JPS6234715B2 - - Google Patents
Info
- Publication number
- JPS6234715B2 JPS6234715B2 JP58096727A JP9672783A JPS6234715B2 JP S6234715 B2 JPS6234715 B2 JP S6234715B2 JP 58096727 A JP58096727 A JP 58096727A JP 9672783 A JP9672783 A JP 9672783A JP S6234715 B2 JPS6234715 B2 JP S6234715B2
- Authority
- JP
- Japan
- Prior art keywords
- processing
- energy
- ceramics according
- machining
- surface area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012545 processing Methods 0.000 claims description 59
- 239000000919 ceramic Substances 0.000 claims description 53
- 238000003754 machining Methods 0.000 claims description 48
- 239000012530 fluid Substances 0.000 claims description 36
- 239000002253 acid Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 22
- 238000003672 processing method Methods 0.000 claims description 18
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 15
- 238000005520 cutting process Methods 0.000 claims description 12
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 6
- 239000006061 abrasive grain Substances 0.000 claims description 5
- 235000011121 sodium hydroxide Nutrition 0.000 claims description 5
- 239000003792 electrolyte Substances 0.000 claims description 4
- 235000011118 potassium hydroxide Nutrition 0.000 claims description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 2
- 229910017604 nitric acid Inorganic materials 0.000 claims description 2
- 238000007654 immersion Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000005868 electrolysis reaction Methods 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- 150000007513 acids Chemical class 0.000 description 7
- 239000003513 alkali Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- -1 oxides Chemical class 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004814 ceramic processing Methods 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001784 detoxification Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 150000003346 selenoethers Chemical class 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58096727A JPS59223282A (ja) | 1983-05-30 | 1983-05-30 | セラミツクスの加工方法 |
| DE8484303619T DE3477590D1 (en) | 1983-05-30 | 1984-05-30 | Method of and apparatus for machining ceramic materials |
| EP84303619A EP0131367B1 (en) | 1983-05-30 | 1984-05-30 | Method of and apparatus for machining ceramic materials |
| US06/615,416 US4559115A (en) | 1983-05-30 | 1984-05-30 | Method of and apparatus for machining ceramic materials |
| DE198484303619T DE131367T1 (de) | 1983-05-30 | 1984-05-30 | Verfahren und einrichtung zum bearbeiten von keramischen werkstoffen. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58096727A JPS59223282A (ja) | 1983-05-30 | 1983-05-30 | セラミツクスの加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59223282A JPS59223282A (ja) | 1984-12-15 |
| JPS6234715B2 true JPS6234715B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-28 |
Family
ID=14172760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58096727A Granted JPS59223282A (ja) | 1983-05-30 | 1983-05-30 | セラミツクスの加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59223282A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62294463A (ja) * | 1986-06-12 | 1987-12-21 | Hokkai Koki Kk | 金属材の連続粉体塗装装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2617842B2 (ja) * | 1991-10-18 | 1997-06-04 | 関西電力株式会社 | 石材の電気的破壊装置 |
| JP4809509B2 (ja) * | 1998-10-02 | 2011-11-09 | 財団法人ファインセラミックスセンター | セラミックス加工用工具。 |
| JP6010827B2 (ja) * | 2012-05-10 | 2016-10-19 | 株式会社東京精密 | ダイシング装置及びダイシング方法 |
| CN106113291A (zh) * | 2016-06-27 | 2016-11-16 | 哈尔滨工业大学 | 一种微波切割装置 |
| JP6218052B2 (ja) * | 2016-09-16 | 2017-10-25 | 株式会社東京精密 | ダイシング装置及びダイシング方法 |
-
1983
- 1983-05-30 JP JP58096727A patent/JPS59223282A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62294463A (ja) * | 1986-06-12 | 1987-12-21 | Hokkai Koki Kk | 金属材の連続粉体塗装装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59223282A (ja) | 1984-12-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0131367B1 (en) | Method of and apparatus for machining ceramic materials | |
| RU2264894C2 (ru) | Электрохимическая обработка | |
| CA2088686C (en) | Orbital electrochemical machining | |
| JP5384494B2 (ja) | 薄肉成形ワークをハイブリッド加工するための装置及び方法 | |
| JP4906229B2 (ja) | ブリスクをニアネットシェイプ高速荒加工するための方法及び装置 | |
| Ramesh Babu et al. | Investigations on laser dressing of grinding wheels—part I: preliminary study | |
| CN104128783B (zh) | 一种单刃金刚石微铣刀的制造方法 | |
| JP6433344B2 (ja) | 高周波振動援用プラズマ放電研削装置及びその方法 | |
| Saxena et al. | Overview of hybrid machining processes | |
| Saxena et al. | Electrochemical Based Hybrid Machining A2-Luo, Xichun | |
| JPS6234715B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| CN104772535A (zh) | 开放式三维流道高速电弧放电层扫加工方法 | |
| Mahamood et al. | Advanced noncontact cutting and joining technologies | |
| CN102172833B (zh) | 基于放电诱导可控烧蚀的非导电工程陶瓷磨削加工方法 | |
| CN110116245B (zh) | 一种氢脆化辅助超声加工设备及方法 | |
| JPH0423609B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| CN1025595C (zh) | 一种电加工设备(电熔爆机床) | |
| Alting et al. | Nontraditional manufacturing processes | |
| CN210412921U (zh) | 一种氢脆化辅助超声加工设备 | |
| CN112809108B (zh) | 离子/分子震荡放电加工装置及加工方法 | |
| JP6372068B2 (ja) | 微細工具のリコンディショニング装置およびリコンディショニング機能付き加工装置 | |
| CN110355620B (zh) | 陶瓷材质上芬顿辅助的旋转超声高效抛光法 | |
| JP2000204356A (ja) | 加工液及び除去加工用の加工液又は複合電解研磨方法並びに金型の製造方法又は超電導加速空洞の製造方法 | |
| Arunachalam et al. | Advances and applications of nontraditional machining practices for metals and composite materials | |
| Mahardika et al. | Advanced Machining Processes |