JPS6159661U - - Google Patents
Info
- Publication number
- JPS6159661U JPS6159661U JP14532084U JP14532084U JPS6159661U JP S6159661 U JPS6159661 U JP S6159661U JP 14532084 U JP14532084 U JP 14532084U JP 14532084 U JP14532084 U JP 14532084U JP S6159661 U JPS6159661 U JP S6159661U
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- type ion
- resistance heating
- evaporation source
- heating evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 8
- 230000008020 evaporation Effects 0.000 claims description 7
- 238000001704 evaporation Methods 0.000 claims description 7
- 238000007733 ion plating Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14532084U JPS6159661U (nl) | 1984-09-26 | 1984-09-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14532084U JPS6159661U (nl) | 1984-09-26 | 1984-09-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6159661U true JPS6159661U (nl) | 1986-04-22 |
Family
ID=30703575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14532084U Pending JPS6159661U (nl) | 1984-09-26 | 1984-09-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6159661U (nl) |
-
1984
- 1984-09-26 JP JP14532084U patent/JPS6159661U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6159661U (nl) | ||
JPS6147067U (ja) | 被膜形成装置 | |
JPS6241378B2 (nl) | ||
JP2592617B2 (ja) | イオン・プレーテイング装置 | |
JPH017972Y2 (nl) | ||
JPS62122209A (ja) | 薄膜形成装置 | |
JPS6328515Y2 (nl) | ||
JPS6311557U (nl) | ||
JPS6359366U (nl) | ||
JPS6360300U (nl) | ||
JPS6231857U (nl) | ||
JPS62160454U (nl) | ||
JPS6251735U (nl) | ||
JPH01161260U (nl) | ||
JPS62182970U (nl) | ||
JPH02137745U (nl) | ||
JPH03294474A (ja) | 膜形成装置 | |
JPH0173747U (nl) | ||
JPH0322063U (nl) | ||
JPS6319564U (nl) | ||
JPS61272370A (ja) | 薄膜形成装置 | |
JPH04246168A (ja) | 化合物薄膜の形成方法及び装置 | |
JPS62110264U (nl) | ||
JPH0186054U (nl) | ||
JPH0173749U (nl) |