JPS6235225A - 直熱型流量センサ - Google Patents
直熱型流量センサInfo
- Publication number
- JPS6235225A JPS6235225A JP60174341A JP17434185A JPS6235225A JP S6235225 A JPS6235225 A JP S6235225A JP 60174341 A JP60174341 A JP 60174341A JP 17434185 A JP17434185 A JP 17434185A JP S6235225 A JPS6235225 A JP S6235225A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- heat insulating
- resistor
- heat
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000012528 membrane Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 239000000853 adhesive Substances 0.000 abstract description 10
- 230000001070 adhesive effect Effects 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 8
- 239000004642 Polyimide Substances 0.000 abstract description 7
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052863 mullite Inorganic materials 0.000 abstract description 7
- 229920001721 polyimide Polymers 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 6
- 230000005496 eutectics Effects 0.000 abstract description 3
- 229910000679 solder Inorganic materials 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 229910015365 Au—Si Inorganic materials 0.000 abstract 1
- 230000003187 abdominal effect Effects 0.000 description 22
- 230000001419 dependent effect Effects 0.000 description 17
- 239000011810 insulating material Substances 0.000 description 8
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 238000002485 combustion reaction Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 210000001015 abdomen Anatomy 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012774 insulation material Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000000446 fuel Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229920006015 heat resistant resin Polymers 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60174341A JPS6235225A (ja) | 1985-08-09 | 1985-08-09 | 直熱型流量センサ |
| US06/894,895 US4756190A (en) | 1985-08-09 | 1986-08-08 | Direct-heated flow measuring apparatus having uniform characteristics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60174341A JPS6235225A (ja) | 1985-08-09 | 1985-08-09 | 直熱型流量センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6235225A true JPS6235225A (ja) | 1987-02-16 |
| JPH0441930B2 JPH0441930B2 (enrdf_load_html_response) | 1992-07-09 |
Family
ID=15976943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60174341A Granted JPS6235225A (ja) | 1985-08-09 | 1985-08-09 | 直熱型流量センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6235225A (enrdf_load_html_response) |
-
1985
- 1985-08-09 JP JP60174341A patent/JPS6235225A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441930B2 (enrdf_load_html_response) | 1992-07-09 |
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