JPS6230695B2 - - Google Patents

Info

Publication number
JPS6230695B2
JPS6230695B2 JP57051996A JP5199682A JPS6230695B2 JP S6230695 B2 JPS6230695 B2 JP S6230695B2 JP 57051996 A JP57051996 A JP 57051996A JP 5199682 A JP5199682 A JP 5199682A JP S6230695 B2 JPS6230695 B2 JP S6230695B2
Authority
JP
Japan
Prior art keywords
chute
section
test
semiconductor devices
test head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57051996A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58168249A (ja
Inventor
Naohiko Urasaki
Masatoshi Mishima
Shigeki Takeo
Iwao Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57051996A priority Critical patent/JPS58168249A/ja
Publication of JPS58168249A publication Critical patent/JPS58168249A/ja
Publication of JPS6230695B2 publication Critical patent/JPS6230695B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chutes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP57051996A 1982-03-30 1982-03-30 半導体装置用試験装置 Granted JPS58168249A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57051996A JPS58168249A (ja) 1982-03-30 1982-03-30 半導体装置用試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57051996A JPS58168249A (ja) 1982-03-30 1982-03-30 半導体装置用試験装置

Publications (2)

Publication Number Publication Date
JPS58168249A JPS58168249A (ja) 1983-10-04
JPS6230695B2 true JPS6230695B2 (enrdf_load_stackoverflow) 1987-07-03

Family

ID=12902454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57051996A Granted JPS58168249A (ja) 1982-03-30 1982-03-30 半導体装置用試験装置

Country Status (1)

Country Link
JP (1) JPS58168249A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6196378U (enrdf_load_stackoverflow) * 1984-11-29 1986-06-20
JPS62116546U (enrdf_load_stackoverflow) * 1986-01-16 1987-07-24

Also Published As

Publication number Publication date
JPS58168249A (ja) 1983-10-04

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