JPS62288603A - Highly sensitive photopolymerizable composition - Google Patents
Highly sensitive photopolymerizable compositionInfo
- Publication number
- JPS62288603A JPS62288603A JP13258986A JP13258986A JPS62288603A JP S62288603 A JPS62288603 A JP S62288603A JP 13258986 A JP13258986 A JP 13258986A JP 13258986 A JP13258986 A JP 13258986A JP S62288603 A JPS62288603 A JP S62288603A
- Authority
- JP
- Japan
- Prior art keywords
- group
- substituted
- photopolymerizable composition
- parts
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 85
- 229920000642 polymer Polymers 0.000 claims abstract description 33
- 239000000178 monomer Substances 0.000 claims abstract description 21
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims abstract description 16
- NPKSPKHJBVJUKB-UHFFFAOYSA-N N-phenylglycine Chemical compound OC(=O)CNC1=CC=CC=C1 NPKSPKHJBVJUKB-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000003999 initiator Substances 0.000 claims abstract description 15
- -1 (substituted) amino Chemical group 0.000 claims abstract description 14
- 229920001577 copolymer Polymers 0.000 claims abstract description 12
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 8
- 125000003545 alkoxy group Chemical group 0.000 claims abstract description 7
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 5
- 239000000126 substance Substances 0.000 claims description 22
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 16
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 12
- 125000005843 halogen group Chemical group 0.000 claims description 11
- 125000003277 amino group Chemical group 0.000 claims description 9
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 7
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 7
- 125000000547 substituted alkyl group Chemical group 0.000 claims description 6
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 claims description 4
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 4
- 125000004434 sulfur atom Chemical group 0.000 claims description 4
- 125000005396 acrylic acid ester group Chemical group 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 abstract description 4
- 238000002156 mixing Methods 0.000 abstract description 3
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052736 halogen Inorganic materials 0.000 abstract 2
- 150000002367 halogens Chemical class 0.000 abstract 2
- 239000002861 polymer material Substances 0.000 abstract 2
- 125000000218 acetic acid group Chemical group C(C)(=O)* 0.000 abstract 1
- 238000004040 coloring Methods 0.000 abstract 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 abstract 1
- 239000000975 dye Substances 0.000 description 29
- 239000000243 solution Substances 0.000 description 26
- 230000035945 sensitivity Effects 0.000 description 18
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 15
- 150000001875 compounds Chemical class 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 4
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 4
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 4
- 238000007334 copolymerization reaction Methods 0.000 description 4
- 125000001424 substituent group Chemical group 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- FIDRAVVQGKNYQK-UHFFFAOYSA-N 1,2,3,4-tetrahydrotriazine Chemical compound C1NNNC=C1 FIDRAVVQGKNYQK-UHFFFAOYSA-N 0.000 description 3
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- 125000004018 acid anhydride group Chemical group 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 3
- 229920002601 oligoester Polymers 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 150000003440 styrenes Chemical class 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- ARXKVVRQIIOZGF-UHFFFAOYSA-N 1,2,4-butanetriol Chemical compound OCCC(O)CO ARXKVVRQIIOZGF-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- LRFVTYWOQMYALW-UHFFFAOYSA-N 9H-xanthine Chemical compound O=C1NC(=O)NC2=C1NC=N2 LRFVTYWOQMYALW-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- 150000003926 acrylamides Chemical class 0.000 description 2
- 238000012644 addition polymerization Methods 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- IAQRGUVFOMOMEM-UHFFFAOYSA-N but-2-ene Chemical compound CC=CC IAQRGUVFOMOMEM-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical class C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical class CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- MCVVUJPXSBQTRZ-ONEGZZNKSA-N methyl (e)-but-2-enoate Chemical compound COC(=O)\C=C\C MCVVUJPXSBQTRZ-ONEGZZNKSA-N 0.000 description 2
- 238000001226 reprecipitation Methods 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 229920001567 vinyl ester resin Polymers 0.000 description 2
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 1
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 1
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- NSOAQRMLVFRWIT-UHFFFAOYSA-N 1-ethenoxydecane Chemical compound CCCCCCCCCCOC=C NSOAQRMLVFRWIT-UHFFFAOYSA-N 0.000 description 1
- YAOJJEJGPZRYJF-UHFFFAOYSA-N 1-ethenoxyhexane Chemical compound CCCCCCOC=C YAOJJEJGPZRYJF-UHFFFAOYSA-N 0.000 description 1
- XXCVIFJHBFNFBO-UHFFFAOYSA-N 1-ethenoxyoctane Chemical compound CCCCCCCCOC=C XXCVIFJHBFNFBO-UHFFFAOYSA-N 0.000 description 1
- URJAUSYMVIZTHC-UHFFFAOYSA-N 2,4,6-tris(tribromomethyl)-1,3,5-triazine Chemical compound BrC(Br)(Br)C1=NC(C(Br)(Br)Br)=NC(C(Br)(Br)Br)=N1 URJAUSYMVIZTHC-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- RCSBILYQLVXLJG-UHFFFAOYSA-N 2-Propenyl hexanoate Chemical compound CCCCCC(=O)OCC=C RCSBILYQLVXLJG-UHFFFAOYSA-N 0.000 description 1
