JPS62292288A - High speed multi point spot welding method using yag laser and its equipment - Google Patents
High speed multi point spot welding method using yag laser and its equipmentInfo
- Publication number
- JPS62292288A JPS62292288A JP61136780A JP13678086A JPS62292288A JP S62292288 A JPS62292288 A JP S62292288A JP 61136780 A JP61136780 A JP 61136780A JP 13678086 A JP13678086 A JP 13678086A JP S62292288 A JPS62292288 A JP S62292288A
- Authority
- JP
- Japan
- Prior art keywords
- spot welding
- optical
- laser beam
- high speed
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003466 welding Methods 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims description 8
- 230000003287 optical effect Effects 0.000 claims abstract description 53
- 239000013307 optical fiber Substances 0.000 claims abstract description 15
- 238000005452 bending Methods 0.000 claims abstract description 14
- 230000008878 coupling Effects 0.000 claims description 14
- 238000010168 coupling process Methods 0.000 claims description 14
- 238000005859 coupling reaction Methods 0.000 claims description 14
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000277331 Salmonidae Species 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000010960 cold rolled steel Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
８、発明のＩＰｌｌｌＩｌｌに説明
産業上の利用分野：
本発明は、光ファイバーを用いるレーザー溶接において
、良好なエネルギー効率を保持することにより多点スポ
ット溶接を連続的に高速で行なうことができるようにす
る方法及びその装置に係るものでるる。Detailed Description of the Invention 8. Industrial Application Field of the Invention: The present invention provides continuous high-speed multi-point spot welding by maintaining good energy efficiency in laser welding using optical fibers. This article relates to a method and an apparatus for making it possible to perform the same.
発明の背景：
Ｖ−ザーは、電子部品等の細密な個所の溶接に広く用い
らルるようになってきた。Ｖ−ザー溶接は、抵抗溶接又
はアーク溶接等の従来手法に比べ、非接触で局部溶接が
できること、局部的な急速加熱と急冷であるため熱影響
が少ないこと、消費電力が小であること並びにレーザー
エネルギーを制御し易いこと等が評価され共益多用さｎ
ている。時にＹＡＧレーザーは光ファイバーにより伝送
可能であり、複雑で高精度な光学系を構成することなく
、自由に指向を選択できるから８次元溶接にも容易に使
用できる。BACKGROUND OF THE INVENTION: V-zers have come to be widely used for welding delicate parts such as electronic components. Compared to conventional methods such as resistance welding or arc welding, V-ser welding has the following advantages: localized welding can be performed without contact, localized rapid heating and cooling results in less thermal effects, and low power consumption. It has been praised for its ease of controlling laser energy and is widely used for common benefits.
ing. YAG lasers can sometimes be transmitted through optical fibers, and the direction can be freely selected without constructing a complex and highly accurate optical system, so they can be easily used for eight-dimensional welding.
しかし、光ファイバーによるレーザービームの伝送には
、約２０９にのエネルギー損失が生じ、又精度的には佇
う−、レンズで構成される光学系の方がすぐれて２シ、
光ファイバー管用いるレーザー加工は精密切断のごとき
分野よりも溶接の分野への利用の方が適している。However, when transmitting a laser beam through an optical fiber, there is an energy loss of approximately 209 mm, and the accuracy remains low.
Laser processing using fiber optic tubes is more suitable for welding than for precision cutting.
また、レーザービームは複数のビームに多分割して多点
同時溶接を行なうことができ、さらに光路切換により時
分割すれば複数のラインで多点同時溶接を行なうことも
できる。そし−Ｃ１こルらの多分割又は時分割は、光フ
ァイバーによるレーザービームの伝送が可能でめること
によシ、その機能が拡大されて−る。Further, the laser beam can be divided into a plurality of beams to perform simultaneous multi-point welding, and furthermore, by time-sharing by switching the optical path, simultaneous multi-point welding can be performed on a plurality of lines. The functionality of these multi-division or time-division systems is expanded by making it possible to transmit laser beams through optical fibers.
