JPS6228871U - - Google Patents
Info
- Publication number
- JPS6228871U JPS6228871U JP11846685U JP11846685U JPS6228871U JP S6228871 U JPS6228871 U JP S6228871U JP 11846685 U JP11846685 U JP 11846685U JP 11846685 U JP11846685 U JP 11846685U JP S6228871 U JPS6228871 U JP S6228871U
- Authority
- JP
- Japan
- Prior art keywords
- optical chamber
- laser irradiation
- irradiation source
- chamber connected
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
Description
第１図は本考案の第１実施例を示す概略側面図
、第２図は本考案の第２実施例を示す概略側面図
、第３図は本考案の第３実施例に示す概略側面図
、第４図は本考案の第４実施例を示す概略側面図
、第５図は従来例の概略側面図である。
１０……レーザ照射源１０、２０……光学室、
３０……成膜室。
Fig. 1 is a schematic side view showing a first embodiment of the invention, Fig. 2 is a schematic side view showing a second embodiment of the invention, and Fig. 3 is a schematic side view showing a third embodiment of the invention. , FIG. 4 is a schematic side view showing a fourth embodiment of the present invention, and FIG. 5 is a schematic side view of a conventional example. 10... Laser irradiation source 10, 20... Optical room,
30... Film forming chamber.
Claims (1)
と、光学室に接続した成膜室とを具備しており、
前記光学室を真空または不活性ガスにて充填した
ことを特徴とする光ＣＶＤ装置。 It is equipped with a laser irradiation source, an optical chamber connected to the laser irradiation source, and a film formation chamber connected to the optical chamber.
A photo-CVD apparatus characterized in that the optical chamber is filled with vacuum or inert gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11846685U JPS6228871U (en) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11846685U JPS6228871U (en) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228871U true JPS6228871U (en) | 1987-02-21 |
Family
ID=31004943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11846685U Pending JPS6228871U (en) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228871U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59129774A (en) * | 1983-01-12 | 1984-07-26 | Fuji Xerox Co Ltd | Selective formation of nitrided film |
| JPS609875A (en) * | 1983-06-27 | 1985-01-18 | Nec Corp | Photochemical reaction device |
-
1985
- 1985-07-31 JP JP11846685U patent/JPS6228871U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59129774A (en) * | 1983-01-12 | 1984-07-26 | Fuji Xerox Co Ltd | Selective formation of nitrided film |
| JPS609875A (en) * | 1983-06-27 | 1985-01-18 | Nec Corp | Photochemical reaction device |