JPS62293202A - Manufacture of tapered optical waveguide - Google Patents
Manufacture of tapered optical waveguideInfo
- Publication number
- JPS62293202A JPS62293202A JP61136553A JP13655386A JPS62293202A JP S62293202 A JPS62293202 A JP S62293202A JP 61136553 A JP61136553 A JP 61136553A JP 13655386 A JP13655386 A JP 13655386A JP S62293202 A JPS62293202 A JP S62293202A
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- substrate
- tapered
- plate
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 239000002253 acid Substances 0.000 claims abstract description 13
- XPPKVPWEQAFLFU-UHFFFAOYSA-N diphosphoric acid Chemical compound OP(O)(=O)OP(O)(O)=O XPPKVPWEQAFLFU-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229940005657 pyrophosphoric acid Drugs 0.000 claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 229910003327 LiNbO3 Inorganic materials 0.000 abstract description 5
- 230000008020 evaporation Effects 0.000 abstract description 4
- 238000001704 evaporation Methods 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 230000001681 protective effect Effects 0.000 abstract description 3
- 150000007513 acids Chemical class 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- 239000005711 Benzoic acid Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
産業上の利用分野
本発明はコヒ−−ラント光を使用する光情報処理２ ヘ
−ジ
分野あるいは光通信、光応用計測制御分野に使用される
光導波路とレーザおよび光ファイバとの高効率結合を可
能にするテーパ状光導波路の作製方法に関するものであ
る。Detailed Description of the Invention 3. Detailed Description of the Invention Industrial Fields of Use The present invention is applicable to optical information processing using coherent light, optical communications, and optical applied measurement and control fields. The present invention relates to a method for manufacturing a tapered optical waveguide that enables highly efficient coupling of an optical waveguide with a laser and an optical fiber.
従来の技術
プロトン交換法によりＬ ｚ ＮｂＯ５基板上に光導波
路を形成しＴＥ／ＴＭモードスプリッタや波長変換素子
などが作製されていた。上記光導波路への結合効率を向
上させるため光入射部の厚みを大きくし光導波部とテー
パ部を用いて結合させるというものである。Conventional technology A TE/TM mode splitter, a wavelength conversion element, and the like have been fabricated by forming an optical waveguide on an L z NbO5 substrate using a proton exchange method. In order to improve the coupling efficiency to the optical waveguide, the thickness of the light incident part is increased and the light is coupled to the optical waveguide using a tapered part.
従来、テーパ状光導波路の作製方法としてアプライドオ
プティックス（Ａｐｐｌｉｅｄ ０ｐｔｉｃｓ）１９７
９年３月号 Ｖｏｌ １ Ｂ 、Ｎｏ６９００〜９０２
頁のジェー・シー・キャンベル氏（１，Ｃ，Ｃｏｍｐｂ
ｅｌ １ ）による方法がある。この方法は第３図に示
されるように保護マスク８が形成された基板１′を徐々
に硝酸銀３′の溶液に浸入していくことにより拡散深さ
を変化させてテーパ状光導波路を形成するというもので
ある。Conventionally, as a method for manufacturing a tapered optical waveguide, Applied Optics 197
March 9th issue Vol 1 B, No6900-902
Mr. J.C. Campbell (1, C, Compb)
There is a method according to el 1). In this method, as shown in FIG. 3, a substrate 1' on which a protective mask 8 is formed is gradually immersed in a solution of silver nitrate 3', thereby changing the diffusion depth and forming a tapered optical waveguide. That is what it is.
３ページ
発明が解決しようとする問題点
上記のような従来の方法では、基板であるＬ ｉ Ｎｂ
Ｏ３基板に安息香酸などの酸を用いてテーパ状光導波路
を作製する場合、溶液の蒸気のため光入射部以外の部分
もプロトン交換されてしまうという問題があった。また
量産性、制御性を確保するためには装置が大型化、複雑
化してしまうという問題点もあった。Page 3 Problems to be Solved by the Invention In the conventional method as described above, the substrate L i Nb
When a tapered optical waveguide is fabricated using an acid such as benzoic acid on an O3 substrate, there is a problem in that protons are exchanged in areas other than the light incident area due to the vapor of the solution. There is also the problem that in order to ensure mass productivity and controllability, the equipment becomes larger and more complex.
問題点を解決するための手段
本発明は強誘電体基板の表面の一部分に酸を塗布し熱処
理して光入射部を形成した後、表向の光導波路形成部に
酸を塗布し熱処理して光導−波路部を形成することでテ
ーパ状光導波路を作製しようとするものである。Means for Solving the Problems The present invention applies acid to a part of the surface of a ferroelectric substrate and heat-treats it to form a light incident part, and then coats an optical waveguide forming part on the front surface with acid and heat-treats it. This method attempts to produce a tapered optical waveguide by forming an optical waveguide section.
