JPH03115664U - - Google Patents
Info
- Publication number
- JPH03115664U JPH03115664U JP2302390U JP2302390U JPH03115664U JP H03115664 U JPH03115664 U JP H03115664U JP 2302390 U JP2302390 U JP 2302390U JP 2302390 U JP2302390 U JP 2302390U JP H03115664 U JPH03115664 U JP H03115664U
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- case
- processing
- hood
- reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000001816 cooling Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 238000001020 plasma etching Methods 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2302390U JPH03115664U (cs) | 1990-03-07 | 1990-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2302390U JPH03115664U (cs) | 1990-03-07 | 1990-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115664U true JPH03115664U (cs) | 1991-11-29 |
Family
ID=31526026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2302390U Pending JPH03115664U (cs) | 1990-03-07 | 1990-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115664U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000024047A1 (fr) * | 1998-10-22 | 2000-04-27 | Kabushiki Kaisha Ultraclean Technology Research Institute | Appareil de fabrication de semiconducteurs |
| JP2007169977A (ja) * | 2005-12-20 | 2007-07-05 | Nippon Comsys Corp | 道路標識 |
-
1990
- 1990-03-07 JP JP2302390U patent/JPH03115664U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000024047A1 (fr) * | 1998-10-22 | 2000-04-27 | Kabushiki Kaisha Ultraclean Technology Research Institute | Appareil de fabrication de semiconducteurs |
| EP1065709A4 (en) * | 1998-10-22 | 2007-10-31 | Ultraclean Technology Res Inst | APPARATUS FOR MANUFACTURING SEMICONDUCTORS |
| JP2007169977A (ja) * | 2005-12-20 | 2007-07-05 | Nippon Comsys Corp | 道路標識 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH03115664U (cs) | ||
| JP2815365B2 (ja) | 段階的に排気される真空シール装置および粒子ビームリトグラフィー系 | |
| JPH0317907B2 (cs) | ||
| JPH065418Y2 (ja) | 超高真空導入用ランプハウジング | |
| JPH01104604U (cs) | ||
| JPH0348853U (cs) | ||
| JPS6384588U (cs) | ||
| JPS6370651U (cs) | ||
| JPS61135500U (cs) | ||
| JPS63149941U (cs) | ||
| JPH0410335U (cs) | ||
| JPS6379637U (cs) | ||
| JPH0425229U (cs) | ||
| JPH02127030U (cs) | ||
| JPS62110266U (cs) | ||
| JPH0415832U (cs) | ||
| JPS6420984U (cs) | ||
| JPH0583380U (ja) | チタンサブリメーションポンプ | |
| JPS58117053U (ja) | 電界電離型イオン源 | |
| JPS61133558U (cs) | ||
| JPS6394521U (cs) | ||
| JPS63193832U (cs) | ||
| JPH01157152U (cs) | ||
| JPH0298629U (cs) | ||
| JPH0230098U (cs) |