JPS6293365U - - Google Patents
Info
- Publication number
- JPS6293365U JPS6293365U JP18154285U JP18154285U JPS6293365U JP S6293365 U JPS6293365 U JP S6293365U JP 18154285 U JP18154285 U JP 18154285U JP 18154285 U JP18154285 U JP 18154285U JP S6293365 U JPS6293365 U JP S6293365U
- Authority
- JP
- Japan
- Prior art keywords
- target
- ground electrode
- electrode
- insulating material
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 2
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18154285U JPS6293365U (ko) | 1985-11-27 | 1985-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18154285U JPS6293365U (ko) | 1985-11-27 | 1985-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6293365U true JPS6293365U (ko) | 1987-06-15 |
Family
ID=31126506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18154285U Pending JPS6293365U (ko) | 1985-11-27 | 1985-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6293365U (ko) |
-
1985
- 1985-11-27 JP JP18154285U patent/JPS6293365U/ja active Pending
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