作 用
本発明の構成によれば蒸発量が少く液状である酸を用い
ることにより、簡単に制御性良く、しかも蒸気の影響を
受けることなくテーノく状導波路を作製することができ
る。Function According to the configuration of the present invention, by using a liquid acid with a small amount of evaporation, it is possible to easily fabricate a Tenno-shaped waveguide with good controllability and without being affected by vapor.
実施例
（実施例１）
本発明のテーパ状光導波路作製方法の第１の実施例を図
面を用いて説明する。第１図は酸としてピロ燐酸９強誘
電体基板としてＬ Ｉ ＮｂＯ３基板を用いた第１の実
施例であるテーパ状光導波路作製方法の工程図である。Example (Example 1) A first example of the method for manufacturing a tapered optical waveguide of the present invention will be described with reference to the drawings. FIG. 1 is a process diagram of a method for manufacturing a tapered optical waveguide according to the first embodiment using pyrophosphoric acid 9 as the acid and a L I NbO3 substrate as the ferroelectric substrate.
同図（→でＬ Ｉ ＮｂＯ３基板１の＋Ｚ板２の端部２
’にピロ燐酸３が塗布されている。In the same figure (→) L I NbO3 substrate 1 +Z plate 2 end 2
' is coated with pyrophosphoric acid 3.
同図（ｋｌで２３０°Ｃ９６０分熱処理することにより
入射部４が形成される。ピロ燐酸３は温度上昇につれて
粘度が低下し液面が広がる。このため光入射部４の前面
にテーパ部６が同時に形成される。The incident part 4 is formed by heat treatment at 230°C for 960 minutes at the same figure (kl).As the temperature rises, the viscosity of the pyrophosphoric acid 3 decreases and the liquid surface spreads.Therefore, a tapered part 6 is formed on the front surface of the light incident part 4. formed at the same time.
２３０°Ｃ１０分間熱処理を行い光導波部６を形成する
。 ゛
以上の工程をＬ Ｉ ＮｂＣ）３基板１の＋Ｚ板板上上
Ｔａの保護マスクパターンを形成したものに対して施す
ことにより三次元導波路が作製された。光導波部６の厚
みは０．５ｐｍ 、光入射部４の厚みは１μｍであった
。Ｈｅ−Ｎｅレーザ光（波長０．６３３μｍ）と上記テ
ーパ状光導波路との結合効率は光導波部だ５ベーノ
けの値ｓｏ％に対して、１．６倍の４５チが得られた。A heat treatment is performed at 230° C. for 10 minutes to form the optical waveguide portion 6. A three-dimensional waveguide was fabricated by performing the above steps on the +Z plate of the L I NbC 3 substrate 1 on which a protective mask pattern of Ta was formed. The thickness of the optical waveguide section 6 was 0.5 pm, and the thickness of the light incidence section 4 was 1 .mu.m. The coupling efficiency between the He--Ne laser beam (wavelength: 0.633 μm) and the tapered optical waveguide was 45 cm, which is 1.6 times the value of 5 cm in the optical waveguide.
（実施例２）
本発明のテーパ状光導波路作製方法の第２の実施例の工
程甲を第２図に示す。第２図（−）でヒータで加熱され
たＮプレート７６上にＬｉＮｂＯ３基板１が置かれてい
る。Ｌ ｉ ＮｂＯ３基板１の端部にはピロ燐酸３が塗
布されている。ピロ燐酸３はＭプレート７が傾けられて
いるので広がらない。ピロ燐酸３直下に入射部４が形成
される。次に同図（肋のようにＭプレート７の端８を端
９に対して水平またはやや下に向け７ることによりピロ
燐酸３が全面に流れ導波部６が形成される。このような
方法を採ると一度の塗布でプロトン交換を行える。捷た
傾き角を制御すやことでテーパ部５を制御することも可
能である。(Example 2) Step A of the second example of the method for manufacturing a tapered optical waveguide of the present invention is shown in FIG. In FIG. 2 (-), a LiNbO3 substrate 1 is placed on an N plate 76 heated by a heater. Pyrophosphoric acid 3 is applied to the edge of the L i NbO3 substrate 1 . Pyrophosphoric acid 3 does not spread because the M plate 7 is tilted. An input section 4 is formed directly below the pyrophosphoric acid 3. Next, as shown in FIG. If this method is adopted, proton exchange can be performed in one application.It is also possible to control the tapered portion 5 by controlling the tilt angle of the bending.
なお実施し１１ではピロ燐酸を用でたが蒸発量が少く基
板表面（−布可能１あ１は他０酸を用“る０ともできる
。またＬｉＮｂＯ３基板だけでなくＬｉＴａＯ３６ぺ巧
また、本発明の酸による塗布を用いると、基板１として
＋Ｚ板又は−Ｚ板（Ｚ軸に垂直な面を有する板）を用い
ると表面の荒れが生じない。In Example 11, pyrophosphoric acid was used, but the amount of evaporation was small and the surface of the substrate (-1) could be used as well. If coating with acid is used, the surface will not be roughened if a +Z plate or -Z plate (a plate having a surface perpendicular to the Z axis) is used as the substrate 1.