- PZGMUSDNQDCNAG-UHFFFAOYSA-N 2-Propenyl octanoate Chemical compound CCCCCCCC(=O)OCC=C PZGMUSDNQDCNAG-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- DSKYSDCYIODJPC-UHFFFAOYSA-N 2-butyl-2-ethylpropane-1,3-diol Chemical compound CCCCC(CC)(CO)CO DSKYSDCYIODJPC-UHFFFAOYSA-N 0.000 description 1
- GWZMWHWAWHPNHN-UHFFFAOYSA-N 2-hydroxypropyl prop-2-enoate Chemical compound CC(O)COC(=O)C=C GWZMWHWAWHPNHN-UHFFFAOYSA-N 0.000 description 1
- YIUOAAUFVBZQPM-UHFFFAOYSA-N 2-methyl-1,3,5-triazine Chemical compound CC1=NC=NC=N1 YIUOAAUFVBZQPM-UHFFFAOYSA-N 0.000 description 1
- POYODSZSSBWJPD-UHFFFAOYSA-N 2-methylprop-2-enoyloxy 2-methylprop-2-eneperoxoate Chemical compound CC(=C)C(=O)OOOC(=O)C(C)=C POYODSZSSBWJPD-UHFFFAOYSA-N 0.000 description 1
- HZGJTATYGAJRAL-UHFFFAOYSA-N 3,4,4a,5,6,7,8,8a-octahydro-2h-naphthalene-1,1-diol Chemical compound C1CCCC2C(O)(O)CCCC21 HZGJTATYGAJRAL-UHFFFAOYSA-N 0.000 description 1
- DSSAWHFZNWVJEC-UHFFFAOYSA-N 3-(ethenoxymethyl)heptane Chemical compound CCCCC(CC)COC=C DSSAWHFZNWVJEC-UHFFFAOYSA-N 0.000 description 1
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical compound ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- YKXAYLPDMSGWEV-UHFFFAOYSA-N 4-hydroxybutyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCO YKXAYLPDMSGWEV-UHFFFAOYSA-N 0.000 description 1
- NDWUBGAGUCISDV-UHFFFAOYSA-N 4-hydroxybutyl prop-2-enoate Chemical compound OCCCCOC(=O)C=C NDWUBGAGUCISDV-UHFFFAOYSA-N 0.000 description 1
- PQJUJGAVDBINPI-UHFFFAOYSA-N 9H-thioxanthene Chemical compound C1=CC=C2CC3=CC=CC=C3SC2=C1 PQJUJGAVDBINPI-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Natural products CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 1
- ZFDIRQKJPRINOQ-HWKANZROSA-N Ethyl crotonate Chemical compound CCOC(=O)\C=C\C ZFDIRQKJPRINOQ-HWKANZROSA-N 0.000 description 1
- MZNHUHNWGVUEAT-XBXARRHUSA-N Hexyl crotonate Chemical compound CCCCCCOC(=O)\C=C\C MZNHUHNWGVUEAT-XBXARRHUSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229920005603 alternating copolymer Polymers 0.000 description 1
- 238000012648 alternating copolymerization Methods 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- MWZGUEWUOKSFNL-UHFFFAOYSA-N benzoic acid;styrene Chemical compound C=CC1=CC=CC=C1.OC(=O)C1=CC=CC=C1 MWZGUEWUOKSFNL-UHFFFAOYSA-N 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229940105990 diglycerin Drugs 0.000 description 1
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 1
- XNMQEEKYCVKGBD-UHFFFAOYSA-N dimethylacetylene Natural products CC#CC XNMQEEKYCVKGBD-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- YCUBDDIKWLELPD-UHFFFAOYSA-N ethenyl 2,2-dimethylpropanoate Chemical compound CC(C)(C)C(=O)OC=C YCUBDDIKWLELPD-UHFFFAOYSA-N 0.000 description 1
- WNMORWGTPVWAIB-UHFFFAOYSA-N ethenyl 2-methylpropanoate Chemical compound CC(C)C(=O)OC=C WNMORWGTPVWAIB-UHFFFAOYSA-N 0.000 description 1
- LZWYWAIOTBEZFN-UHFFFAOYSA-N ethenyl hexanoate Chemical compound CCCCCC(=O)OC=C LZWYWAIOTBEZFN-UHFFFAOYSA-N 0.000 description 1
- BLZSRIYYOIZLJL-UHFFFAOYSA-N ethenyl pentanoate Chemical compound CCCCC(=O)OC=C BLZSRIYYOIZLJL-UHFFFAOYSA-N 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- MHCLJIVVJQQNKQ-UHFFFAOYSA-N ethyl carbamate;2-methylprop-2-enoic acid Chemical compound CCOC(N)=O.CC(=C)C(O)=O MHCLJIVVJQQNKQ-UHFFFAOYSA-N 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- WOLATMHLPFJRGC-UHFFFAOYSA-N furan-2,5-dione;styrene Chemical compound O=C1OC(=O)C=C1.C=CC1=CC=CC=C1 WOLATMHLPFJRGC-UHFFFAOYSA-N 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- LRDFRRGEGBBSRN-UHFFFAOYSA-N isobutyronitrile Chemical compound CC(C)C#N LRDFRRGEGBBSRN-UHFFFAOYSA-N 0.000 description 1
- 238000010147 laser engraving Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229940065472 octyl acrylate Drugs 0.000 description 1
- ANISOHQJBAQUQP-UHFFFAOYSA-N octyl prop-2-enoate Chemical compound CCCCCCCCOC(=O)C=C ANISOHQJBAQUQP-UHFFFAOYSA-N 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- HVAMZGADVCBITI-UHFFFAOYSA-M pent-4-enoate Chemical compound [O-]C(=O)CCC=C HVAMZGADVCBITI-UHFFFAOYSA-M 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- ULDDEWDFUNBUCM-UHFFFAOYSA-N pentyl prop-2-enoate Chemical compound CCCCCOC(=O)C=C ULDDEWDFUNBUCM-UHFFFAOYSA-N 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920001748 polybutylene Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920000166 polytrimethylene carbonate Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- ZQMAPKVSTSACQB-UHFFFAOYSA-N prop-2-enyl dodecanoate Chemical compound CCCCCCCCCCCC(=O)OCC=C ZQMAPKVSTSACQB-UHFFFAOYSA-N 0.000 description 1
- HAFZJTKIBGEQKT-UHFFFAOYSA-N prop-2-enyl hexadecanoate Chemical compound CCCCCCCCCCCCCCCC(=O)OCC=C HAFZJTKIBGEQKT-UHFFFAOYSA-N 0.000 description 1
- AABBHSMFGKYLKE-SNAWJCMRSA-N propan-2-yl (e)-but-2-enoate Chemical compound C\C=C\C(=O)OC(C)C AABBHSMFGKYLKE-SNAWJCMRSA-N 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- ZFDIRQKJPRINOQ-UHFFFAOYSA-N transbutenic acid ethyl ester Natural products CCOC(=O)C=CC ZFDIRQKJPRINOQ-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 229940075420 xanthine Drugs 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Polymerisation Methods In General (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野J
この発明は紫外光はもちろん可視光にも感応し、特に高
速で走査されるレーザ光線にも良く゛感応しうる高感度
光重合性組成物に関する。[Detailed Description of the Invention] [Industrial Field of Application J This invention provides a highly sensitive photopolymerizable composition that is sensitive not only to ultraviolet light but also to visible light, and particularly sensitive to laser beams scanned at high speed. Regarding.
