JPS62290860A - Carburizing and hardening apparatus - Google Patents

Carburizing and hardening apparatus

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Publication number
JPS62290860A
JPS62290860A JP13533186A JP13533186A JPS62290860A JP S62290860 A JPS62290860 A JP S62290860A JP 13533186 A JP13533186 A JP 13533186A JP 13533186 A JP13533186 A JP 13533186A JP S62290860 A JPS62290860 A JP S62290860A
Authority
JP
Japan
Prior art keywords
furnace
carburizing
high frequency
plasma
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13533186A
Other languages
Japanese (ja)
Other versions
JPH07110989B2 (en
Inventor
Hiroshi Tomita
博 富田
Ichiro Asano
一朗 浅野
Tatsuro Araki
達朗 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP61135331A priority Critical patent/JPH07110989B2/en
Publication of JPS62290860A publication Critical patent/JPS62290860A/en
Publication of JPH07110989B2 publication Critical patent/JPH07110989B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To considerably improve the quality of a treated product and the efficiency of treatment by separately placing a plasma carburizing furnace provided with a high frequency coil for diffusion heating and a high frequency hardening furnace side by side so that carburization and hardening can be carried out in parallel with each other. CONSTITUTION:A body W to be treated is conveyend into a plasma carburizing furnace 1 provided with a high frequency coil 14 for diffusion heating. In the furnace 1, the body W is subjected to plasma carburization by high frequency heating. The body W is then taken out of the furnace 1 in a way reverse to the conveying way and conveyed into a high frequency hardening furnace 2 placed separately from the furnace 1 side by side. The body W hardened in the furnace 2 is taken out of the furnace 2 in a way reverse to the conveying-in way.

Description

【発明の詳細な説明】 3、発明の詳細な説明 (産業上の利用分野) 本発明は、プラズマ浸炭処理及び高周波焼入処理を順次
行なうための装置に関ずろものである。
Detailed Description of the Invention 3. Detailed Description of the Invention (Field of Industrial Application) The present invention relates to an apparatus for sequentially performing plasma carburizing treatment and induction hardening treatment.

(従来の技術) 従来、第3図に示す如く加熱チャンバ21内でガス浸炭
処理を行なった後、冷却セクション22でのファン23
による冷却によって被処理物Wの結晶粒を微細化し、し
かる後被処理物Wを加熱チャンバ21内に戻して再び加
熱してからタンク24内に下降させて油焼入処理を行な
っていた。
(Prior Art) Conventionally, as shown in FIG. 3, after gas carburizing treatment is performed in a heating chamber 21, a fan 23
The crystal grains of the object W to be processed are made fine by cooling, and then the object W to be processed is returned to the heating chamber 21, heated again, and then lowered into the tank 24 for oil quenching treatment.

(発明が解決しようとする問題点) しかし、密閉された1個の炉25内に加熱チャンバ21
及び冷却セクション22を設けており、ガス浸炭後加熱
チャンバ21内の高温ガスが冷却セクション22に流入
するため、冷却セクション22でのファン冷却では被処
理物Wの冷却に時間がかかり、浸炭後に粗大化した心部
の結晶粒微細化が不十分となるから、高品質な焼入れが
できないと共に、ガス浸炭と油焼入れを同時に行なえず
、加熱チャンバ21及び冷却セクション22間で被処理
物Wを2度も往復させて加熱と冷却を繰り返す必要があ
るから、処理能率が悪いという不都合を免れなかった。
(Problem to be Solved by the Invention) However, there is no heating chamber 21 in one sealed furnace 25.
and a cooling section 22 are provided, and the high-temperature gas in the heating chamber 21 flows into the cooling section 22 after gas carburizing, so fan cooling in the cooling section 22 takes time to cool down the workpiece W, resulting in coarse particles after carburizing. Since grain refinement in the core of the carburized core becomes insufficient, high-quality quenching cannot be performed, gas carburizing and oil quenching cannot be performed at the same time, and the workpiece W is heated twice between the heating chamber 21 and the cooling section 22. Since it is necessary to repeat heating and cooling by reciprocating the heating and cooling, the processing efficiency is inevitably low.