発明の効果
本発明のテーパ状光導波路の作製方法によれば、蒸発量
が少く液状である酸を強誘電体基板上に部分塗布し熱処
理を行うことで簡単に制御性良くテーパ状光導波路が作
製できる。しかも導波部が蒸気の影響を受けることはな
い。Effects of the Invention According to the method for manufacturing a tapered optical waveguide of the present invention, a tapered optical waveguide can be easily manufactured with good controllability by partially applying a liquid acid with low evaporation amount onto a ferroelectric substrate and performing heat treatment. It can be made. Moreover, the waveguide section is not affected by steam.
第１図は本鼻明の、テーパ状光導波路作製方法の一実施
例を乍す工程図、第２図は本発明のテーパ状光導波路作
製方法の第２の実施例を示す工程図、第３図は従来のテ
ーパ状光導波路作製方法を示す工程図である。
１・・・・・・ＬｉＮｂＯ３基板、３・・・・・・ピロ
燐酸、４・・・・・・光入射部、６・・・・・・テーパ
部、６・・・・・・光導波部。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
第２図FIG. 1 is a process diagram showing one embodiment of the method for manufacturing a tapered optical waveguide of the present invention, and FIG. 2 is a process diagram showing a second embodiment of the method for manufacturing a tapered optical waveguide of the present invention. FIG. 3 is a process diagram showing a conventional method for manufacturing a tapered optical waveguide. DESCRIPTION OF SYMBOLS 1...LiNbO3 substrate, 3...Pyrophosphoric acid, 4...Light incidence part, 6...Tapered part, 6...Optical waveguide Department. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2
Claims (3)
０≦ｘ≦１）基板の表面の一部分に液状の酸を塗布して
光入射部を形成した後、前記ＬｉＮｂ＿ｘＴａ＿（＿１
＿−＿ｘ＿）Ｏ＿３（０≦ｘ≦１）基板表面の光導波路
形成部に液状の酸を塗布し熱処理して光導波路部を形成
する工程により、前記光導波路部とこの光導波路部に比
べて厚みが大である光入射部を形成してなるテーパ状光
導波路の作製方法。(1) LiNb_xTa_(_1_-_x_)O_3(
0≦x≦1) After applying liquid acid to a part of the surface of the substrate to form a light incident part, the LiNb_xTa_(_1
＿−＿x＿)O_3(0≦x≦1) By applying liquid acid to the optical waveguide forming portion on the surface of the substrate and heat-treating it to form the optical waveguide portion, there is a difference between the optical waveguide portion and this optical waveguide portion. A method for manufacturing a tapered optical waveguide by forming a thick light entrance part.
０≦ｘ≦１）基板が＋Ｚ板または−Ｚ板である特許請求
の範囲第（１）項記載のテーパ状光導波路の作製方法。(2) LiNb_xTa_(_1_-_x_)O_3(
0≦x≦1) The method for manufacturing a tapered optical waveguide according to claim (1), wherein the substrate is a +Z plate or a -Z plate.
酸を用いる特許請求の範囲第（１）項記載のテーパ状光
導波路の作製方法。(3) A method for manufacturing a tapered optical waveguide according to claim (1), using an acid whose main component is pyrophosphoric acid (H_4P_2O_7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61136553A JPH0731289B2 (en) | 1986-06-12 | 1986-06-12 | Method for producing tapered optical waveguide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61136553A JPH0731289B2 (en) | 1986-06-12 | 1986-06-12 | Method for producing tapered optical waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62293202A true JPS62293202A (en) | 1987-12-19 |
| JPH0731289B2 JPH0731289B2 (en) | 1995-04-10 |
Family
ID=15177913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61136553A Expired - Fee Related JPH0731289B2 (en) | 1986-06-12 | 1986-06-12 | Method for producing tapered optical waveguide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731289B2 (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5979812U (en) * | 1982-11-19 | 1984-05-30 | オムロン株式会社 | Optical coupling structure of thin film optical waveguide |
| JPS607403A (en) * | 1983-06-28 | 1985-01-16 | Canon Inc | Forming method of thin film type optical waveguide |
| JPS60133405A (en) * | 1983-12-22 | 1985-07-16 | Canon Inc | Formation of pattern |
| JPS6170541A (en) * | 1984-09-14 | 1986-04-11 | Canon Inc | Thin film type optical element and its manufacture |
-
1986
- 1986-06-12 JP JP61136553A patent/JPH0731289B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5979812U (en) * | 1982-11-19 | 1984-05-30 | オムロン株式会社 | Optical coupling structure of thin film optical waveguide |
| JPS607403A (en) * | 1983-06-28 | 1985-01-16 | Canon Inc | Forming method of thin film type optical waveguide |
| JPS60133405A (en) * | 1983-12-22 | 1985-07-16 | Canon Inc | Formation of pattern |
| JPS6170541A (en) * | 1984-09-14 | 1986-04-11 | Canon Inc | Thin film type optical element and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0731289B2 (en) | 1995-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |