CN209050272U - A kind of femtosecond laser system of processing of multi-wavelength and multi-processing mode - Google Patents
A kind of femtosecond laser system of processing of multi-wavelength and multi-processing mode Download PDFInfo
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- CN209050272U CN209050272U CN201821404754.3U CN201821404754U CN209050272U CN 209050272 U CN209050272 U CN 209050272U CN 201821404754 U CN201821404754 U CN 201821404754U CN 209050272 U CN209050272 U CN 209050272U
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Abstract
The utility model discloses the femtosecond laser systems of processing of a kind of multi-wavelength and multi-processing mode, including multiple-wavelength laser, light path switching device, light-beam forming unit and the processing platform being arranged along optical path；Multiple-wavelength laser once emits the laser of one or more different wave lengths；Light path switching device be used for enter its in one or more wavelength laser carry out by, it is reflective or light splitting；Light-beam forming unit is used to expand the laser entered in it, collimates, focuses, vibration mirror scanning or importing optical fiber are to carry out shaping；Processing platform is used to fix the processed product of respective material.The utility model can select the laser and processing method of different wave length according to the characteristic of part to be processed different materials, can process to one or more products, improve processing efficiency, save cost.
Description
Technical field
The utility model relates to a kind of process equipments of ultra-thin part, and in particular to a kind of multi-wavelength and multi-processing mode
Femtosecond laser system of processing.
Background technique
Ultra-thin part using increasingly extensive, for being applied to consumer electronics (cover-plate glass on such as mobile phone), medical treatment (such as
Cardiac stent) etc. fields ultra-thin part, to very strict, the traditional cutting technique of requirement of cut quality and cutting yield rate
It has not been able to satisfy the requirement of production gradually.
Excessively thin part can all influence the yield rate of cutting, and the part side that femtosecond laser is cut into using machine cuts
Edge is smooth, without lateral micro-crack, without fragment.Femtosecond laser is a kind of laser for possessing extremely short pulse, energy height, action time
It is short, can in the case where avoiding material melts moment material is become into plasma and is volatilized away, in this extremely short time
Interior, heat has little time to accumulate in material, so as to avoid the generation of fuel factor.Moreover, auxiliary of the laser cutting in computer
Down can continuously, be accurately performed setting pattern curvilinear cut, make its thin-walled processing in have extraordinary application prospect.
It is seldom for the experimental study of femtosecond laser cutting both at home and abroad, it is, in principle, that the absorption of different materials light is not
The same, as glass is good more than metal to the absorption of infrared laser.Ultrafast laser cutting equipment currently on the market is substantially single
Wavelength laser cutting processing then needs the laser cutting using different wave length to carry out finer cutting to multiple material
Equipment cuts respective material.
Utility model content
The purpose of this utility model is to provide the femtosecond laser systems of processing of a kind of multi-wavelength and multi-processing mode, it can
It, can be to one or more productions to select the laser and processing method of different wave length according to the characteristic of part to be processed different materials
Product processing, improves processing efficiency, saves cost.
The technical scheme adopted by the utility model to solve the technical problem is as follows:
A kind of femtosecond laser system of processing of multi-wavelength and multi-processing mode, including the multiwavelength laser being arranged along optical path
Device, light path switching device, light-beam forming unit and processing platform；
The multiple-wavelength laser can generate the laser of multiple and different wavelength, and the once one or more different waves of transmitting
Long laser；
The light path switching device be equipped with it is multiple, each light path switching device includes light hole, reflecting mirror and spectroscope；
The quantity of the light-beam forming unit is consistent with the quantity for the laser that multiple-wavelength laser emits, each beam shaping
Device includes beam expanding lens, collimating mirror, focus lamp, galvanometer and coupling focus lamp；
The processing platform is consistent with the quantity for the laser that multiple-wavelength laser emits, and each processing platform is for fixed pair
Answer the processed product of material.
The beneficial effect that the utility model generates is: the utility model allows to root by setting multiple-wavelength laser
According to the characteristic and quantity of part to be processed different materials, emit the laser of corresponding wavelength, and by light path switching device to entrance
The laser of one or more wavelength in it carry out by, it is reflective or light splitting, with realize different wave length laser and different processing
The switching of mode, then by light-beam forming unit the laser entered in it expanded, collimates, focused, vibration mirror scanning or led
Enter optical fiber, form its shaping and meet the laser of actual processing request, reaches swashing with corresponding processing method and different wave length
Light processes the part of one or more different materials simultaneously, can be with raising efficiency, and a variety of processing methods share one
Optical path is covered, cost can be saved, improve the efficiency for building processing platform.