(発明の目的) 本発明は、前記従来の問題点を解決するためになしたも
ので、プラズマ浸炭及び高周波焼入れを互いに独立して
行なえるようにして、プラズマ浸炭の利点(処理の高速
性及び均一性)の有効利用と、浸炭及び焼入れの並行処
理とによって処理品質及び能率の大幅な向上を図ること
を目的とする。
(Object of the Invention) The present invention was made to solve the above-mentioned conventional problems, and it enables plasma carburizing and induction hardening to be performed independently of each other, thereby achieving the advantages of plasma carburizing (high-speed processing and The aim is to significantly improve processing quality and efficiency by effectively utilizing the uniformity of the steel and by performing carburizing and quenching in parallel.

(問題点を解決するための手段) 本発明の浸炭焼入処理装置は、プラズマ浸炭炉及び高周
波焼入炉を独立して並設し、該プラズマ浸炭炉内に拡散
加熱用高周波コイルを設けたことを特徴とするものであ
る。
(Means for Solving the Problems) The carburizing and quenching treatment apparatus of the present invention includes a plasma carburizing furnace and an induction quenching furnace that are installed independently in parallel, and a diffusion heating high-frequency coil provided in the plasma carburizing furnace. It is characterized by this.

(実 施 例) 以下、本発明の一実施例を第1図に沿い説明する。(Example) An embodiment of the present invention will be described below with reference to FIG.

図中1は1個又は複数個のプラズマ浸炭炉、2は1個又
は複数個の高周波焼入炉で、共通した1個の搬送室3の
上部に互いに独立して並設されており、各炉底壁には、
蓋4により開閉可能な開口部5が設けられている。
In the figure, 1 is one or more plasma carburizing furnaces, 2 is one or more induction hardening furnaces, and they are arranged independently and in parallel above a common transfer chamber 3. On the bottom wall of the hearth,
An opening 5 that can be opened and closed by a lid 4 is provided.

搬送室3の床面には、上部室1,2の開口部5の直下位
置にて図示しないシリンダにより互いに独立して昇降可
能な複数本の昇降ラム6と、搬送室3床面上を走行可能
で、かつ、昇降ラム6が貫通可能な1台又は複数台の台
車7が設置されている。この台車7には、その昇降用ジ
ヤツキ7Aが設けられており、該台車7上には、上下1
!8.8’を備えた金属製筒状カバー9が載置可能にな
っている。このカバー9は、図示しないガス充填装置と
、容器底部のラム昇降口をカーテンシールする図示しな
いガスカーテン発生装置を備えている。また、搬送室3
の搬入出口の外部には搬送コンベヤ10,11が設けら
れると共に、該搬送室3には図示しない真空吸引装置及
びガス供給装置が接続されている。
On the floor of the transfer chamber 3, there are a plurality of elevating rams 6 that can be raised and lowered independently from each other by cylinders (not shown) located directly below the openings 5 of the upper chambers 1 and 2, and a plurality of elevating rams 6 that run on the floor of the transfer chamber 3. One or more carts 7 are installed which are capable of moving and through which the lifting ram 6 can pass. This truck 7 is provided with a jack 7A for raising and lowering the truck 7.
! A metal cylindrical cover 9 having a diameter of 8.8' can be placed thereon. This cover 9 includes a gas filling device (not shown) and a gas curtain generating device (not shown) that curtain-seals the ram elevating port at the bottom of the container. In addition, the transfer chamber 3
Transport conveyors 10 and 11 are provided outside the loading/unloading port of the transport chamber 3, and a vacuum suction device and a gas supply device (not shown) are connected to the transport chamber 3.

プラズマ浸炭炉lの床面上、開口部5の周りには、図示
しない移動装置により開口部5の中心に向かい進退可能
な陰極兼用の導電性架台12が設けられ、該架台12の
上方には、綱状板又は多孔板等を筒状に形成した陽極1
3及び該陽極13を取り囲む高周波コイル14が開口部
5と間怠に配置されており、架台12及び陽極13には
放電用直流電源15が接続され、かつ高周波コイル14
には図示しない高周波発生用交流電源が接続されている
。また、プラズマ浸炭炉1には図示しないガス供給装置
と真空吸引装置と排気装置とが接続されると共に、該炉
上部には、炉内に冷気を供給可能な冷却コイル16及び
ファン17が設けられている。
On the floor of the plasma carburizing furnace 1, around the opening 5, there is provided a conductive pedestal 12 which also serves as a cathode and which can be moved forward and backward toward the center of the opening 5 by means of a moving device (not shown). , an anode 1 formed of a cylindrical plate or a porous plate, etc.
A high-frequency coil 14 surrounding the anode 13 and the anode 13 is arranged between the opening 5 and the pedestal 12 and the anode 13.
An AC power source for high frequency generation (not shown) is connected to. Further, a gas supply device, a vacuum suction device, and an exhaust device (not shown) are connected to the plasma carburizing furnace 1, and a cooling coil 16 and a fan 17 that can supply cold air into the furnace are provided at the top of the furnace. ing.

