Critical patent/JPS62135430U/ja
Publication of JPS62135430U publication Critical patent/JPS62135430U/ja
Pending legal-status Critical Current

Links

JP2313286U 1986-02-20 1986-02-20 Pending JPS62135430U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2313286U JPS62135430U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2313286U JPS62135430U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Publications (1)

Publication Number Publication Date
JPS62135430U true JPS62135430U (enrdf_load_stackoverflow) 1987-08-26

Family

ID=30821169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2313286U Pending JPS62135430U (enrdf_load_stackoverflow) 1986-02-20 1986-02-20

Country Status (1)

Country Link
JP (1) JPS62135430U (enrdf_load_stackoverflow)

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