JPS6233280Y2 - - Google Patents

Info

Publication number

JPS6233280Y2

JPS6233280Y2 JP13832181U JP13832181U JPS6233280Y2 JP S6233280 Y2 JPS6233280 Y2 JP S6233280Y2 JP 13832181 U JP13832181 U JP 13832181U JP 13832181 U JP13832181 U JP 13832181U JP S6233280 Y2 JPS6233280 Y2 JP S6233280Y2

Authority

JP

Japan

Prior art keywords

heater

opening

source chamber

source

end surface

Prior art date

1981-09-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
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• GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
• 230000008020 evaporation Effects 0.000 claims description 3
• 238000001704 evaporation Methods 0.000 claims description 3
• 229910052715 tantalum Inorganic materials 0.000 claims description 3
• 210000004027 cell Anatomy 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 229910052799 carbon Inorganic materials 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 210000001787 dendrite Anatomy 0.000 description 1
• 230000008021 deposition Effects 0.000 description 1
• 235000012489 doughnuts Nutrition 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 239000003779 heat-resistant material Substances 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 150000004767 nitrides Chemical class 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 238000003466 welding Methods 0.000 description 1