[従来の技術]
従来、皮膜形成性高分子物質、1分子内に付加重合しつ
る炭素−炭素二重結合を少なくとも1何首するモノマー
ないしオリゴマーおよび光重合開始剤を含む光重合性組
成物は、印H11版やプリント基板、半導体などを作製
するときの感光性材料として広く利用されている。特に
、このような光重合性組成物を透明支持体上にlO〜1
00P程度の厚肉に層形成したドライフィルムフォトレ
ジストは、プリント基板作製用のフォトレジストとして
多用されている。[Prior Art] Conventionally, photopolymerizable compositions containing a film-forming polymeric substance, a monomer or oligomer having at least one addition-polymerized carbon-carbon double bond in one molecule, and a photopolymerization initiator have been used. It is widely used as a photosensitive material for manufacturing H11 printing plates, printed circuit boards, semiconductors, etc. In particular, such a photopolymerizable composition is deposited on a transparent support at lO~1
A dry film photoresist formed into a thick layer of approximately 00P is frequently used as a photoresist for producing printed circuit boards.
一方、近年、レーザ光線を用いて感光性材料層に所定パ
ターンを焼き付ける方法が検討され、印刷版製造時のレ
ーザ直接製版やレーザファクシミリなどか実用化されて
きている。このようなレーザ光用感光性材料としては、
高速で走査されるレーザビームに良く感応しつるように
感度の高い材料が要求され、また感光波長域もたとえば
Ar+イオンレーザの488nmの適用を考慮すれば可
視光によっても感応しうるような材料が要求される。On the other hand, in recent years, a method of printing a predetermined pattern on a photosensitive material layer using a laser beam has been studied, and has been put into practical use, such as direct laser engraving during printing plate production and laser facsimile. As such photosensitive materials for laser light,
A highly sensitive material is required to be sensitive to a laser beam that is scanned at high speed, and considering that the sensitive wavelength range is, for example, 488 nm for an Ar+ ion laser, a material that is sensitive to visible light is also required. required.
このような要求に対(7て前記従来の一般の光重合性組
成物では不充分であり、このため特開昭59−1893
40号公報や特開昭60−221403号公報などにお
いて、従来の一般的な光重合開始剤たとえばベンゾイン
アルキルエーテルやベンジルジメチルケタールなどの代
わりに、特定の有機色素やあるいは有機色素と有機過酸
化物との二成分系からなる特殊な光重合開始剤を用いる
ことにより、感光特性を改良する試みが種々なされてい
る。そして、これら試みにより、高感変化および可視光
に対する感応化という面でかなりの成果が得られており
、たとえば平版印刷用のPS版などへの実用化が大いに
期待されている。In response to such demands (7), the conventional general photopolymerizable compositions mentioned above are insufficient, and therefore
40 and JP-A No. 60-221403, in place of conventional general photopolymerization initiators such as benzoin alkyl ether and benzyl dimethyl ketal, specific organic dyes or organic dyes and organic peroxides are used. Various attempts have been made to improve the photosensitive characteristics by using special photopolymerization initiators consisting of two-component systems. Through these attempts, considerable results have been obtained in terms of high sensitivity changes and sensitization to visible light, and there are great expectations for their practical application in, for example, PS plates for lithographic printing.
〔発明が解決しようとする問題点コ
しかるに、上記試みに係る公知の光重合性組成物は、こ
れを数μレベルの厚みに1形成したときの感度特性は良
好であって、それ故に既述した平版印刷用のPS版など
への応用は可能であるが、10〜100μ程度の厚肉に
層形成したときには感度特性がかなり低下し、このため
にかかる厚肉にすることが要求されるプリント基板製造
用のドライフィルムフォトレジストなどへの応用にはな
お難点があった。[Problems to be Solved by the Invention] However, the known photopolymerizable composition according to the above-mentioned attempt has good sensitivity characteristics when formed to a thickness of several micrometers, and therefore does not meet the above-mentioned problems. Although it is possible to apply it to PS plates for lithographic printing, etc., when the layer is formed to a thickness of about 10 to 100μ, the sensitivity characteristics deteriorate considerably, and for this reason, it is possible to apply it to PS plates for lithographic printing. There were still difficulties in applying it to dry film photoresists for substrate manufacturing.
したかつて、この発明は、上記の如き厚肉に層形成した
ときでも紫外光および可視光に対する感度特性が良好で
、レーザ光線による露光も可能な高感度の光重合性組成
物を提供することを目的としている。An object of the present invention is to provide a highly sensitive photopolymerizable composition that has good sensitivity to ultraviolet light and visible light even when formed into a thick layer as described above, and can also be exposed to laser beams. The purpose is
[問題点を解決するための手段]
この発明者らは、上記の目的を達成するために鋭意検討
した結果、光重合開始剤として特定の有機色素と特定の
化合物とを併用する一方、皮膜形成性高分子物質として
特定のポリマーを用いたときには、紫外光および可視光
に対する感度特性に非常にすくれ、レーザ光線にも良好
に感応しつる高感度の光重合性組成物が得られ、この組
成物によればこれを10〜100μm程度の厚内に層形
成したときても感度特性の大幅な低下かみられないこと
を知り、この発明を完成)−るに至った。[Means for Solving the Problems] As a result of intensive studies to achieve the above object, the inventors discovered that while using a specific organic dye and a specific compound together as a photopolymerization initiator, film formation When a specific polymer is used as a polymeric substance, a highly sensitive photopolymerizable composition that has extremely low sensitivity characteristics to ultraviolet light and visible light and is also well sensitive to laser beams can be obtained. They found that even when this layer was formed to a thickness of about 10 to 100 .mu.m, there was no significant deterioration in sensitivity characteristics, leading to the completion of the present invention.
すなわち、この発明は、皮膜形成性高分子物質、1分子
内に付加重合しうる炭素−炭素二重結合を少なくとも1
個有するモノマーないしオリゴマーおよび光重合開始剤
を含む光重合性組成物において、上記の高分子物質がス
チレンと無水マレイン酸との共重合物に分子内に水酸基
を有するrメタ)アクリル酸エステル系モノマーを反応
させて得られるポリマーからなり、かつ上記の光重合開
始剤かつぎの式+1)、flDまたは面;
[式中、R1はアルキル基または置換アルキル基、R2
は水素原子、メチル基、アルコキシ基またはアミ7基(
置換アミ7基を含む)、R3はアルキル基、置換アルキ
ル基またはアセチル基、R4は水素原子、ハロゲン原子
またはメチル基、R5は水素原子、ハロゲン原子、メチ
ル基、アルコキシ基またはアミ7基(置換アミノ基を含
む)、Xは水素原子またはハロゲン原子、Yは酸素原子
または硫黄原子である1
で表わされる有機色素のうちの少なくとも1種とN−フ
ェニルグリシン類および/または2・4・6−置換−1
・3・5−トリアジン化合物とからなることを特徴とす
る高感度光重合性組成物に係るものである。That is, the present invention provides a film-forming polymeric substance containing at least one carbon-carbon double bond capable of addition polymerization in one molecule.
