CN215698836U - Laser processing device capable of rapidly and providing higher processing quality - Google Patents
Laser processing device capable of rapidly and providing higher processing quality Download PDFInfo
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- CN215698836U CN215698836U CN202121904581.3U CN202121904581U CN215698836U CN 215698836 U CN215698836 U CN 215698836U CN 202121904581 U CN202121904581 U CN 202121904581U CN 215698836 U CN215698836 U CN 215698836U
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Abstract
The utility model discloses a laser processing device which is rapid and provides higher processing quality, comprising a laser source, an acousto-optic deflector which can diffract a zero-order beam and a first-order diffracted beam after receiving the laser beam, a workbench which is loaded with a processing object, a scanning galvanometer, a processing lens which can receive the zero-order beam and the first-order diffracted beam and irradiate the zero-order beam and the first-order diffracted beam to the workbench, wherein the scanning galvanometer is arranged on an optical path between the acousto-optic deflector and the processing lens, light spots of the zero-order beam and the first-order diffracted beam are distributed along a straight line direction, the workbench can move along the straight line direction, the moving direction of the workbench is consistent with the straight line distribution direction of the light spots, and the laser processing device also comprises a control unit which is connected with the laser source, the acousto-optic deflector, the scanning galvanometer and the workbench. The zero-order light beam is placed in front of the machine to perform pre-treatment such as pre-heating before machining, and is placed behind the machine to perform post-treatment of removing impurities after machining, so that energy loss is reduced, the machining speed is high, the machining quality is improved, and long-distance machining is performed.
Description
Technical Field
The present invention relates to a laser processing apparatus which is fast and provides high processing quality.
Background
In the related art, a laser processing apparatus is an apparatus for processing an object to be processed with laser light. The laser processing method includes a method of moving a table for fixing a position to which the laser beam is irradiated, a method of moving the table by changing the laser beam irradiation position by using a single galvano-mirror, and a method of moving the table by changing the laser beam irradiation position by using a single acousto-optic deflector.
In order to minimize the thermal effects on the material, reduce discoloration and distortion during processing, and optimize processing quality, the use of very short pulsed lasers is preferred.
The method for processing by moving the worktable can blow air or suck vacuum more conveniently, but for the improvement of the processing speed, the scanning galvanometer is used faster than the moving worktable, but the speed is higher than that of the mode without adopting the acousto-optic deflector, but the acousto-optic deflector has the defect of shorter processing length.
The acousto-optic deflector emits an acoustic wave to a material such as quartz glass to diffract the light beam. The acousto-optic deflector uses the RF signal strength of a variable frequency RF generator to determine the proportion of the deflection angle. The angle of the first order diffracted beam is changed, so that the laser beam moves to finish linear processing such as cutting. However, even if the RF signal intensity is stronger, the laser beam cannot be diffracted by 100%, and the laser beam that is not diffracted is output as a zeroth-order beam. The portion output by the zero order beam is then the portion of power lost.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a laser processing device which is rapid and provides higher processing quality.
In order to solve the technical problems, the utility model adopts the technical scheme that: a laser processing device which is rapid and provides higher processing quality comprises a laser source, an acousto-optic deflector which can diffract a zero-order beam and a first-order diffracted beam after receiving the laser beam, a workbench loaded with a processing object, a scanning galvanometer which can receive the zero-order beam and the first-order diffracted beam, and a processing lens which can receive the zero-order beam and the first-order diffracted beam and irradiate the zero-order beam and the first-order diffracted beam to the workbench, the scanning galvanometer is arranged on a light path between the acousto-optic deflector and the processing lens, light spots of the zero-order light beam and the first-order diffracted beam are distributed along a straight line direction, the worktable can move along the linear direction, the moving direction of the worktable is consistent with the linear distribution direction of the facula, and the worktable further comprises a control unit connected with the laser source, the acousto-optic deflector, the scanning galvanometer and the worktable.
In some embodiments, the optical path between the acousto-optic deflector and the processing lens is further provided with at least one mirror.
In some embodiments, one of the mirrors is disposed in an optical path between the acousto-optic deflector and the scanning galvanometer.
In certain embodiments, the laser source is a pulsed laser source capable of generating pulsed laser light.