従来技術：
レーザービームのうち、薄板等の多点スポット溶接に好
適なＹＡＧレーザーを操業に便利なように分割するには
、４８図に示すような多分割又は第４図に示すような時
分割、或いはこれらう；併用されている。Prior art: Of the laser beams, in order to divide the YAG laser, which is suitable for multi-point spot welding of thin plates, etc., in a convenient manner for operation, it is necessary to divide the laser beam into multiple divisions as shown in Figure 48 or time division as shown in Figure 4. , or these are used in combination.
第８図に示−ｒ多分割では、ＹＡＧレーザー完成器（１
）中にＹＡＧロッド（２）全装備し、ガイドビーム（３
）により着色されたレーザービーム（４）が多分割装置
叫に回って照射している。多分割装置ａＱ中には反射透
過ミラー（ｌｌ’ｌが複数個、Ｖ−ザービーム（４）線
上に順列配置さｎ１各ミラーにおいてレーザービーム（
４）は１部は反射して光軸を変え、１部は透過して次位
のミラーに至り同様に反射し又は透過して、反射透過ミ
ラーＩＪＩ）の数に等しく外側される。In the -r multi-division shown in Figure 8, the YAG laser complete device (1
), the YAG rod (2) is fully equipped, and the guide beam (3) is fully equipped.
) colored laser beam (4) is irradiating the multi-split device. In the multi-splitting device aQ, a plurality of reflecting/transmitting mirrors (ll'l) are arranged in permutations on the V-laser beam (4) line, and each mirror (n1) reflects the laser beam (
One part of 4) is reflected to change the optical axis, and one part is transmitted to the next mirror, where it is similarly reflected or transmitted, and is sent outward in a number equal to the number of reflection-transmission mirrors IJI).
次いで各分割ビームは各結合光学部（５）から光ファイ
バー（６）を経て出射光学部（７）に至り多分割された
ビームが同時多点スポット＃！ｒｆＩ！等に供せられる
。Next, each split beam goes from each coupling optical section (5) through an optical fiber (6) to an output optical section (7), and the multi-split beam is simultaneously multi-point spot #! rfI! etc.
第４図に示す時分割では、同様にしてＹＡＧレーザー発
振器（１）から時分割装置（６）に照射される。In the time division shown in FIG. 4, the YAG laser oscillator (1) irradiates the time division device (6) in the same manner.
そして内蔵される光路切Ａ機Ｊ（ｌｉにより所定数の光
路に分けられ、順次１個宛の結合光学部（５）から光フ
ァイバー（６）ヲ介して出射光学部（７）へ導かれる。The light is then divided into a predetermined number of optical paths by a built-in optical path cutter J (li), and sequentially guided from the coupling optical section (5) addressed to one optical path to the output optical section (7) via the optical fiber (6).
以後は順番の加工、又はさらに多分割されてスポット溶
接等に供せられる。光路切換機構（至）は、第４図に例
示するごとく多数のミラーＣ１４をレーザービーム（４
）の光軸と交わる方向に往復運動させて、ｌのミラーの
みが順次光軸上に立置するようにしたものが基本で、他
にミラーを回動させるもの又は複数のミラー要素を組合
せるもの等がある。Thereafter, it is sequentially processed or further divided into multiple parts and subjected to spot welding or the like. The optical path switching mechanism (to) connects a large number of mirrors C14 to a laser beam (4
) is reciprocated in the direction that intersects the optical axis, so that only the mirrors 1 and 1 are placed vertically on the optical axis in sequence, and other mirrors are rotated or multiple mirror elements are combined. There are things etc.