Detailed description of the invention
Below in conjunction with accompanying drawings and embodiments, the utility model is described in further detail, in attached drawing:
Fig. 1 is the structural schematic diagram of the utility model embodiment；
Fig. 2 is the structural schematic diagram of light path switching device in the utility model embodiment；
Fig. 3 a is that light path switching device is in the schematic diagram under light passing state in the utility model embodiment；
Fig. 3 b is that light path switching device is in the schematic diagram under reflective state in the utility model embodiment；
Fig. 3 c is that light path switching device is in the schematic diagram under light passing and reflective state in the utility model embodiment；
Fig. 4 is the structural schematic diagram that frequency multiplication mechanism is divided in the utility model embodiment；
Fig. 5 a is the schematic diagram using the utility model embodiment processing flat work pieces；
Fig. 5 b is the schematic diagram using the utility model embodiment processing pipe fitting workpiece；
Fig. 5 c is the schematic diagram using the utility model embodiment simultaneous processing flat work pieces and pipe fitting workpiece.
Wherein: 10- multiple-wavelength laser, 11- laser generating mechanism, 12- light splitting frequency multiplication mechanism, 20- light path switching device,
21- motor, 22- mirror holder, 23- reflecting mirror, 24- light hole, 25- motor output shaft, 26- motor mount, 30- beam shaping dress
It sets, 40- processing platform, 50- beam expanding lens.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only to explain this
Utility model is not used to limit the utility model.
As shown in Figure 1, the femtosecond laser system of processing of a kind of multi-wavelength and multi-processing mode, more including being arranged along optical path
Long wavelength laser 10, light path switching device 20, light-beam forming unit 30 and processing platform 40；
Multiple-wavelength laser 10 can generate the laser of multiple and different wavelength, and once emit one or more different wave lengths
Laser；
Light path switching device 20 is equipped with multiple (see T1, T(n-1 in Fig. 1), Tn, T(2n-2)), each light path switching device
Including light hole, reflecting mirror and spectroscope, light path switching device be used for enter its in one or more wavelength laser into
Row pass through, it is reflective or light splitting, to realize the switching of the laser and different processing methods of different wave length；
The quantity of light-beam forming unit 30 is consistent with the quantity for the laser that multiple-wavelength laser emits (whole see light beam in Fig. 1
Shape dress sets 1, light-beam forming unit 2, light-beam forming unit n), and each light-beam forming unit includes beam expanding lens, collimating mirror, focusing
Mirror, galvanometer and coupling focus lamp for the laser entered in it to be expanded, collimates, focused, vibration mirror scanning or import light
Fibre makes its shaping form the laser for meeting actual processing request；
Processing platform 40(is shown in processing platform 1 in Fig. 1, processing platform 2, processing platform n) and multiple-wavelength laser transmitting
The quantity of laser is consistent, and each processing platform is used to fix the processed product of respective material.
When only one processing platform, this system can be according to the laser pair of the material transmitting corresponding wavelength of processing part
It is processed；When being equipped with multiple processing platforms, the processing part of different materials is placed on each processing platform, this system can
It is multiple with the laser of the corresponding wavelength of each processing part to emit, can the multiple and different materials of simultaneous processing processing zero
Part.
In the preferred embodiment of the utility model, as shown in Figure 1, multiple-wavelength laser includes multiple determining long wavelength laser
(laser 1 in Fig. 1, laser 2 ..., laser n), each determine the laser that long wavelength laser emits a kind of wavelength.
In the preferred embodiment of the utility model, as shown in figure 4, multiple-wavelength laser includes 11 He of laser generating mechanism
Laser for emitting laser generating mechanism is divided frequency multiplication into the light splitting frequency multiplication mechanism 12 of different wave length laser.
Such as the process of dual-wavelength laser is realized in Fig. 4 using single laser body are as follows: separate unit laser generating mechanism
The laser emitted is divided into the identical two-way laser of energy by semi-transparent semi-reflecting lens M1, wherein laser is become by frequency-doubling crystal all the way
At the laser for the new wavelength that wavelength halves.
In the preferred embodiment of the utility model, as shown in figure 3, light path switching device includes motor 21 and is mounted on
Mirror holder 22 on motor output shaft 25 is set on mirror holder there are two through-hole, is equipped with reflecting mirror according to demand on one of through-hole
23 or spectroscope, as light hole 24, motor is mounted on motor mount 26 another through-hole.It is revolved by motor control mirror holder
Turn, laser is made to be incident on reflecting mirror with 45° angle, optical path is emitted with 90 °；Laser is then after mirror holder rotates 180 ° under motor control
It is passed through from light hole, does not change optical path.When needing to be divided, reflecting mirror need to only be removed and change spectroscope.
In the preferred embodiment of the utility model, as shown in Fig. 3 a- Fig. 3 c, which further includes that setting swashs in multi-wavelength
Light device rear end is expanded with the one-to-one beam expanding lens 50(of the laser that it the emits 1030nm beam expanding lens seen in Fig. 3 a- Fig. 3 c and 515nm
Shu Jing), to promote beam quality.
The process of multiwavelength laser selection is as follows: as shown in Figure 3a, when emitting 1030nm laser, light is incident on the light passing of T1
Kong Zhong, 1030nm laser pass through；As shown in Figure 3b, when emitting 515nm laser, light is incident in the reflecting mirror of T1,515nm laser
Pass through；As shown in Figure 3c, when while emitting the laser of 1030nm and 515nm, light is incident on the light hole and reflecting mirror of T1 respectively
In, two beam laser pass through simultaneously.