In some embodiments, the scanning galvanometer is a two-axis driven photoelectric scanning galvanometer with two rotating mirror plates.
The scope of the present invention is not limited to the specific combinations of the above-described features, and other embodiments in which the above-described features or their equivalents are arbitrarily combined are also intended to be encompassed. For example, the above features and the technical features (but not limited to) having similar functions disclosed in the present application are mutually replaced to form the technical solution.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages: the utility model provides a laser processing device which can quickly provide higher processing quality, wherein a zero-order beam and a first-order diffracted beam from an acousto-optic deflector are emitted to a workbench through a scanning galvanometer, faculae of the zero-order beam and the first-order diffracted beam are distributed and move along the linear direction, and the workbench moves back and forth along the linear direction of the faculae in a matching manner.
Drawings
FIG. 1 is a schematic view of a laser processing apparatus that is fast and provides higher processing quality;
wherein, 1, a laser source; 2. an acousto-optic deflector; 3. an object to be processed; 4. a work table; 5. scanning a galvanometer; 51. rotating the lens; 6. processing a lens; 7. a control unit; 8. a mirror; li, laser beam; l0, zero order beam; l1, first order diffracted beam.
Detailed Description
As shown in the figures, a laser processing apparatus which is fast and provides high processing quality includes a laser source 1, an acousto-optic deflector 2 which receives a laser beam Li and diffracts a zero-order beam L0 and a first-order diffracted beam L1, a table 4 on which an object to be processed 3 is mounted, a scanning galvanometer 5 which receives the zero-order beam L0 and the first-order diffracted beam L1, a processing lens 6 which receives the zero-order beam L0 and the first-order diffracted beam L1 and directs the beams to the table 4, and a control unit 7 which is connected to the laser source 1, the acousto-optic deflector 2, the scanning galvanometer 5, and the table 4.
The scanning galvanometer 5 is disposed on the optical path between the acousto-optic deflector 2 and the processing lens 6, the light spots of the zero-order light beam L0 and the first-order diffracted light beam L1 are distributed along a straight line, and the worktable 4 can move along the straight line, the moving direction of the worktable 4 is consistent with the straight line distribution direction of the light spots, in this embodiment, a reflecting mirror 8 is disposed on the optical path between the acousto-optic deflector 2 and the scanning galvanometer 5.
The laser source 1 is a pulsed laser source capable of generating pulsed laser light.
The scanning galvanometer 5 is a biaxial drive photoelectric scanning galvanometer with two rotating lenses 51. The scanning galvanometer can also be a single-shaft driving photoelectric scanning galvanometer or other optical scanning galvanometers.
An acousto-optic deflector is an element whose refractive index changes when an acoustic wave is applied to a medium, producing an acousto-optic effect. The acousto-optic deflector comprises a medium having a refractive index that varies with an acoustic wave and a transducer for directing the acoustic wave into the medium.
The laser beam is irradiated to the acousto-optic deflector, and in this case, the laser beam is referred to as an incident laser beam. The incident laser beam is diffracted in the acousto-optic deflector. However, a part of the incident laser beam passes through the acousto-optic deflector without diffraction, and the beam is a zero-order beam.
The power of the first order diffracted beam, the angle between the first order diffracted beam and the incident laser beam can be controlled by appropriately controlling the intensity of the acoustic wave and the frequency of the acoustic wave when the acoustic wave is introduced into the acousto-optic deflector according to the RF signal transmitted from the control unit. For example, the higher the RF signal intensity, the greater the first order diffracted beam deflection angle. In addition, the intensity of the zero-order beam and the first-order diffracted beam is appropriately adjusted by adjusting the intensity of the RF signal input to the acousto-optic deflector. The first order diffracted beam acts to process the object with a corresponding power.
The acousto-optic deflector periodically varies the deflection angle of the first order diffracted beam deflected in the acousto-optic deflector based on the received RF signal. The acousto-optic deflector can make the light spot irradiated by first-order diffracted beam on the object to be processed implement reciprocating movement so as to implement multiple-time overlapped processing.
The first-order diffracted beam controlled by the acousto-optic deflector moves from a specific angle to a corresponding angle, and the zero-order beam always maintains the same angle and is changed along with the moving machining position of the workbench for machining.