しかし、こルらの従来技術によるときは、レーザービー
ムを多分割し九場合では、たとえば実用されている最多
の１０分割とすれば、光ファイバーによるエネルギー損
失を２０％と考える′とＹＡＧレーザーの出力が１００
Ｗとしても、１本の光７アイパーで使用できる出力は平
均８Ｗ程度にすぎない。又、１０分割以上の分割をした
いときには、ＹＡＧレーザー発振器がさらに何台も必要
とならざるを得ない。However, when using these conventional techniques, if the laser beam is divided into nine parts, for example, if the laser beam is divided into ten parts, which is the maximum number of parts in practical use, the energy loss due to the optical fiber is considered to be 20%, and the output of the YAG laser is considered to be 20%. is 100
Even with W, the average output that can be used with a single 7-eyeper is only about 8W. Furthermore, if it is desired to divide the image into 10 or more parts, many more YAG laser oscillators are required.
また、時分割する場合には、光路切換機構が複雑で操業
上の安定性からみれば切換光路数は多くても１０程度、
実用的には７光路程度でめる。In addition, in the case of time-sharing, the optical path switching mechanism is complex, and from the viewpoint of operational stability, the number of switching optical paths is about 10 at most.
Practically speaking, it can be achieved with about 7 optical paths.
これらを組合せるとしても、分割数又は切換可能な光路
数或いは適用エネルギー蓋に制限を受け、多点スポット
溶接を高速で行なう加工には充分とはいえなかったので
ある。Even if these were combined, there were limitations on the number of divisions, the number of switchable optical paths, or the applicable energy limit, and it could not be said to be sufficient for high-speed multi-point spot welding.
発明の課題・目的：
本発明は上記のごとき問題点を解決するためになされた
もので、レーザー発振器から伝送されるレーザービーム
を、高出方のままスポット溶接個所に導き、機能を拡大
した効率的なスポット溶接を高速で多点にわたって施工
する方法を提案することを目的としている。さらにこの
方法を具体的に実施する装置の提供が今１つの目的であ
る。Problem/Objective of the Invention: The present invention has been made to solve the above-mentioned problems, and aims to improve efficiency by guiding a laser beam transmitted from a laser oscillator to a spot welding area while maintaining its high output. The purpose of this research is to propose a method for performing spot welding at multiple points at high speed. A further object is to provide an apparatus for concretely carrying out this method.
発明の構成・作用：
本発明は、在来手段において分割数に制限がある時分割
数を、加工目的又は作業形態に即して著しく多く、殆ん
ど無制限に近い状悪にまで分割可能とする方法及び装置
となっている。Structure and operation of the invention: The present invention makes it possible to divide the number of time divisions, which is limited in conventional means, to an extremely large number, almost unlimited, depending on the processing purpose or work type. It is a method and apparatus for doing so.
すなわち、第１図又は第２図に示すように多蔗スポット
溶接加工を行なう対象物に相当する輪廓をもち、且つ各
スポット溶接点に対応する出射光学部（２）の定着部Ｏ
１Ｊ故設は友出射光学部セッター…を、上記加工対象物
に近接して設置する。一方、ＹＡＧロッド（２）を含む
ＹＡＧレーザー発振器（１）と、間欠駆動装置ｅＡ１に
結合する走査路に）により高速駆動するベンディングミ
ラー■と、結合光学部（支）の固定部ｗｒ多数もった受
光部順列架（至）とよりなるレーザー先走ｇ部（１）ｔ
−適宜場所に設置する。そして、第２図に示すように、
レーザー光走査部…と出射光学部セッター（至）との間
を多数の光ファイバー（６）で連結するのである。That is, as shown in FIG. 1 or FIG. 2, the fixing part O of the output optical part (2) has a circumference corresponding to the object to be subjected to multi-weld spot welding and corresponds to each spot welding point.
In the 1J facility, a Tomoide optical part setter is installed close to the workpiece. On the other hand, a YAG laser oscillator (1) including a YAG rod (2), a bending mirror (in the scanning path coupled to the intermittent drive device eA1) driven at high speed by Laser advance g section (1) t consisting of light receiving section permutation rack (to)
- Install it at an appropriate location. And, as shown in Figure 2,
A large number of optical fibers (6) are used to connect the laser beam scanning section and the output optical section setter.
