JPS6231857U - - Google Patents
Info
- Publication number
- JPS6231857U JPS6231857U JP12439785U JP12439785U JPS6231857U JP S6231857 U JPS6231857 U JP S6231857U JP 12439785 U JP12439785 U JP 12439785U JP 12439785 U JP12439785 U JP 12439785U JP S6231857 U JPS6231857 U JP S6231857U
- Authority
- JP
- Japan
- Prior art keywords
- target
- ion source
- perforated
- metal
- plasma chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 229910021645 metal ion Inorganic materials 0.000 claims 1
- 238000007737 ion beam deposition Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12439785U JPS6231857U (nl) | 1985-08-12 | 1985-08-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12439785U JPS6231857U (nl) | 1985-08-12 | 1985-08-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6231857U true JPS6231857U (nl) | 1987-02-25 |
Family
ID=31016371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12439785U Pending JPS6231857U (nl) | 1985-08-12 | 1985-08-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6231857U (nl) |
-
1985
- 1985-08-12 JP JP12439785U patent/JPS6231857U/ja active Pending
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