In a photopolymerizable composition containing a monomer or oligomer and a photopolymerization initiator, the polymer substance is a copolymer of styrene and maleic anhydride, and an r-meth)acrylic acid ester monomer having a hydroxyl group in the molecule. consisting of a polymer obtained by reacting the photopolymerization initiator with the following formula +1), flD or surface; [wherein R1 is an alkyl group or a substituted alkyl group, R2
is a hydrogen atom, methyl group, alkoxy group or ami7 group (
R3 is an alkyl group, a substituted alkyl group or an acetyl group, R4 is a hydrogen atom, a halogen atom or a methyl group, R5 is a hydrogen atom, a halogen atom, a methyl group, an alkoxy group or an acetyl group (substituted (contains an amino group), X is a hydrogen atom or a halogen atom, and Y is an oxygen atom or a sulfur atom. Substitution-1
- A highly sensitive photopolymerizable composition characterized by comprising a 3,5-triazine compound.
このように、この発明の光重合性組成物は、上記特定の
ポリマーと上記特定の光重合開始剤とを組み合わせ使用
したことにより、紫外光および可視光に高感度で感応し
、またレーザ光線にも良好に感応するという特徴を有し
、この特徴からこの組成物を10〜l Q Q )ty
n7’1度の厚肉に層形成したときでも感度特性の大幅
な低下がみられなくなるため、プリント基板製造用のド
ライフィルムフォトレジストなどに対しても支障なく応
用できるという利点がある。そのうえ、上記構成からな
る光重合性組成物は、その乾燥皮膜がアルカリ水溶液に
よって溶解、膨潤するという性質を有しているため、露
光硬化後に未露光部分を除去するための現像作業を省資
源、衛生上などの見地から非常に有利となる上記アルカ
リ水溶液にて行えるという利点をも備えている。As described above, the photopolymerizable composition of the present invention is highly sensitive to ultraviolet light and visible light, and is sensitive to laser beams due to the combination of the specific polymer and the specific photoinitiator. This composition has the characteristic of being well sensitive to
Even when a layer is formed as thick as n7'1 degree, there is no significant decrease in sensitivity characteristics, so it has the advantage that it can be applied to dry film photoresists for printed circuit board manufacturing without any problems. In addition, the photopolymerizable composition having the above structure has the property that its dry film dissolves and swells with an aqueous alkaline solution, so it saves resources and requires development work to remove unexposed areas after exposure and curing. It also has the advantage that it can be carried out using the aqueous alkaline solution, which is very advantageous from the standpoint of hygiene.
[発明の構成・作用]
この発明において使用する皮膜形成性高分子物質は、ス
チレンと無水マレイン酸との共重合物に分子内に水酸基
を有する(メタ)アクリル酸エステル系モノマーを反応
させて得られるポリマーであり、このポリマーの分子内
には上記の(メタ)アクリル酸エステル系モノマーに由
来する(メタ)アクリロイルオキシ基が含まれており、
これと前記特定の光重合開始剤との相互作用にて感度特
性に非常に良好な結果を与えるものである。[Structure and operation of the invention] The film-forming polymeric substance used in this invention is obtained by reacting a copolymer of styrene and maleic anhydride with a (meth)acrylic acid ester monomer having a hydroxyl group in the molecule. The molecule of this polymer contains a (meth)acryloyloxy group derived from the above-mentioned (meth)acrylic acid ester monomer,
The interaction between this and the specific photopolymerization initiator gives very good results in sensitivity characteristics.
上記のスチレンと無水マレイン酸との共重合物は、両モ
ノマーがモル比1:1の交互共重合をおこしやすいもの
であることから、このような交互共重合物としたものを
使用してもよい腰また重合条件を選択することによって
共重合比をある程度変えたものを使用してもよい。一般
的に許容しうる共重合比は、スチレン/無水マレイン酸
が40/60〜70/30の範囲である。なお、このよ
うな共重合物を得るにあたって、アクリル酸、メタクリ
ル酸、アクリル酸ブチル、メタクリル酸メチル、メタク
リル酸ブチル、アクリロニトリルなどの他のモノマーを
全モノマー中20モル%以下の割合で用いてもよい。す
なわち、この発明における上記共重合物には上述の如き
他のモノマーが共重合モノマーの一種として用いられた
共重合物も包含される。これら各種の共重合物の平均分
子量としては1万〜30万の範囲にあるのが好適である
。The copolymer of styrene and maleic anhydride mentioned above tends to undergo alternating copolymerization in a molar ratio of 1:1, so such an alternating copolymer may also be used. The copolymerization ratio may be changed to some extent by selecting the polymerization conditions. Generally acceptable copolymerization ratios range from 40/60 to 70/30 styrene/maleic anhydride. In addition, in obtaining such a copolymer, other monomers such as acrylic acid, methacrylic acid, butyl acrylate, methyl methacrylate, butyl methacrylate, and acrylonitrile may be used in a proportion of 20 mol% or less of the total monomers. good. That is, the above-mentioned copolymers in the present invention also include copolymers in which the other monomers mentioned above are used as a type of copolymerization monomer. The average molecular weight of these various copolymers is preferably in the range of 10,000 to 300,000.
この共重合物に分子内に水酸基を有する(メタ)アクリ
ル酸エステル系モノマーを反応させ、酸無水物基と水酸
基との間でエステル結合を生じさせることにより、皮膜
形成性高分子物質としてのポリマーを得る。上記の反応
は、たとえばピリジン中でイミダゾールなどの適宜の触
媒を用いて40〜80°Cで1〜24時間の条件で行う
ことができる。反応率は、共重合物中に含まれる酸無水
物基の30〜80%が(メタ)アクリル酸エステル系モ
ノマーとの反応に関与する程度であるのがよい。By reacting this copolymer with a (meth)acrylic acid ester monomer having a hydroxyl group in the molecule to form an ester bond between the acid anhydride group and the hydroxyl group, the polymer as a film-forming polymer substance is produced. get. The above reaction can be carried out, for example, in pyridine using a suitable catalyst such as imidazole at 40 to 80°C for 1 to 24 hours. The reaction rate is preferably such that 30 to 80% of the acid anhydride groups contained in the copolymer participate in the reaction with the (meth)acrylate monomer.