このような構成とすることにより、ＹＡＧレーザー発振
器（１）から照射さルるレーザービーム（４）は、ベン
ディングミラー（至）により回折されて受光部順列架（
至）に固定さルた多数の光学結合部（至）のうちの１つ
に到達する。このとさ、間欠駆動装置ｔ１２１）の運転
により走査路磐に装備した駆動駒（至）に取付けたベン
ディングミラー（至）は高速駆動し、回折Ｖ −ザーピ
ーム（４ｙが結合部学部（財）へ正確に入射する位置で
瞬時（加工対象物のスポット溶接をする必要な時間。）
停止し、直ちに次の結合受光部（ロ）に入射する位置に
移行する。受光部順列架（至）に固定された結合光学部
（支）と出射光学部セッター■に定着される出射光学部
（至）との間はレーザービームを伝送する光ファイバー
（６）で連結されているから、レーザービームは加工対
象物のスポット溶接点を高出力で溶接し、次いでベンデ
ィングミラーの駆動と共に次位の溶接をし、以下これを
高速度で反復しつつ多点スポット溶接を達成する。With this configuration, the laser beam (4) irradiated from the YAG laser oscillator (1) is diffracted by the bending mirror (to) and sent to the light receiving unit permutation rack (
One of a number of optical couplings (to) fixed to (to) is reached. At this time, the intermittent drive device t121) is operated to drive the bending mirror (X) attached to the drive piece (X) installed on the scanning path rock at high speed, and the diffraction V-zer beam (4Y) is transferred to the Coupling Department Faculty (Foundation). Instantly at the exact input position (the time required to spot weld the workpiece)
It stops and immediately moves to the position where it enters the next combined light receiving section (b). The coupling optical section (support) fixed to the light receiving unit permutation rack (to) and the output optical section (to) fixed to the output optical section setter ■ are connected by an optical fiber (6) that transmits the laser beam. Therefore, the laser beam welds the spot welding point of the workpiece at high power, and then the bending mirror is driven to perform the next welding, and this process is repeated at high speed to achieve multi-point spot welding.
ベンディングミラーを高速駆動させる間欠駆動装置Ｗａ
は、実願昭６０−１７２９１１号により提案されている
ものの使用が効果的である。Intermittent drive device Wa that drives the bending mirror at high speed
It is effective to use the method proposed in Utility Model Application No. 172911/1983.
実施例：
次に本発明の具体的な１実施例を説明する。たとえば電
子レンジのドアに設けられているシールドスクリーンの
取付けを本発明により行なつ之。Example: Next, a specific example of the present invention will be described. For example, the present invention can be used to attach a shield screen provided on the door of a microwave oven.
すなわち、適当大の窓をあけた冷間圧延鋼板の該１浴い
の周縁部に上記シールドスクリーン押え用の銅体をスポ
ット溶接した。That is, the copper body for holding down the shield screen was spot welded to the peripheral edge of one bath of a cold-rolled steel plate with an appropriately sized window.
スポット溶接点は約５０点で、出射光学部セッター…は
第１図に示すように方形とし、スポット溶接点の数に相
当する定着部（ロ）を設けてその数だけの出射光学部−
を配設した。There are approximately 50 spot welding points, and the output optical part setter is rectangular as shown in Figure 1, and fixing parts (b) corresponding to the number of spot welding points are provided to set the output optical part as many as the number of spot welding points.
was installed.
レーザー光走査部員については、受光部順列架（至）の
固定部（至）中、上記スポット溶接点数に対応する数だ
け使用し、出射光学部（至）に接続する光ファイバーの
結合刈菅部＠を設けた。そしてＹＡＧレーザー発振器（
１）からレーザービーム（４）ヲペンディングミラーー
に照射し、屈折レーザービーム（４Ｙを結合光学部に）
に導き、出射光学部に）からスポット溶接点に照射可能
とした。同時に間欠駆動装置１１！！。For the laser beam scanning member, use the number of spot welding points corresponding to the number of spot welding points mentioned above in the fixed part (to) of the light receiving unit permutation rack (to), and connect the optical fiber to the output optical part (to). has been established. And YAG laser oscillator (
Laser beam from 1) (4) is irradiated to the pending mirror, and refracted laser beam (4Y to the coupling optical part)
It is now possible to irradiate the spot welding point from the beam to the output optical section). Intermittent drive device 11 at the same time! ! .