高周波焼入炉2の床面上、開口部5の周りには、図示し
ない移動装置により開口部5の中心に向かい進退可能な
架台18が設けられ、該架台18の上方には、前記高周
波コイル14と同一電源に接続された高周波コイル19
が開口部5と間怠に配置され、高周波コイル19には、
コイル内を液供給路に形成し、かつ、多数の細孔を穿設
した図示しない焼入液スプレィ装置が組み込まれている
。また、高周波焼入炉2には図示しないガス供給装置と
真空吸引装置とが接続されている。
On the floor of the induction hardening furnace 2, around the opening 5, there is provided a pedestal 18 that can move forward and backward toward the center of the opening 5 by a moving device (not shown). High frequency coil 19 connected to the same power source as 14
is arranged between the opening 5 and the high frequency coil 19.
A quenching liquid spray device (not shown) is incorporated in which the inside of the coil is formed as a liquid supply path and a large number of pores are bored. Furthermore, a gas supply device and a vacuum suction device (not shown) are connected to the induction hardening furnace 2.

(作 用) 被処理物Wは、導電性の支持台20上に載置され、かつ
、!8.8’の付いたカバー9内に収められて搬送コン
ベヤ10により搬送され、搬送室3内の台車7上にカバ
ー9ごと移載された後、台車7によりプラズマ浸炭炉1
の直下の所定位置まで搬送される。
(Function) The workpiece W is placed on the conductive support base 20, and! 8.8' is placed in the cover 9 and is transported by the transport conveyor 10, and after being transferred together with the cover 9 onto the trolley 7 in the transport chamber 3, the trolley 7 moves it to the plasma carburizing furnace 1.
is transported to a predetermined position directly below.

次いで、カバー9の上部M8を外し、がっ、シリンダの
ロンド伸長作動により昇降ラム6を上昇させると、昇降
ラム6は台車7及びカバー9の底部蓋8′を貫通して上
昇するがら、被処理物Wは、この昇降ラム6上に支持台
2oごと移載されて上昇し、開口部5を経てプラズマ浸
炭炉1内に搬入される。
Next, when the upper part M8 of the cover 9 is removed and the elevating ram 6 is raised by the cylinder's rond extension operation, the elevating ram 6 passes through the trolley 7 and the bottom lid 8' of the cover 9 and rises. The workpiece W is transferred onto this elevating ram 6 together with the support table 2o and ascends, and is carried into the plasma carburizing furnace 1 through the opening 5.

昇降ラム6が上昇端位置に達すると、架台12は昇降ラ
ム6に支持された支持台2oの下部に移動設置されるか
ら、シリンダのロンド短縮作動により昇降ラム6を下降
させると、支持台20は架台12を介して炉床面上に支
持され、被処理物Wは、陽極13及び高周波コイル14
に取り囲まれたその中心位置に配置される。昇降ラム6
は下降して元の位置に戻ると共に、開口部5はM4で閉
じられる(炉内搬入)。
When the elevating ram 6 reaches the ascending end position, the gantry 12 is moved to the lower part of the support stand 2o supported by the elevating ram 6. Therefore, when the elevating ram 6 is lowered by the cylinder Rondo shortening operation, the support stand 20 is supported on the hearth surface via a pedestal 12, and the workpiece W is supported by an anode 13 and a high frequency coil 14.
It is placed at the center surrounded by. Lifting ram 6
is lowered and returned to its original position, and the opening 5 is closed with M4 (carrying into the furnace).

