JPS6234243Y2 - - Google Patents
Info
- Publication number
- JPS6234243Y2 JPS6234243Y2 JP18077880U JP18077880U JPS6234243Y2 JP S6234243 Y2 JPS6234243 Y2 JP S6234243Y2 JP 18077880 U JP18077880 U JP 18077880U JP 18077880 U JP18077880 U JP 18077880U JP S6234243 Y2 JPS6234243 Y2 JP S6234243Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- scale
- cursor
- reader
- diffracted light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000000903 blocking effect Effects 0.000 claims description 4
- 230000001427 coherent effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 9
- 239000011295 pitch Substances 0.000 description 7
- 230000008859 change Effects 0.000 description 4
- 230000010363 phase shift Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18077880U JPS6234243Y2 (ru) | 1980-12-16 | 1980-12-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18077880U JPS6234243Y2 (ru) | 1980-12-16 | 1980-12-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57102806U JPS57102806U (ru) | 1982-06-24 |
JPS6234243Y2 true JPS6234243Y2 (ru) | 1987-09-01 |
Family
ID=29977671
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18077880U Expired JPS6234243Y2 (ru) | 1980-12-16 | 1980-12-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6234243Y2 (ru) |
-
1980
- 1980-12-16 JP JP18077880U patent/JPS6234243Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS57102806U (ru) | 1982-06-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9097511B2 (en) | Displacement detecting device with a polarization change to a twice-diffracted beam | |
EP1435510A1 (en) | Grating interference type optical encoder | |
JP5618898B2 (ja) | 変位検出装置 | |
JP2862417B2 (ja) | 変位測定装置及び方法 | |
JP3254737B2 (ja) | エンコーダー | |
JP2619566B2 (ja) | 光学式位置検出器 | |
JP2764373B2 (ja) | 多座標測定装置 | |
JPS58191907A (ja) | 移動量測定方法 | |
JPH03279812A (ja) | 回析干渉型エンコーダ | |
JPH046884B2 (ru) | ||
JPS6234243Y2 (ru) | ||
JPS632323B2 (ru) | ||
JPS6128923B2 (ru) | ||
JP6111852B2 (ja) | エンコーダ装置 | |
JPS6234244Y2 (ru) | ||
JPH06174424A (ja) | 測長または測角装置 | |
JPS6234246Y2 (ru) | ||
JPH05256666A (ja) | ロータリーエンコーダー | |
JPS6213603B2 (ru) | ||
JP2503561B2 (ja) | レ―ザ―干渉式エンコ―ダ | |
JPH0599638A (ja) | 測角装置 | |
JPS6234242Y2 (ru) | ||
JP2718439B2 (ja) | 測長または測角装置 | |
JPS5999220A (ja) | 光電式のエンコ−ダ | |
JPS6244332Y2 (ru) |