JPS6236065U - - Google Patents
Info
- Publication number
- JPS6236065U JPS6236065U JP12085885U JP12085885U JPS6236065U JP S6236065 U JPS6236065 U JP S6236065U JP 12085885 U JP12085885 U JP 12085885U JP 12085885 U JP12085885 U JP 12085885U JP S6236065 U JPS6236065 U JP S6236065U
- Authority
- JP
- Japan
- Prior art keywords
- side electrode
- target side
- vacuum chamber
- covered
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012777 electrically insulating material Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12085885U JPS6236065U (ko) | 1985-08-08 | 1985-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12085885U JPS6236065U (ko) | 1985-08-08 | 1985-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236065U true JPS6236065U (ko) | 1987-03-03 |
Family
ID=31009572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12085885U Pending JPS6236065U (ko) | 1985-08-08 | 1985-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236065U (ko) |
-
1985
- 1985-08-08 JP JP12085885U patent/JPS6236065U/ja active Pending