上記より反応率が低くなりすぎるとこの発明の目的とす
る感度特性の向上面で好結果を得にくく、逆に高くなり
すぎると露光硬化後のアルカリ水溶液による溶解能ない
し膨潤能が低下するため、いずれも好ましくない。If the reaction rate is too low from the above, it is difficult to obtain good results in terms of improving the sensitivity characteristics, which is the objective of this invention, and conversely, if it is too high, the ability to dissolve or swell with an aqueous alkaline solution after exposure and curing will decrease. Neither is preferable.
上記の反応に用いられる分子内)こ水酸基を有する(メ
タ)アクリル酸エステル系モノマーとじては、2−ヒド
ロキシエチルアクリレート、2−ヒドロキシエチルメタ
クリレート、2−ヒドロキシプロピルアクリレート、2
−ヒドロキシプロピルメタクリレート、1・4−ブチレ
ングリコールモノアクリレート、1・4−ブチレングリ
コールモノメタフリレートへポリエチレングリコールモ
ノアクリレート、ポリエチレングリコールモノメタクリ
レートなどのその分子量が500以下であるものが好ま
しい。Examples of (meth)acrylic acid ester monomers having a hydroxyl group in the molecule used in the above reaction include 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate,
-Hydroxypropyl methacrylate, 1,4-butylene glycol monoacrylate, 1,4-butylene glycol monomethacrylate Those having a molecular weight of 500 or less, such as polyethylene glycol monoacrylate and polyethylene glycol monomethacrylate, are preferred.
この発明においては上記の反応にて得られるポリマーを
皮膜形成性高分子物質として用いることをひとつの特徴
とするが、この発明の効果を損なわない使用量範囲であ
れば他の公知の皮膜形成性高分子物質、たとえばポリメ
タクリル酸メチル、メタクリル酸メチルとメタクリル酸
との共重合物、ポリビニルアルコール、ポリエステル樹
脂などを併用しても差し支えない。これら他の高分子物
質の使用量は、前記ポリマーとの合計量中通常20重量
%以下に抑えられているのがよい。One feature of this invention is that the polymer obtained by the above reaction is used as a film-forming polymer substance, but other known film-forming polymers may be used as long as the amount used does not impair the effects of this invention. A polymeric substance such as polymethyl methacrylate, a copolymer of methyl methacrylate and methacrylic acid, polyvinyl alcohol, polyester resin, etc. may be used in combination. The amount of these other polymeric substances used is preferably kept to 20% by weight or less based on the total amount of the polymer.
この発明において用いられる1分子内に付加重合しつる
炭素−炭素二重結合を少なくとも1個有するモノマーな
いしオリゴマーとしては、上記二重結合を1分子内に1
個有するモノエチレン性不飽和化合物と2個以上有する
ポリエチレン性不飽和化合物とがある。このうちポリエ
チレン性不飽和化合物を単独で使用するか、あるいはモ
ノエチレン性不飽和化合物との混合系で使用するのか、
特に好ましい。The monomer or oligomer having at least one addition-polymerized carbon-carbon double bond in one molecule used in the present invention may contain one double bond in one molecule.
There are monoethylenically unsaturated compounds having two or more polyethylenically unsaturated compounds and polyethylenically unsaturated compounds having two or more. Among these, should polyethylenically unsaturated compounds be used alone or in a mixed system with monoethylenically unsaturated compounds?
Particularly preferred.
モノエチレン性不飽和化合物の例としては、アクリル酸
またはそのエステル類、メタクリル酸またはそのエステ
ル類、アクリルアミド類、メタクリルアミド類、アリル
化合物、ビニルエーテル類、ビニルエステル類、N−ビ
ニル化合物、スチレン類、クロトン酸エステル類などが
ある。Examples of monoethylenically unsaturated compounds include acrylic acid or its esters, methacrylic acid or its esters, acrylamides, methacrylamides, allyl compounds, vinyl ethers, vinyl esters, N-vinyl compounds, styrenes, These include crotonic acid esters.
その具体例としては、アクリル酸エステル類ではアクリ
ル酸プロピル、アクリル酸ブチル、アクリル酸アミル、
アクリル酸2−エチルヘキシル、アクリル酸オクチルな
どが、メタクリル酸エステル類ではメタクリル酸メチル
、メタクリル酸エチル、メタクリル酸プロピル、メタク
リル酸インプロピルなどが、アクリルアミド類ではアク
リルアミドや、N−アルキル基がメチル基、エチル基、
ブチル基、イソプロピル基、tert−ブチル基、2−
エチルヘキシル基などからなるN−アルキルアクリルア
ミドなどが、メタクリルアミド類ではメタクリルアミド
や、N−アルキル基がメチル基、エチル基、イソプロピ
ル基、tert−ブチル基、2−エチルヘキシル基など
からなるN−アルキルメタクリルアミドなどがある。Specific examples of acrylic esters include propyl acrylate, butyl acrylate, amyl acrylate,
2-ethylhexyl acrylate, octyl acrylate, etc., methacrylic esters include methyl methacrylate, ethyl methacrylate, propyl methacrylate, inpropyl methacrylate, etc., and acrylamides include acrylamide, N-alkyl group is methyl group, etc. ethyl group,
Butyl group, isopropyl group, tert-butyl group, 2-
N-alkyl acrylamide, which consists of an ethylhexyl group, etc., is methacrylamide, and N-alkyl methacrylate, whose N-alkyl group is a methyl group, ethyl group, isopropyl group, tert-butyl group, 2-ethylhexyl group, etc. There are amides, etc.
