JPS62293535A - Surface processing method for copied master - Google Patents

Abstract

PURPOSE:To improve the mass productivity and pattern transfer performance by coating a high polymer resin film to an electronic plating face of a master mold transferring pattern information so as to improve the removal of the transferred light curing resin pattern from the master. CONSTITUTION:A transfer master mold 10 comprising a medium disc 16 whose axial center is projected and a pattern information section 17 engraved by concentric track guide grooves 12 is heated to 45-50 deg.C, a solvent of 0.1% concentration made by solving a chip polyethylene resin into a xylene solution whose temperature is 45 deg.C or over is dropped onto the electric plating film of the guide groove 12, the master mold 10 is driven at 3,000rpm to apply spin coating. A disk base 11 aligned to the master mold 10 is pressed, the expanded acrylic group resin layer 13 of the information section 17 is cured by the ultraviolet ray radiationlight source 14 at the rear side, the result is subject to heat treatment and drying for 15min under a nitrogen atmosphere at 200 deg.C to form a polyethylene film whose thickness is 0.01mum or the like, then the base 11 is removed, and since the polyethylene has the adhesive force to the acryl, the excellent removal performance is obtained.

Description

[Detailed Description of the Invention] 3. Detailed Description of the Invention [Summary] In the production of an optical disc substrate used for recording and reproducing optical information, matrix pattern information is transferred to a photocuring reaction resin layer using a stamping method. In the process, the surface of the transfer matrix is coated with a polymer resin film to improve the releasability of the matrix, thereby improving mass productivity and pattern transferability.

[Industrial application field]

The present invention relates to a method for surface treatment of a replication master mold used in manufacturing optical disk substrates.

Optical disks that record high-density information using laser light have a large storage capacity, and have been put into practical use as optical disk memories that can record information or reproduce recorded information without contact with an optical or magneto-optical head.

In the early stages of manufacturing, the substrate used to record such optical information contains matrix pattern information (trunk guide grooves and address information) of fine irregularities that are essential for detecting and controlling the track position for the magneto-optical head of the optical disk. ) is formed by stamp transfer onto the photocurable resin layer.

Subsequently, a magneto-optical recording medium is deposited on the entire surface of the pattern information transfer surface of the stamp transfer. The present invention improves mass productivity and pattern transferability by improving the separation of the transferred photocurable resin pattern from the matrix in the step of transferring the matrix pattern information to the photocurable reactive resin layer.

[Conventional technology]

Figure 1 is a cross-sectional view of the optical disc substrate after transfer, and Figure 2 is a basic configuration diagram (cross-sectional view) for transferring matrix pattern information.
It is.

In the figure, the mother mold or transfer mother mold 10 has a carrier disk 16 with its axial center protruding. It also includes a matrix pattern information section 17 in which concentric or spiral track guide grooves 12 are engraved. A transfer matrix 1o is placed.

The track guide groove 12 of the matrix pattern information section F is as follows.

This is a nickel (Ni) electroformed film formed by photolithography.

By curing the pre-crushed resin layer 13 and peeling the substrate 11 from the mold 10 after curing and aging, the entire surface of the substrate 21 containing the optical disc base having the pattern transfer resin layer 15 as shown in FIG. An optical information recording medium film is formed by depositing a magnetic alloy film made of a terbium-cobalt-iron alloy.

In order to improve the mold separation (mold releasability) of 15 from the matrix 10.

Oxidation treatment was performed using plasma sputtering.

[Problem that the invention seeks to solve]

The plasma oxidation treatment for improving releasability with
The mold releasability is not excellent, and therefore the intended track guide groove 12
There is a problem that the image is not transcribed.

[Means for solving problems]

In the production of an optical disk substrate, in which a spreading resin layer pressed against a matrix is irradiated with light and matrix pattern information is transferred by a curing reaction of the spreading resin layer.

The above-mentioned problems have been solved by the surface treatment method for a replicating matrix of the present invention, in which the electroformed film surface of the matrix onto which pattern information is transferred is coated with a film of, for example, polyethylene resin.

[Effect]

The surface treatment of the present invention takes advantage of the fact that polymer resins, such as polyethylene resin, do not exhibit adhesive strength to other resins, and by applying this to the transfer surface of the matrix pattern information, photocuring is possible. This improves the releasability of the reaction spreading resin layer.

The coating treatment with the polyethylene resin has the advantage that it can be performed by an extremely simple means compared to the conventional oxidation treatment of the surface of the matrix by plasma sputtering.

〔Example〕

Since polyethylene resin is difficult to dissolve in common solvents at room temperature, it is heated to a temperature at which it can be dissolved.

In addition, as a solvent for dissolving the resin, for example, xylene solution,
Use by heating to at least 45°C or higher.

That is, to prepare a polyethylene solution to be coated on the electroformed film surface of the transfer matrix, first, a chip-shaped polyethylene resin is added to a xylene solution heated to 45° C. or higher to prepare a 0.1% solution at 4°C.

Next, the transfer matrix is heated to a temperature of 45 to 50"C, and a solution having the above concentration is dropped onto the surface of the electroformed film on which the pattern information of the matrix is formed to perform spin coding.

The rotational speed of the matrix during spin code is approximately 300 PPM.

If the mother mold of the coat is dried by heat treatment in a nitrogen atmosphere at 200° C. for 15 minutes, a polyethylene film having a thickness of about 0.01 μm is formed.

Using a transfer matrix on which the polymer resin film is formed,
When the master track guide groove pattern was transferred by stamp on a trial basis, it was confirmed that the mold releasability was extremely good and the transfer performance of the transfer pattern was excellent.

〔Effect of the invention〕

According to the surface treatment method for a replica matrix of the present invention, the replication matrix can be produced by an extremely simple means, with good mold releasability, and which is suitable for mass production. surface treatment is possible.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of the optical disc substrate after transfer. FIG. 2 is a basic configuration diagram for transferring matrix pattern information. In the figure, 10 is a transfer matrix (matrix). 11 is a disk board. 12 is a guide groove (matrix pattern information). 13 is a spreading resin layer, and 14 is a light source.

Claims (1)

[Scope of Claims] In the production of an optical disk substrate, in which a spreading resin layer pressed against a matrix is irradiated with light and matrix pattern information is transferred by a curing reaction of the spreading resin layer, the matrix onto which pattern information is transferred; A method for surface treatment of a replication master mold, characterized by coating the electroformed surface of the mold with a polymer resin film.