次いで、第2図に示す如く、真空吸引装置の作動でプラ
ズマ浸炭炉1内を減圧し真空度を上げると共に、ガス供
給装置で窒素ガスを供給し、2X−3 大体真空度が5 X 10    Torrに達したと
き、この真空度を保持しながら高周波コイル14に交流
電圧を印加して被処理物Wを高周波加熱で加熱すると、
被処理物Wは、A3変態点で機械加工時の応力を除去さ
れてプラズマ発生温度の大体900〜1000℃(最大
1100℃)まで加熱される。
Next, as shown in FIG. 2, the pressure inside the plasma carburizing furnace 1 is reduced by operating the vacuum suction device to increase the degree of vacuum, and nitrogen gas is supplied by the gas supply device, so that the degree of vacuum is approximately 5 X 10 Torr. When the vacuum level is reached, an AC voltage is applied to the high frequency coil 14 while maintaining this degree of vacuum, and the workpiece W is heated by high frequency heating.
The workpiece W is heated to a plasma generation temperature of about 900 to 1000°C (maximum 1100°C) after the stress during machining is removed at the A3 transformation point.

次いで、真空度をプラズマ発生真空度の大体0.1〜1
.0Torrまで下げ、かつ、還元性ガスの水素ガスと
浸炭性ガスのプロパンとを供給すると共に、被処理物W
(陰極)と陽橿13との間に直流電圧を印加すると、上
記真空度及び温度下で電離密度の高い負グロー放電が安
定的に発生し気体をプラズマ化するから、プラズマ浸炭
を行なうことができる(浸炭期)。
Next, the degree of vacuum is set to approximately 0.1 to 1 of the plasma generation vacuum degree.
.. While lowering the pressure to 0 Torr and supplying hydrogen gas as a reducing gas and propane as a carburizing gas,
When a DC voltage is applied between the (cathode) and the positive pole 13, a negative glow discharge with high ionization density is stably generated under the above degree of vacuum and temperature, converting the gas into plasma, making it possible to perform plasma carburizing. possible (carburizing stage).

浸炭後放電を停止し、かつ、真空度を再び上げて、高周
波加熱だけをさらに継続して、被処理物W表面へ炭素を
より多く拡散浸透させる(拡散器)。
After carburizing, the discharge is stopped, the degree of vacuum is raised again, and only high-frequency heating is continued to diffuse and penetrate more carbon into the surface of the workpiece W (diffuser).

次いで、高周波加熱を停止し、かつ、真空度を下げると
共に、冷却コイル16とファン17を作動させて炉内ガ
スを冷却循環させると、被処理物Wは冷却され、高温度
加熱で粗大化した結晶粒が微細化される(ガス冷却)。
Next, the high-frequency heating is stopped, the degree of vacuum is lowered, and the cooling coil 16 and the fan 17 are activated to cool and circulate the gas in the furnace, so that the workpiece W is cooled and coarsened by high-temperature heating. Crystal grains are refined (gas cooling).