また、アリル化合物では酢酸アリル、カプロン酸アリル
、カプリル酸アリル、ラウリン酸アリル、パルミチン酸
アリルなどのアリルエステル類が、ビニルエーテル類で
はヘキシルビニルエーテル、オクチルビニルエーテル、
デシルビニルエーテル、2−エチルヘキシルビニルエー
テルナトのア/l/l−ルビニルエーテルカ、ビニルエ
ステル類テハヒニルブチレート、ビニルイソブチレート
、ビニルトリメチルアセテート、ビニルジエチルアセテ
ート、ビニルバレレート、ビニルカプロエートなトカ、
N−ビニル化合物ではN−ビニルピロリドンなどカ、ス
チレン類ではスチレン、メチルスチレン、クロルメチル
スチレン、アルコキシスチレン、ハロゲン化スチレン、
安息香酸スチレンなどが、クロトン酸エステル類ではク
ロトン酸メチル、クロトン酸エチル、クロトン酸メチル
、クロトン酸ヘキシル、クロトン酸イソプロピルなどが
ある。In addition, allyl compounds include allyl esters such as allyl acetate, allyl caproate, allyl caprylate, allyl laurate, and allyl palmitate, and the vinyl ethers include hexyl vinyl ether, octyl vinyl ether,
Decyl vinyl ether, 2-ethylhexyl vinyl ether, a/l/l-ruvinyl ether, vinyl esters such as tehahynyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl diethyl acetate, vinyl valerate, vinyl caproate. ,
N-vinyl compounds such as N-vinylpyrrolidone, styrenes include styrene, methylstyrene, chloromethylstyrene, alkoxystyrene, halogenated styrene,
Examples of crotonate esters include styrene benzoate, methyl crotonate, ethyl crotonate, methyl crotonate, hexyl crotonate, and isopropyl crotonate.
つぎに、ポリエチレン性不飽和化合物の例としては、多
価アルコールのポリアクリレート類およびポリメタクリ
レート類が挙げられる。上記多価アルコールとしては、
ポリエチレンクリコール、ポリプロピレンオキシド、ポ
リブチレンオキシド、(β−ヒドロキシエトキシ)ベン
ゼン、グリセリン、ジグリセリン、ネオペンチルグリコ
ール、トリメチロールプロパン、トリメチロールプロパ
ン、ペンタエリスリトール、ジペンタエリスリトール、
ソルビタン、ソルビトーノペ 1・4−ブタンジオール
、1・2・4−ブタントリオール、2−ブテンート4−
ジオール、2−ブチル−2−エチル−プロパンジオール
、2−ブテンート4−ジオール、1・3−プロパンジオ
ール、トリエタノールアミン、デカリンジオール、3−
クロルート2−プロパンジオールなどがある。Next, examples of polyethylenically unsaturated compounds include polyacrylates and polymethacrylates of polyhydric alcohols. The polyhydric alcohol mentioned above is
Polyethylene glycol, polypropylene oxide, polybutylene oxide, (β-hydroxyethoxy)benzene, glycerin, diglycerin, neopentyl glycol, trimethylolpropane, trimethylolpropane, pentaerythritol, dipentaerythritol,
Sorbitan, sorbitone 1,4-butanediol, 1,2,4-butanetriol, 2-butene 4-
Diol, 2-butyl-2-ethyl-propanediol, 2-butenoto-4-diol, 1,3-propanediol, triethanolamine, decalindiol, 3-
Examples include chlorate 2-propanediol.
また、ポリエチレン性不飽和化合物の他の例としては、
オリゴエステルアクリレート、オリゴエステルメタクリ
レート、エポキシアクリレート、エポキシメタクリレー
ト、ウレタンアクリレート、ウレタンメタクリレートな
どの名称で市販されている分子内にアクリロイル基また
はメタクリロイル基を2個以上有するアクリレートオリ
ゴマーやメタクリレートオリゴマーなどがある。In addition, other examples of polyethylenically unsaturated compounds include:
There are acrylate oligomers and methacrylate oligomers having two or more acryloyl groups or methacryloyl groups in the molecule, which are commercially available under the names of oligoester acrylate, oligoester methacrylate, epoxy acrylate, epoxy methacrylate, urethane acrylate, urethane methacrylate, etc.
このような1分子内)こ付加重合しうる炭素−炭素二重
結合を少なくとも1個宵するモノマーないしオリゴマー
は、前記の皮膜形成性高分子物質100重量部に対して
通常20〜200重量部、特に好適には50〜150重
量部となる割合で史用される。この量が少なくなりすき
でもまた多くなりすぎても感光特性上好結果を得にくく
、また3社
多くなりすきると硬化物の硬度面などでも好ましい結果
が得られない。Such a monomer or oligomer having at least one carbon-carbon double bond capable of addition polymerization (within one molecule) is usually used in an amount of 20 to 200 parts by weight per 100 parts by weight of the film-forming polymeric substance. Particularly preferably, it is used in a proportion of 50 to 150 parts by weight. If this amount is too small or too large, it is difficult to obtain good results in terms of photosensitivity, and if the amount exceeds 3, it is difficult to obtain favorable results in terms of hardness of the cured product.
この発明において使用する光重合開始剤は、前記の式(
1) 、 (II)または(IIDで表わされる有機色
素とN−フェニルグリシン類および/または2・4・6
−置換−1・3・5−トリアジン化合物とからなるもの
であり、前者の有機色素が光重合開始のための主機能を
担い、後者の成分がその促進機能を担うことにより、前
記特定の皮膜形成性高分子物質を含ませた重合性組成物
の感光特性を大きく高めるものである。The photopolymerization initiator used in this invention has the above formula (
1), (II) or (IID) and an organic dye represented by N-phenylglycine and/or 2, 4, 6
-substituted-1,3,5-triazine compound, the former organic dye plays the main function of initiating photopolymerization, and the latter component plays the function of promoting photopolymerization, thereby forming the specific film. This greatly enhances the photosensitive properties of a polymerizable composition containing a formable polymeric substance.
上記の有機色素には、式(I) 、 (II)またはa
IDにおけるYが酸素原子であるキサンチン系色素と、
上記Yが硫黄原子であるチオキサンチン系色素とがあり
、そのいずれか一方または両方を使用できる。The above organic dyes include formulas (I), (II) or a
A xanthine dye in which Y in ID is an oxygen atom,
There are thioxanthine dyes in which Y is a sulfur atom, and either or both of them can be used.
また式II) 、 (It)または脚で表わされる有機
色素のうちの1種を用いるか、あるいはこれらの有機色
素の2種または3種を併用するかどうかは、重合性組成
物の他の構成成分の種類に応じて適宜選択すればよい。Also, whether one type of organic dyes represented by formula II), (It) or legs is used, or whether two or three of these organic dyes are used in combination depends on the other constituents of the polymerizable composition. It may be selected as appropriate depending on the type of component.
