JPH01133757U - - Google Patents
Info
- Publication number
- JPH01133757U JPH01133757U JP3005988U JP3005988U JPH01133757U JP H01133757 U JPH01133757 U JP H01133757U JP 3005988 U JP3005988 U JP 3005988U JP 3005988 U JP3005988 U JP 3005988U JP H01133757 U JPH01133757 U JP H01133757U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- discharge
- excimer laser
- main
- electrode body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910001369 Brass Inorganic materials 0.000 claims 1
- 239000010951 brass Substances 0.000 claims 1
- 230000005284 excitation Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第１図は本考案実施例の平面図、第２図はその
―断面図、第３図はその実施例のレーザチヤ
ンバ３内での配設状態を示す断面図、第４図およ
び第５図は本考案が解決しようとする課題を説明
するための図である。
１……電極本体、１ａ……その一つの面、２…
…ニツケル製の被膜。
FIG. 1 is a plan view of an embodiment of the present invention, FIG. 2 is a sectional view thereof, FIG. 3 is a sectional view showing the arrangement of the embodiment in a laser chamber 3, and FIGS. 4 and 5 are FIG. 3 is a diagram for explaining the problem to be solved by the present invention. 1... Electrode body, 1a... One surface thereof, 2...
...Nickel coating.
Claims (1)
電極であつて、電極本体を黄銅により形成すると
ともに、その電極本体の、少なくとも放電面を除
く外周面にはニツケル製の被膜を形成したことを
特徴とする、エキシマレーザ用主放電電極。 A main electrode for laser discharge excitation in an excimer laser, characterized in that the electrode body is made of brass, and a nickel coating is formed on at least the outer peripheral surface of the electrode body excluding the discharge surface. Main discharge electrode for excimer laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3005988U JPH01133757U (en) | 1988-03-07 | 1988-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3005988U JPH01133757U (en) | 1988-03-07 | 1988-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01133757U true JPH01133757U (en) | 1989-09-12 |
Family
ID=31254786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3005988U Pending JPH01133757U (en) | 1988-03-07 | 1988-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133757U (en) |
-
1988
- 1988-03-07 JP JP3005988U patent/JPH01133757U/ja active Pending