を作動させると、ベンディングミラー鱒は、高速駆動→
停止−高速寸動・・・・・・を反復しつつ屈折レーザー
ビーム（４）’ ｔ−１順列する結合光学部萄（ロ）・
・・に順次入射することができる。When activated, the bending mirror trout will be driven at high speed→
While repeating stop-high-speed inching..., the refracted laser beam (4)' t-1 permutation of the coupling optical part (b).
... can be sequentially incident on...
このとき、ベンディングミラーの停止する微少時間に限
ってレーザービーム（４）をミラーに照射させたが、他
の実施例としてレーザービーム（４）を連続照射し、結
合光学部（支）が順列する間隔部に限りマスキング材料
で受光部順列架に）の上面を被覆することもできる。At this time, the laser beam (4) was irradiated to the mirror only for a short time when the bending mirror stopped, but in another embodiment, the laser beam (4) was continuously irradiated and the coupling optical parts (supports) were arranged in order. It is also possible to cover the upper surface of the light-receiving section (on the permutation rack) with a masking material only at the interval.
発明の効果：
本発明によるときは、走査路の駆動と、瞬時停止のポイ
ント数と、受光部順列架の形態及び結合光学部の数とを
釣合わせておくだけで、多点スポット溶接の加工点を任
意の多さにとることができる。さらに間欠駆動装置を用
いることによりベンディングミラーの駆動が往の方向に
移行し切ったならば、次は復の方向にす動移行させるこ
とにより効率を一層高めることができる。Effects of the invention: According to the present invention, multi-point spot welding can be performed simply by balancing the scanning path drive, the number of instantaneous stop points, the form of the light-receiving section permutation frame, and the number of coupling optical sections. You can take any number of points. Further, by using an intermittent drive device, once the bending mirror has been driven in the forward direction, the efficiency can be further increased by shifting the bending mirror in the backward direction.
従来法によるときは、出力２５０ＷのＹＡＧレーデ−発
振器を用いて１点／秒にてスポット溶接ができた加工対
象物（ＳＵＳ８０４でｔａｇ厚の上板を基板にスポット
溶接する。）に対し、本発明によるときは２〜４点／秒
で多点スポット溶接が達成できた。When using the conventional method, a workpiece that can be spot welded at 1 point/second using a YAG radar oscillator with an output of 250 W (spot welding a tag-thick top plate of SUS804 to a substrate), According to the invention, multi-point spot welding could be achieved at 2 to 4 points/second.
第１図は本発明の１実施例を示す平面説明図、渠２図は
同じく１実施例装置の側面説明図、第８図と第４図は従
来例の説明図である。
（１）・・・ＹＡＧレーザー発楳器 （２）・・・ＹＡ
Ｇロッド（３）・・・ガイドビーム （４）・・・
レーザービーム（５）・・・結合光学部（６）・・・光
ファイバー（７）・・・出射光学部 １１０・・
・多分割装置ＣＩカ・・・反射透過はラー （６）・
・・時分割装置ａ葎・・・光路切換装置 α→・・
・ミラー翰・・・Ｖ−ザー光走査部 ０４１・・・間欠
ｇＩＪｈ装置（イ）・・・走査路 に）・・
・駆動駒（財）・・・ベンディングミラー （至）・・
・受光部順列架（ホ）・・・固定部 （ロ）
・・・結合光学部に）・・・出射光学部セッター ０１
）・・・定着部（至）・・・出射光学部FIG. 1 is an explanatory plan view showing one embodiment of the present invention, FIG. 2 is an explanatory side view of the apparatus of the first embodiment, and FIGS. 8 and 4 are explanatory views of a conventional example. (1)...YAG laser beam generator (2)...YA
G rod (3)...Guide beam (4)...
Laser beam (5)...Coupling optical section (6)...Optical fiber (7)...Emission optical section 110...