As shown in figure 4, the specific implementation method of different processing method selection switchings
The process of processing method selection is as follows: as shown in Figure 5 a, when on the laser light incident to the reflecting mirror of T2 that T1 comes out, swashing
Light is reflected into galvanometer, shaping post-processing flat work pieces by L4；As shown in Figure 5 b, the light that T1 comes out is incident on the light hole of T2
When, laser is reflected on focus lamp by L5, shaping post-processing pipe fitting workpiece；It as shown in Figure 5 c, is multi-wavelength when T1 comes out
When laser, after being incident on the semi-transparent semi-reflecting lens on T2, it is divided into the laser of two beam different wave lengths, respectively enters different cutting heads,
It can be with simultaneous processing flat work pieces and pipe fitting workpiece.
In the preferred embodiment of the utility model, as shown in Figure 1, the system further includes that setting is filled in each beam shaping
The semi-transparent semi-reflecting lens and vision CCD at end are postponed, to observe part to be processed state in real time.
In the preferred embodiment of the utility model, as shown in Figure 1, be provided on processing platform translation part, lifting portion and/
Rotating part is conducive to comprehensive processing to processing part for realizing translation, lifting or the/rotation on processing platform.
It should be understood that for those of ordinary skills, it can be modified or changed according to the above description,
And all these modifications and variations all should belong to the protection scope of the appended claims for the utility model.
Claims (7)
1. the femtosecond laser system of processing of a kind of multi-wavelength and multi-processing mode, which is characterized in that more including being arranged along optical path
Long wavelength laser, light path switching device, light-beam forming unit and processing platform；The multiple-wavelength laser can generate it is multiple not
The laser of co-wavelength, and once emit the laser of one or more different wave lengths；The light path switching device be equipped with it is multiple, each
Light path switching device includes light hole, reflecting mirror and spectroscope；The quantity and multiple-wavelength laser of the light-beam forming unit are sent out
The quantity for the laser penetrated is consistent, and each light-beam forming unit includes beam expanding lens, collimating mirror, focus lamp, galvanometer and coupling focus lamp；
The processing platform is consistent with the quantity for the laser that multiple-wavelength laser emits, and each processing platform is for fixing respective material
Processed product.
2. the femtosecond laser system of processing of multi-wavelength according to claim 1 and multi-processing mode, which is characterized in that described
Multiple-wavelength laser include it is multiple determine long wavelength laser, each determine the laser that long wavelength laser emits a kind of wavelength.
3. the femtosecond laser system of processing of multi-wavelength according to claim 1 and multi-processing mode, which is characterized in that described
Multiple-wavelength laser includes laser generating mechanism and the laser light splitting frequency multiplication for emitting the laser generating mechanism into difference
The light splitting frequency multiplication mechanism of wavelength laser.
4. the femtosecond laser system of processing of multi-wavelength according to claim 1 and multi-processing mode, which is characterized in that described
Light path switching device includes motor and the mirror holder that is mounted on the motor output shaft, is set on the mirror holder there are two through-hole,
Reflecting mirror or spectroscope are installed according to demand, another through-hole is as light hole on one of through-hole.
5. the femtosecond laser system of processing of multi-wavelength according to claim 1 and multi-processing mode, which is characterized in that this is
System further includes the one-to-one beam expanding lens of laser that multiple-wavelength laser rear end is arranged in and emits with it.
6. the femtosecond laser system of processing of multi-wavelength according to claim 1 and multi-processing mode, which is characterized in that this is
System further includes the semi-transparent semi-reflecting lens and vision CCD that each light-beam forming unit rear end is arranged in.
7. the femtosecond laser system of processing of multi-wavelength according to claim 1 and multi-processing mode, which is characterized in that described
Translation part, lifting portion and/rotating part are provided on processing platform, for realizing translation, lifting or the/rotation on processing platform.
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| CN201821404754.3U CN209050272U (en) | 2018-08-29 | 2018-08-29 | A kind of femtosecond laser system of processing of multi-wavelength and multi-processing mode |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111604582A (en) * | 2020-06-05 | 2020-09-01 | 青岛昆仑天峰航空科技有限公司 | Three-band laser double-focusing-head laser processing system and method |
| CN112247371A (en) * | 2020-10-13 | 2021-01-22 | 镭煌激光技术(苏州)有限公司 | Flexible laser energy combining control system of laser light path |
-
2018
- 2018-08-29 CN CN201821404754.3U patent/CN209050272U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111604582A (en) * | 2020-06-05 | 2020-09-01 | 青岛昆仑天峰航空科技有限公司 | Three-band laser double-focusing-head laser processing system and method |
| CN112247371A (en) * | 2020-10-13 | 2021-01-22 | 镭煌激光技术(苏州)有限公司 | Flexible laser energy combining control system of laser light path |
| CN112247371B (en) * | 2020-10-13 | 2022-08-02 | 镭煌激光技术(苏州)有限公司 | Flexible laser energy combining control system of laser light path |
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