JPS6233320Y2 - - Google Patents
Info
- Publication number
- JPS6233320Y2 JPS6233320Y2 JP10692482U JP10692482U JPS6233320Y2 JP S6233320 Y2 JPS6233320 Y2 JP S6233320Y2 JP 10692482 U JP10692482 U JP 10692482U JP 10692482 U JP10692482 U JP 10692482U JP S6233320 Y2 JPS6233320 Y2 JP S6233320Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve plate
- sealing valve
- wafer
- arm
- airtight container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007723 transport mechanism Effects 0.000 claims description 24
- 238000007789 sealing Methods 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 34
- 238000009792 diffusion process Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10692482U JPS5911445U (ja) | 1982-07-14 | 1982-07-14 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10692482U JPS5911445U (ja) | 1982-07-14 | 1982-07-14 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5911445U JPS5911445U (ja) | 1984-01-24 |
| JPS6233320Y2 true JPS6233320Y2 (enrdf_load_html_response) | 1987-08-26 |
Family
ID=30250025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10692482U Granted JPS5911445U (ja) | 1982-07-14 | 1982-07-14 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5911445U (enrdf_load_html_response) |
-
1982
- 1982-07-14 JP JP10692482U patent/JPS5911445U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5911445U (ja) | 1984-01-24 |
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