しかし、式(IJ) 、 ([IDで表わされる有機色
素は互いに異性体の関係にあり、通常では両者の混合物
として合成されるのが普通であるから、両者を分離する
ことなく上記混合物のまま使用するのが有利である。However, organic dyes represented by formulas (IJ), It is advantageous to use.
なお、式(I) 、 (In 、 (111における各
基について説明しておくと、まずYは上述のとおり酸素
原子または硫黄原子であり、Xは水素原子または塩素原
子の如きハロゲン原子である。また、式CI)における
R1は炭素数が通常8以下のアルキル基であるか、ある
いはこれに水酸基やアミ7基(置換アミン基を含む)な
との置換基が導入された置換アルキル基であり、R2は
水素原子、メチル基、アルコキシ基またはアミ7基(置
換アミ7基を含む)である。In addition, each group in formula (I), (In, (111) will be explained first. Y is an oxygen atom or a sulfur atom as described above, and X is a halogen atom such as a hydrogen atom or a chlorine atom. In addition, R1 in formula CI) is an alkyl group usually having 8 or less carbon atoms, or a substituted alkyl group into which a substituent such as a hydroxyl group or an amine group (including a substituted amine group) is introduced. , R2 is a hydrogen atom, a methyl group, an alkoxy group, or an amine 7 group (including a substituted amine 7 group).
式fIJ) 、 ff1DにおけるR3は上記と同様の
アルキル基または置換アルキル基であるか、あるいはア
セチル基である。また、R4は水素原子、ハロゲン原子
またはメチル基であり、R1は水素原子、ハロゲン原子
、メチル基、炭素数が通常2以下のアルコキシ基または
アミノ基(N−アルキル置換などの置換アミン基を含む
)である。R3 in formula fIJ) and ff1D is the same alkyl group or substituted alkyl group as above, or an acetyl group. Further, R4 is a hydrogen atom, a halogen atom, or a methyl group, and R1 is a hydrogen atom, a halogen atom, a methyl group, an alkoxy group or an amino group (including substituted amine groups such as N-alkyl substitution) having usually 2 or less carbon atoms. ).
このような有機色素と併用されるN−フェニルグリシン
類としては、つぎの化学構造式;て表わされるN−フェ
ニルクリノンのほか、■)−クロル−N−フェニルグリ
ノン、m−メチル−N−フェニルクリノン p−メi・
キン−N−フェニルグリシンなどのベンゼン環に置換基
を有するN−フェニルグリシン置換体が挙げられる。Examples of N-phenylglycines used in combination with such organic dyes include N-phenylglycine represented by the following chemical structural formula; Phenylcrinone p-mei
Examples include N-phenylglycine substituted products having a substituent on the benzene ring, such as quin-N-phenylglycine.
また、2・4・6−置換−1・3・5−トリアジン化合
物とは、つぎの化学構造式;
で表わされる化合物であって、R6,R,、R,からな
る3個の基はメチル基、ハロゲン原子などの置換基が導
入された置換メチル基、あるいはハロゲン原子やアルキ
ル基などの置換基を有するかまたは有しないアリール基
などの中から選択され、互に同一であっても異なる基で
あってもよい。In addition, a 2,4,6-substituted-1,3,5-triazine compound is a compound represented by the following chemical structural formula; in which the three groups consisting of R6, R, and R are methyl groups, substituted methyl groups into which a substituent such as a halogen atom has been introduced, or an aryl group with or without a substituent such as a halogen atom or an alkyl group, and are mutually the same but different groups. It may be.
このような2・4・6−置換−1・3・5−トリアジン
化合物の中でも、” 6 + R7+ RHのうちの少
なくともひとつがモノ、ジまたはトリーハロゲン置換メ
チル基からなるものが特に好適である。その異体例を挙
ければ、2・4・6−ドリストリクロロメチルーi・3
・5−トリアジン、2・4・6−トリストリブロモメチ
ル−1・3・5−トリアジン、2・4・6−ドリスジク
ロロメチルー1・3・5−トリアジン、2・4・6−ド
リスジブロモメチルー1・3・5−トリアジン、2−メ
チル−4・6−ピスドリクロロメチルート3・5−トリ
アジン、2−メチル−4・6−ピスドリブロモメチルー
1・3・5−トリアジン、2・4・6−ドリスクロロメ
チルー1・3・5−トリアジン、2・4・6−ドリスブ
ロモメチルー1・3・5−トリアジン、2−フェニル−
4・6−ピスドリクロロメチルー1・3・5−トリアジ
ン、2−フェニル−4・6−ピスドリブロモメチルー1
・3・5−トリアジンなどがある。Among such 2,4,6-substituted-1,3,5-triazine compounds, those in which at least one of "6 + R7+ RH consists of a mono-, di-, or trihalogen-substituted methyl group are particularly preferred. An example of the variant is 2,4,6-dostrichloromethyl-i,3
・5-triazine, 2,4,6-tristribromomethyl-1,3,5-triazine, 2,4,6-dolysdichloromethyl-1,3,5-triazine, 2,4,6-dolysdibromo Methyl-1,3,5-triazine, 2-methyl-4,6-pisdrichloromethylto-3,5-triazine, 2-methyl-4,6-pisdribromomethyl-1,3,5-triazine, 2・4,6-Dorischloromethyl-1,3,5-triazine, 2,4,6-Dorisbromomethyl-1,3,5-triazine, 2-phenyl-
4,6-pisdrichloromethyl-1,3,5-triazine, 2-phenyl-4,6-pisdribromomethyl-1
・3,5-triazine, etc.
この発明においては前述の有機色素と併用する成分とし
て上記のN−フェニルグリシン類を用いてもよいし、2
・4・6−置換−1・3・5−トリアジン化合物を用い
てもよく、また両者を併用してもよい。さらにN−フェ
ニルグリシン類の中から二種以上を混合使用してもよく
、同様に2・4・6−置換−1・3・5−トリアジン化
合物の中から二種以上を混合使用することもできる。In this invention, the above-mentioned N-phenylglycines may be used as a component to be used in combination with the above-mentioned organic dye;
- A 4,6-substituted-1,3,5-triazine compound may be used, or both may be used in combination. Furthermore, two or more types of N-phenylglycines may be used as a mixture, and similarly, two or more types of 2,4,6-substituted-1,3,5-triazine compounds may be used as a mixture. can.
