JPS6231900U - - Google Patents
Info
- Publication number
- JPS6231900U JPS6231900U JP12158585U JP12158585U JPS6231900U JP S6231900 U JPS6231900 U JP S6231900U JP 12158585 U JP12158585 U JP 12158585U JP 12158585 U JP12158585 U JP 12158585U JP S6231900 U JPS6231900 U JP S6231900U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- microwave
- plasma processing
- plasma generation
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12158585U JPS6231900U (cs) | 1985-08-09 | 1985-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12158585U JPS6231900U (cs) | 1985-08-09 | 1985-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6231900U true JPS6231900U (cs) | 1987-02-25 |
Family
ID=31010996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12158585U Pending JPS6231900U (cs) | 1985-08-09 | 1985-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231900U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5884431A (ja) * | 1981-11-13 | 1983-05-20 | Nec Corp | プラズマエツチング装置 |
| JPS6016424A (ja) * | 1983-07-08 | 1985-01-28 | Fujitsu Ltd | マイクロ波プラズマ処理方法及びその装置 |
-
1985
- 1985-08-09 JP JP12158585U patent/JPS6231900U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5884431A (ja) * | 1981-11-13 | 1983-05-20 | Nec Corp | プラズマエツチング装置 |
| JPS6016424A (ja) * | 1983-07-08 | 1985-01-28 | Fujitsu Ltd | マイクロ波プラズマ処理方法及びその装置 |
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