・Multi-splitting device CI...Reflection and transmission are ra (6)・
...Time division device a...Optical path switching device α→...
・Mirror wire...V-zer light scanning unit 041...Intermittent gIJh device (A)...Scanning path)...
・Drive piece (goods)...Bending mirror (to)...
・Light receiving unit permutation rack (E)...Fixed part (B)
...to the coupling optical section)...output optical section setter 01
)... Fixing section (to)... Output optical section
Claims (1)
ぞれ先端に有する多数の光ファイバーの基端側の各結合
光学部を受光順列架に整列固定し、ＹＡＧレーザービー
ムを、間欠駆動装置により高速寸動及び停止するベンデ
ィングミラーに照射し、受光部順列架に固定した多数の
結合光学部の数に対応する加工点に対し、高速で且つＹ
ＡＧレーザー発振器とほぼ同じ出力のままのエネルギー
を付与するようにしたことを特徴とするＹＡＧレーザー
を用いた高速多点スポット溶接法。 ２ 多点スポット溶接加工を行なう対象物に相当する輪
廓をもち、且つ各スポット溶接点に対応する出射光学部
の定着部を必要数設けた出射光学部セッターを、上記加
工対象に近接して設け、一方、ＹＡＧレーザー発振器と
、間欠駆動装置に結合する走査路により高速寸動するベ
ンディングミラーと、結合光学部の固定部を多数もつた
受光部順列架とよりなるレーザー光走査部を適宜場所に
設置し、出射光学部セッターとレーザー光走査部との間
を多数の光ファイバーで連結したことを特徴とするＹＡ
Ｇレーザーを用いた高速多点スポット溶接装置。[Scope of Claims] 1. Each of the coupling optical parts on the proximal end side of a large number of optical fibers each having an output optical part corresponding to a multi-point spot welding point at the tip thereof is aligned and fixed on a light receiving permutation frame, and a YAG laser beam is The intermittent drive device irradiates the bending mirror, which moves and stops at high speed, and targets the processing points corresponding to the number of coupling optical parts fixed to the light receiving unit permutation frame at high speed and Y.
A high-speed multi-point spot welding method using a YAG laser, which is characterized by applying energy with almost the same output as an AG laser oscillator. 2. An output optical part setter having a circumference corresponding to the object to be processed by multi-point spot welding and having the required number of fixing parts of the output optical part corresponding to each spot welding point is installed in the vicinity of the above-mentioned processing object. , On the other hand, a laser beam scanning unit consisting of a YAG laser oscillator, a bending mirror that moves at high speed by a scanning path coupled to an intermittent drive device, and a light receiving unit permutation rack having many fixed parts of coupling optical units is placed at an appropriate location. The YA is characterized in that the output optical part setter and the laser beam scanning part are connected by a large number of optical fibers.
High-speed multi-point spot welding equipment using G laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61136780A JPS62292288A (en) | 1986-06-11 | 1986-06-11 | High speed multi point spot welding method using yag laser and its equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61136780A JPS62292288A (en) | 1986-06-11 | 1986-06-11 | High speed multi point spot welding method using yag laser and its equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62292288A true JPS62292288A (en) | 1987-12-18 |
Family
ID=15183342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61136780A Pending JPS62292288A (en) | 1986-06-11 | 1986-06-11 | High speed multi point spot welding method using yag laser and its equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62292288A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996016767A1 (en) * | 1994-11-28 | 1996-06-06 | Komatsu Ltd. | Laser marking apparatus |
| JP2011227269A (en) * | 2010-04-20 | 2011-11-10 | Muratani Machine Inc | Laser processing device and laser processing method |
-
1986
- 1986-06-11 JP JP61136780A patent/JPS62292288A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996016767A1 (en) * | 1994-11-28 | 1996-06-06 | Komatsu Ltd. | Laser marking apparatus |
| JP2011227269A (en) * | 2010-04-20 | 2011-11-10 | Muratani Machine Inc | Laser processing device and laser processing method |
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