JPS6255561U - - Google Patents
Info
- Publication number
- JPS6255561U JPS6255561U JP14834185U JP14834185U JPS6255561U JP S6255561 U JPS6255561 U JP S6255561U JP 14834185 U JP14834185 U JP 14834185U JP 14834185 U JP14834185 U JP 14834185U JP S6255561 U JPS6255561 U JP S6255561U
- Authority
- JP
- Japan
- Prior art keywords
- parabolic mirror
- chamber
- transmission window
- cvd apparatus
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例を示す構成模式図
、第２図は従来の光ＣＶＤ装置を示す構成模式図
である。
１０……チヤンバ、６０……光透過窓、８０…
…放物面鏡、９０……光源。
FIG. 1 is a schematic diagram showing an embodiment of this invention, and FIG. 2 is a schematic diagram showing a conventional optical CVD apparatus. 10...Chamber, 60...Light transmission window, 80...
...parabolic mirror, 90... light source.
Claims (1)
鏡と、この放物面鏡の焦点に設けた光源とを具備
したことを特徴とする光ＣＶＤ装置。 An optical CVD apparatus comprising: a parabolic mirror disposed facing a light transmission window of a chamber; and a light source provided at the focal point of the parabolic mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14834185U JPS6255561U (en) | 1985-09-27 | 1985-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14834185U JPS6255561U (en) | 1985-09-27 | 1985-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255561U true JPS6255561U (en) | 1987-04-06 |
Family
ID=31062516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14834185U Pending JPS6255561U (en) | 1985-09-27 | 1985-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255561U (en) |
-
1985
- 1985-09-27 JP JP14834185U patent/JPS6255561U/ja active Pending