JPS6230710B2 - - Google Patents

Info

Publication number
JPS6230710B2
JPS6230710B2 JP5464481A JP5464481A JPS6230710B2 JP S6230710 B2 JPS6230710 B2 JP S6230710B2 JP 5464481 A JP5464481 A JP 5464481A JP 5464481 A JP5464481 A JP 5464481A JP S6230710 B2 JPS6230710 B2 JP S6230710B2
Authority
JP
Japan
Prior art keywords
electrode
gaas
type
layer
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5464481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57169268A (en
Inventor
Kotaro Mitsui
Susumu Yoshida
Takao Oda
Masahiro Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5464481A priority Critical patent/JPS57169268A/ja
Publication of JPS57169268A publication Critical patent/JPS57169268A/ja
Publication of JPS6230710B2 publication Critical patent/JPS6230710B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/62—Electrodes ohmically coupled to a semiconductor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01015—Phosphorus [P]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01047—Silver [Ag]

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Led Devices (AREA)
JP5464481A 1981-04-10 1981-04-10 Ohmic electrode material of n type 3-5 group compound semiconductor and formation of ohmic electrode therewith Granted JPS57169268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5464481A JPS57169268A (en) 1981-04-10 1981-04-10 Ohmic electrode material of n type 3-5 group compound semiconductor and formation of ohmic electrode therewith

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5464481A JPS57169268A (en) 1981-04-10 1981-04-10 Ohmic electrode material of n type 3-5 group compound semiconductor and formation of ohmic electrode therewith

Publications (2)

Publication Number Publication Date
JPS57169268A JPS57169268A (en) 1982-10-18
JPS6230710B2 true JPS6230710B2 (enrdf_load_stackoverflow) 1987-07-03

Family

ID=12976478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5464481A Granted JPS57169268A (en) 1981-04-10 1981-04-10 Ohmic electrode material of n type 3-5 group compound semiconductor and formation of ohmic electrode therewith

Country Status (1)

Country Link
JP (1) JPS57169268A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07105406B2 (ja) * 1983-12-21 1995-11-13 富士通株式会社 半導体装置の製法
JP5366134B2 (ja) * 2009-05-01 2013-12-11 行政院原子能委員会核能研究所 銀含有金属オーミック接触電極

Also Published As

Publication number Publication date
JPS57169268A (en) 1982-10-18

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