JPS6233314Y2 - - Google Patents
Info
- Publication number
- JPS6233314Y2 JPS6233314Y2 JP3097783U JP3097783U JPS6233314Y2 JP S6233314 Y2 JPS6233314 Y2 JP S6233314Y2 JP 3097783 U JP3097783 U JP 3097783U JP 3097783 U JP3097783 U JP 3097783U JP S6233314 Y2 JPS6233314 Y2 JP S6233314Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- organic solvent
- tank
- quartz glass
- vapor tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003960 organic solvent Substances 0.000 claims description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 238000001035 drying Methods 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 14
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- -1 trichlene Chemical compound 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3097783U JPS59138232U (ja) | 1983-03-03 | 1983-03-03 | ベ−パ乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3097783U JPS59138232U (ja) | 1983-03-03 | 1983-03-03 | ベ−パ乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59138232U JPS59138232U (ja) | 1984-09-14 |
| JPS6233314Y2 true JPS6233314Y2 (enrdf_load_stackoverflow) | 1987-08-26 |
Family
ID=30161835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3097783U Granted JPS59138232U (ja) | 1983-03-03 | 1983-03-03 | ベ−パ乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59138232U (enrdf_load_stackoverflow) |
-
1983
- 1983-03-03 JP JP3097783U patent/JPS59138232U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59138232U (ja) | 1984-09-14 |
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