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Priority to JP16293183UpriorityCriticalpatent/JPS5983592U/ja
Publication of JPS5983592UpublicationCriticalpatent/JPS5983592U/ja
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Publication of JPS6232880Y2publicationCriticalpatent/JPS6232880Y2/ja
Magnetically floating carrier system with carriage below rail support structure and load above support structure with balances between carriage and load