次いで、ガス供給装置で高周波焼入炉2内及び搬送室3
内に窒素ガスを充満させると共に、カバー9の底部をカ
ーテンシールしながら該カバー9内に窒素ガスを充満さ
せた状態下で開口部5を開き、かつ、台車7をジヤツキ
アンプして炉底に押付け、前記炉内搬入手順と逆の手順
で被処理物Wをプラズマ浸炭炉1内から搬出し台車7上
のカバー9内に収めて蓋8をし、かつ台車7をジャフキ
ダウンして高周波焼入炉2の直下の所定位置まで搬送し
た後、前記と同じ炉内搬入手順で被処理物Wを高周波焼
入炉2内に架台18で支持壁て高周波コイル19に取り
囲まれたその中心位置に配置し、かつ、開口部5を閉じ
、しかる後、真空吸引装置の作動で高周波焼入炉2内を
減圧し真空度を上げ、真空度が大体5 X 10−2x
−3Torrに達したとき、この真空度を保持しながら
高周波コイル19に交流電圧を印加して被処理物Wを高
周波加熱で750〜850℃に5分間加熱した後、油或
は水等を焼入液スプレィ装置で被処理物Wにスプレィす
ると、被処理物Wの焼入処理が完了する。一方、高周波
加熱終了の辺りで炉内圧を大気圧に戻しておき、処理後
開口部5を開き、前記炉内搬入手順と逆の手順で処理完
了品W′は高周波焼入炉2内から搬出され台車7で搬出
コンベヤ11へと送り出される。このときカバー9が上
部蓋8とともに外される。
Next, the inside of the induction hardening furnace 2 and the transfer chamber 3 are supplied with a gas supply device.
At the same time, while the bottom of the cover 9 is curtain-sealed, the opening 5 is opened while the cover 9 is filled with nitrogen gas, and the cart 7 is jacked up and pressed against the bottom of the furnace. , the workpiece W is carried out from the plasma carburizing furnace 1 by the reverse procedure of carrying into the furnace, placed in the cover 9 on the trolley 7, and covered with the lid 8, and the trolley 7 is jagged down to be transferred to the induction hardening furnace. 2, the workpiece W is placed in the induction hardening furnace 2 at the center of the induction hardening furnace 2 surrounded by the high-frequency coil 19 using the support wall 18. , and close the opening 5, and then operate the vacuum suction device to reduce the pressure inside the induction hardening furnace 2 and increase the degree of vacuum, so that the degree of vacuum is approximately 5 x 10-2x.
-3 Torr, while maintaining this degree of vacuum, apply an AC voltage to the high frequency coil 19 to heat the workpiece W to 750 to 850°C for 5 minutes by high frequency heating, and then burn off oil, water, etc. When the liquid is sprayed onto the workpiece W using a liquid injection spray device, the hardening process of the workpiece W is completed. On the other hand, near the end of high-frequency heating, the pressure inside the furnace is returned to atmospheric pressure, the post-processing opening 5 is opened, and the processed product W' is transported out of the high-frequency hardening furnace 2 in the reverse order of the transport procedure into the furnace. and sent out to a carry-out conveyor 11 by a cart 7. At this time, the cover 9 is removed together with the upper lid 8.

ところで、上記作業は、プラズマ浸炭炉1と高周波焼入
炉2が各1個の場合等、浸炭及び焼入れを順次行なう場
合であるが、プラズマ浸炭炉1と高周波焼入炉2が各複
数個である場合には、浸炭処理後の被処理物Wが高周波
焼入炉2に搬入されており、その焼入れ処理を他の被処
理物Wの浸炭処理と並行して行なうことが考えられる。
By the way, the above work is performed when carburizing and quenching are performed sequentially, such as when there is one plasma carburizing furnace 1 and one induction quenching furnace 2, but when there are multiple plasma carburizing furnaces 1 and multiple induction quenching furnaces 2. In some cases, the workpiece W after carburization is carried into the induction hardening furnace 2, and the hardening process may be performed in parallel with the carburization of other workpieces W.

かかる場合、上記作業で必要な電力は、プラズマ浸炭炉
1ではプラズマ浸炭の浸炭期に400 KW、拡散器に
200 KWであるのに対し、高周波焼入炉2では加熱
保持に400KWであり、拡散器の230分間の間に高
周波焼入炉2に電力を回すことができるから、各炉の独
立構造上プラズマ浸炭処理を行ないながらその拡散器に
高周波焼入れ処理を開始しガス冷却時にかけて、或はガ
ス冷却時だけで、画処理を並行して同一の高周波発生電
源により行なうことができる。
In such a case, the power required for the above work is 400 KW for the carburizing period of plasma carburizing in the plasma carburizing furnace 1 and 200 KW for the diffuser, whereas the power required for the above work is 400 KW for the heating and holding in the induction hardening furnace 2, and the power required for the diffusion Since electric power can be passed to the induction hardening furnace 2 during the 230 minutes of heating, the induction hardening process is started on the diffuser while performing plasma carburizing treatment due to the independent structure of each furnace, and during gas cooling, or Only during gas cooling, image processing can be performed in parallel using the same high-frequency generating power source.