In order to realize high-speed and high-quality processing, a short-pulse laser source in the picosecond or femtosecond region is sometimes used. However, when short-pulse laser light is irradiated at the same position or at a close position adjacent thereto, the processing quality is degraded due to heat diffusion and processing foreign matter remaining, and the interval between laser irradiation points is maintained at a certain distance. For example, when the laser pulse frequency is 1MHz, the acousto-optic deflector sets the reciprocating speed of the laser light speed at 20m/s, and the spot distance of the laser beam can be kept at about 20 um. That is, the pulse laser beam irradiated to the object to be processed is irradiated with the acousto-optic deflector in a plurality of times in a superimposed manner, so that the influence of heat on the object to be processed is minimized, the discoloration or deformation occurring during processing is reduced, and the processing quality is improved.
Since the first-order diffracted beam spot can move along a straight line relative to the zero-order beam spot, the zero-order beam can be irradiated in front of and behind the corresponding position of the first-order diffracted beam irradiated on the processing object. The zero-order light beam and the first-order diffracted beam can be irradiated out in an enlarged range by utilizing the scanning galvanometer. Meanwhile, the workbench is also utilized to move the processing object, so that the speed is higher and the processing range is wider.
In this embodiment, the zero-order beam is used, so that power loss can be reduced, and when the zero-order beam is irradiated to a corresponding position of the object to be processed before the first-order diffracted beam, the zero-order beam mainly performs a preheating function before processing. When the zero-order light beam irradiates the corresponding position of the processing object in the first-order diffraction beam, the post-processing function of removing the processed impurities is realized.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (5)
1. A laser processing apparatus which is fast and provides high processing quality, comprising a laser light source (1), an acousto-optic deflector (2) which receives a laser beam (Li) and is capable of diffracting a zero-order beam (L0) and a first-order diffracted beam (L1), a table (4) on which an object (3) to be processed is mounted, characterized in that: the laser device is characterized by further comprising a scanning galvanometer (5) capable of receiving the zero-order light beam (L0) and the first-order diffracted beam (L1), a processing lens (6) capable of receiving the zero-order light beam (L0) and the first-order diffracted beam (L1) and emitting the zero-order light beam and the first-order diffracted beam to the workbench (4), wherein the scanning galvanometer (5) is arranged on an optical path between the acousto-optic deflector (2) and the processing lens (6), light spots of the zero-order light beam (L0) and the first-order diffracted beam (L1) are distributed along a straight line direction, the workbench (4) can move along the straight line direction, the moving direction of the workbench (4) is consistent with the straight line distribution direction of the light spots, and the laser device (1), the acousto-optic deflector (2), the scanning galvanometer (5) and a control unit (7) connected with the workbench (4).
2. The laser processing apparatus according to claim 1, which is fast and provides a higher processing quality, characterized in that: and at least one reflector (8) is arranged on a light path between the acousto-optic deflector (2) and the processing lens (6).
3. The laser processing apparatus according to claim 2, which is fast and provides a higher processing quality, characterized in that: and one reflector (8) is arranged on a light path between the acousto-optic deflector (2) and the scanning galvanometer (5).
4. The laser processing apparatus according to claim 1, which is fast and provides a higher processing quality, characterized in that: the laser source (1) is a pulsed laser source capable of generating pulsed laser light.
5. The laser processing apparatus according to claim 1, which is fast and provides a higher processing quality, characterized in that: the scanning galvanometer (5) is a biaxial drive photoelectric scanning galvanometer with two rotating lenses (51).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121904581.3U CN215698836U (en) | 2021-08-13 | 2021-08-13 | Laser processing device capable of rapidly and providing higher processing quality |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121904581.3U CN215698836U (en) | 2021-08-13 | 2021-08-13 | Laser processing device capable of rapidly and providing higher processing quality |
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| Publication Number | Publication Date |
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| CN215698836U true CN215698836U (en) | 2022-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202121904581.3U Active CN215698836U (en) | 2021-08-13 | 2021-08-13 | Laser processing device capable of rapidly and providing higher processing quality |
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- 2021-08-13 CN CN202121904581.3U patent/CN215698836U/en active Active
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