JPS6236360B2 - - Google Patents

Info

Publication number
JPS6236360B2
JPS6236360B2 JP80500255A JP50025579A JPS6236360B2 JP S6236360 B2 JPS6236360 B2 JP S6236360B2 JP 80500255 A JP80500255 A JP 80500255A JP 50025579 A JP50025579 A JP 50025579A JP S6236360 B2 JPS6236360 B2 JP S6236360B2
Authority
JP
Japan
Prior art keywords
voltage
beam current
current
transformer
photothyristor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP80500255A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55500307A (ru
Inventor
Sutanisurafu Pyoot Domitoriefu
Gennadeii Iwanoitsuchi Rajin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JPS55500307A publication Critical patent/JPS55500307A/ja
Publication of JPS6236360B2 publication Critical patent/JPS6236360B2/ja
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D90/00Component parts, details or accessories for large containers
    • B65D90/22Safety features
    • B65D90/46Arrangements for carrying off, or preventing the formation of electrostatic charges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R13/00Arrangements for displaying electric variables or waveforms
    • G01R13/20Cathode-ray oscilloscopes
    • G01R13/22Circuits therefor
    • G01R13/26Circuits for controlling the intensity of the electron beam or the colour of the display
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05FSYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10Regulating voltage or current
    • G05F1/12Regulating voltage or current wherein the variable actually regulated by the final control device is ac
    • G05F1/40Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices
    • G05F1/44Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only
    • G05F1/45Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only being controlled rectifiers in series with the load
    • G05F1/455Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only being controlled rectifiers in series with the load with phase control
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/13Solid thermionic cathodes
    • H01J1/135Circuit arrangements therefor, e.g. for temperature control
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241High voltage power supply or regulation circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243Beam current control or regulation circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H5/00Direct voltage accelerators; Accelerators using single pulses
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Electromagnetism (AREA)
  • Particle Accelerators (AREA)
  • Amplifiers (AREA)
  • Control Of Resistance Heating (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
JP80500255A 1979-12-26 1979-12-26 Expired JPS6236360B2 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1979/000133 WO1981001937A1 (en) 1979-12-26 1979-12-26 Device for stabilization of electron beam current

Publications (2)

Publication Number Publication Date
JPS55500307A JPS55500307A (ru) 1980-05-29
JPS6236360B2 true JPS6236360B2 (ru) 1987-08-06

Family

ID=21616574

Family Applications (2)

Application Number Title Priority Date Filing Date
JP80500255A Pending JPS56501818A (ru) 1979-12-26 1979-12-26
JP80500255A Expired JPS6236360B2 (ru) 1979-12-26 1979-12-26

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP80500255A Pending JPS56501818A (ru) 1979-12-26 1979-12-26

Country Status (6)

Country Link
US (1) US4398132A (ru)
JP (2) JPS56501818A (ru)
CH (1) CH653835A5 (ru)
DE (1) DE2953928C2 (ru)
FR (1) FR2490442A1 (ru)
WO (1) WO1981001937A1 (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63134353U (ru) * 1987-02-26 1988-09-02

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3371754D1 (en) * 1983-06-01 1987-07-02 Inoue Japax Res Beamed energy radiation control method and apparatus, and processes and equipment comprising said method and apparatus respectively
US4687970A (en) * 1985-05-31 1987-08-18 Hughes Aircraft Company Digital cathode current control loop
GB2178203A (en) * 1985-07-26 1987-02-04 Radiation Dynamics Regulating electron beam emission
US4754200A (en) * 1985-09-09 1988-06-28 Applied Materials, Inc. Systems and methods for ion source control in ion implanters
US4743767A (en) * 1985-09-09 1988-05-10 Applied Materials, Inc. Systems and methods for ion implantation
US5401973A (en) * 1992-12-04 1995-03-28 Atomic Energy Of Canada Limited Industrial material processing electron linear accelerator
DE19522221A1 (de) * 1995-06-20 1997-01-02 Zeiss Carl Fa Verfahren zur Regelung des Emissionsstromes einer Elektronenquelle und Elektronenquelle mit einer Regelung des Emissionsstromes
KR20000009579A (ko) * 1998-07-27 2000-02-15 박진규 기체 레이저와 전자빔을 이용한 유해 가스 정화방법 및 장치
CN103760106A (zh) * 2014-01-28 2014-04-30 国家电网公司 一种覆冰模具、利用其测量覆冰剪切力的装置及方法
CN107572139A (zh) * 2017-10-27 2018-01-12 山东蓝孚高能物理技术股份有限公司 一种电子加速管预处理及存放装置
RU2745110C1 (ru) * 2020-03-18 2021-03-22 Анатолий Викторович Мазин Устройство управления плавным накалом катодов электровакуумных приборов

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3293483A (en) * 1962-01-08 1966-12-20 Siemens Ag Radiation controlled electron radiation source
FR1530197A (fr) * 1966-07-05 1968-06-21 Ass Elect Ind Canon à électrons
US3611017A (en) * 1970-03-10 1971-10-05 Int Crystal Mfg Co Regulated magnetron power supply
CH525597A (de) * 1970-05-21 1972-07-15 Haefely & Cie Ag Emil Steuereinrichtung für das Einschusssystem eines Elektronenbeschleunigers
DE2325808C2 (de) * 1973-05-22 1983-07-14 Leybold-Heraeus GmbH, 5000 Köln Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers
DE2844183C2 (de) * 1978-10-10 1984-09-13 Messer Griesheim Gmbh, 6000 Frankfurt Verfahren und Einrichtung zum Einstellen des Kathodenheizstromes in einem technischen Elektronenstrahl-Gerät

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63134353U (ru) * 1987-02-26 1988-09-02

Also Published As

Publication number Publication date
WO1981001937A1 (en) 1981-07-09
CH653835A5 (en) 1986-01-15
FR2490442A1 (fr) 1982-03-19
JPS56501818A (ru) 1981-12-10
FR2490442B1 (ru) 1984-06-08
DE2953928C2 (de) 1985-07-11
JPS55500307A (ru) 1980-05-29
DE2953928T1 (ru) 1982-02-04
US4398132A (en) 1983-08-09

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