(発明の効果) 以上の通り本発明は、プラズマ浸炭及び高周波焼入れを
互いに独立して行なえるから、浸炭及び焼入れの並行処
理が可能となり、プラズマ浸炭の利点(処理の高速性及
び均一性)の有効利用と相俟って処理品質及び能率の大
幅な向上を図れると共に、高周波発生電源の共用が可能
となり、これによって設備費の低減と省エネルギーとを
図れる。
(Effects of the Invention) As described above, in the present invention, plasma carburizing and induction hardening can be performed independently of each other, so parallel processing of carburizing and quenching is possible, and the advantages of plasma carburizing (high speed and uniformity of processing) can be realized. Together with effective utilization, it is possible to significantly improve processing quality and efficiency, and it is also possible to share the high frequency generation power source, thereby reducing equipment costs and saving energy.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す概要図、第2図は浸炭
焼入処理操業サイクル図、第3図は従来例を示す概要図
である。 1・・プラズマ浸炭炉、2・・高周波焼入炉、3・・搬
送室、4・・蓋、5・・開口部、6・・昇降ラム、7・
・台車、8,9・・密閉扉、10.11 ・・搬送コン
ベヤ、12.18・・架台、13・・陽極、14.19
・・高周波コイル、15・・直流電源、16・・冷却コ
イル、17・・ファン、20・・支持台。
FIG. 1 is a schematic diagram showing an embodiment of the present invention, FIG. 2 is a carburizing and quenching operation cycle diagram, and FIG. 3 is a schematic diagram showing a conventional example. 1. Plasma carburizing furnace, 2. Induction quenching furnace, 3. Transfer chamber, 4. Lid, 5. Opening, 6. Lifting ram, 7.
・Dolly, 8, 9... Sealed door, 10.11 ・Transport conveyor, 12.18... Frame, 13... Anode, 14.19
...High frequency coil, 15.. DC power supply, 16.. Cooling coil, 17.. Fan, 20.. Support stand.

Claims (1)

【特許請求の範囲】[Claims] プラズマ浸炭炉及び高周波焼入炉を独立して並設し、該
プラズマ浸炭炉内に拡散加熱用高周波コイルを設けたこ
とを特徴とする浸炭焼入処理装置。
1. A carburizing and quenching treatment apparatus, characterized in that a plasma carburizing furnace and an induction quenching furnace are arranged independently in parallel, and a high-frequency coil for diffusion heating is provided in the plasma carburizing furnace.
JP61135331A 1986-06-11 1986-06-11 Vacuum processing device Expired - Lifetime JPH07110989B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61135331A JPH07110989B2 (en) 1986-06-11 1986-06-11 Vacuum processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61135331A JPH07110989B2 (en) 1986-06-11 1986-06-11 Vacuum processing device

Publications (2)

Publication Number Publication Date
JPS62290860A true JPS62290860A (en) 1987-12-17
JPH07110989B2 JPH07110989B2 (en) 1995-11-29

Family

ID=15149266

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Application Number Title Priority Date Filing Date
JP61135331A Expired - Lifetime JPH07110989B2 (en) 1986-06-11 1986-06-11 Vacuum processing device

Country Status (1)

Country Link
JP (1) JPH07110989B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007321221A (en) * 2006-06-02 2007-12-13 Hirohisa Taniguchi Compound marquenching apparatus and controlling method therefor
US7998282B2 (en) 2005-09-26 2011-08-16 Aisin Aw Co., Ltd. Heat treatment method of steel components, steel components and manufacture method of steel components

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014141710A (en) * 2013-01-24 2014-08-07 Y S Denshi Kogyo Kk Plasma processing device
JP6195773B2 (en) * 2013-10-11 2017-09-13 Dowaサーモテック株式会社 Carburizing and quenching equipment
JP6629807B2 (en) * 2017-09-27 2020-01-15 中谷 進 Plasma processing equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53131930A (en) * 1977-04-25 1978-11-17 Nippon Denshi Kogyo Kk Method of hardening metallic surface by utilizing glow discharge
JPS5925974A (en) * 1982-08-03 1984-02-10 Toyota Motor Corp High-temperature carburization device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53131930A (en) * 1977-04-25 1978-11-17 Nippon Denshi Kogyo Kk Method of hardening metallic surface by utilizing glow discharge
JPS5925974A (en) * 1982-08-03 1984-02-10 Toyota Motor Corp High-temperature carburization device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7998282B2 (en) 2005-09-26 2011-08-16 Aisin Aw Co., Ltd. Heat treatment method of steel components, steel components and manufacture method of steel components
JP5432451B2 (en) * 2005-09-26 2014-03-05 アイシン・エィ・ダブリュ株式会社 Steel member, heat treatment method thereof, and production method thereof
JP2007321221A (en) * 2006-06-02 2007-12-13 Hirohisa Taniguchi Compound marquenching apparatus and controlling method therefor

Also Published As

Publication number Publication date
JPH07110989B2 (en) 1995-11-29

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