このような二成分系の光重合開始剤の使用量は、前記し
た1分子内に付加重合しつる炭素−炭素二重結合を少な
くとも1個有するモノマーないしオリゴマー100重量
部に対して、有機色素が0.1〜20重量部、特に好適
には1〜10重量部で、N−フェニルグリシン類および
/または2・4・6−置換−1・3・5−トリアジン化
合物6(0,1〜20重量部、特に好適には1〜10重
量部で、両者の合計量が通常0.5〜30重量部となる
ような割合とするのがよい。The amount of such a two-component photopolymerization initiator to be used is based on 100 parts by weight of a monomer or oligomer having at least one addition-polymerized carbon-carbon double bond in one molecule. 0.1 to 20 parts by weight, particularly preferably 1 to 10 parts by weight, of N-phenylglycines and/or 2,4,6-substituted-1,3,5-triazine compounds 6 (0,1 to 20 parts by weight) Parts by weight, particularly preferably 1 to 10 parts by weight, preferably in such a proportion that the total amount of both is usually 0.5 to 30 parts by weight.
この発明の高感度光重合性組成物は、上述の皮膜形成性
高分子物質、1分子内に付加重合しつる炭素−炭素二重
結合を少なくとも1個性するモノマーないしオリゴマー
および光重合開始剤を必須成分として含むほか、任意成
分として熱重合防止剤、着色剤、密着性向上剤、充填剤
、可塑剤などの各種添加剤を含ませるようにしてもよい
。The highly sensitive photopolymerizable composition of the present invention essentially contains the above-mentioned film-forming polymeric substance, a monomer or oligomer having at least one addition-polymerized carbon-carbon double bond in one molecule, and a photopolymerization initiator. In addition to being included as a component, various additives such as a thermal polymerization inhibitor, a coloring agent, an adhesion improver, a filler, and a plasticizer may also be included as optional components.
このように構成されるこの発明の高感度光重合性組成物
は、その使用にあたって、アセトン、メチルエチルケト
ン、メチルイソブチルケトン、酢酸エチノペ酢酸ブチル
、ジオキサンなどの適宜の有機溶媒に均一に溶解混合さ
れた溶液とされる。In use, the highly sensitive photopolymerizable composition of the present invention constructed as described above is prepared by uniformly dissolving and mixing the composition in an appropriate organic solvent such as acetone, methyl ethyl ketone, methyl isobutyl ketone, ethinoacetate, butyl acetate, dioxane, etc. It is said that
この溶液をパターン形成すべき基板、たとえば銅張り積
層板上に直接塗布乾燥することにより、あるいは一旦プ
ラスチックなどからなる透明支持体上に塗布乾燥してド
ライフィルムフォトレジストとしたのち、これを上記基
板上に熱をかけながらラミネートすることにより、上記
基板上に光重合性組成物層を形成する。This solution is directly coated and dried on a substrate to be patterned, such as a copper-clad laminate, or once coated and dried on a transparent support made of plastic or the like to form a dry film photoresist, and then applied to the substrate. A photopolymerizable composition layer is formed on the substrate by laminating the photopolymerizable composition while applying heat thereon.
この光重合性組成物層は、既述のとおり、紫外光から可
視光までの広い領域の光線に対して極めて活性なため、
これに所定のフォトマスクを介して超高圧、高圧、低圧
の各種水銀灯、メタルハライド灯、キセノン灯、カーボ
ンア′−り灯、太陽光線、けい光灯、白色電灯などの各
種光線をパターン露光することにより、さらには紫外お
よび可視の各種レーザ光線をパターン露光することによ
り、この組成物層の厚みが10〜1001in程度の厚
肉であっても、数μ程度の薄肉である場合と同様に感度
特性良好に硬化させることができる。そして、このパタ
ーン露光後、未露光部分をアルカリ水溶液にて除去して
現像することにより、所望の硬化パターンが得られる。As mentioned above, this photopolymerizable composition layer is extremely active against light rays in a wide range from ultraviolet light to visible light.
This is then pattern-exposed to various types of light such as ultra-high pressure, high pressure, and low pressure mercury lamps, metal halide lamps, xenon lamps, carbon dioxide lamps, sunlight, fluorescent lamps, and white electric lamps through a predetermined photomask. Furthermore, by pattern exposure to various types of ultraviolet and visible laser beams, even if the composition layer is as thick as 10 to 1001 inches, the sensitivity characteristics are as good as when the composition layer is as thin as several microns. It can be hardened to After this pattern exposure, the unexposed portions are removed with an alkaline aqueous solution and developed to obtain a desired cured pattern.
以上のように、この発明においては、特定の皮膜形成性
高分子物質と特定の光重合開始剤とを組み合わせ使用し
たことにより、紫外光および可視光に高感度で感応し、
またレーザ光線:こも良好に感応する高感度光重合性組
成物を提供することができる。そして、この組成物によ
ればこれを10〜100/’1程度の厚肉に層形成した
ときでも感度特性の大幅な低下がみられなくなるために
、プリント基板製造用のドライフィルムフォトレジスト
などに対しても支障なく応用でき、また近年特に注目さ
れているプリント基板のレーザパターニング用材料とし
ても好適である。しかも、この組成物によればパターン
露光後の現像をアルカリ水溶液により行うことができる
から、現像段階での省資源化および衛生面での改善など
を図ることができる。As described above, in this invention, by using a specific film-forming polymer substance and a specific photopolymerization initiator in combination, it is highly sensitive to ultraviolet light and visible light,
It is also possible to provide a highly sensitive photopolymerizable composition that is sensitive to laser beams. According to this composition, even when it is formed into a layer with a thickness of about 10 to 100/'1, there is no significant decrease in sensitivity characteristics, so it is used as a dry film photoresist for manufacturing printed circuit boards. It can also be used without any problems and is also suitable as a material for laser patterning of printed circuit boards, which has attracted particular attention in recent years. Moreover, according to this composition, development after pattern exposure can be carried out using an alkaline aqueous solution, so it is possible to save resources and improve hygiene in the development stage.
〔実施例]
以下に、この発明の実施例を記載してより具体的に説明
する。なお、以下において部とあるは重量部を意味する
ものとする。また、以下の実施例および比較例で用いた
皮膜形成性高分子物質としてのポリマーAおよびポリマ
ーBは、つきの方法にて合成したものである。[Examples] Below, examples of the present invention will be described in more detail. In addition, in the following, parts shall mean parts by weight. Furthermore, Polymer A and Polymer B as film-forming polymeric substances used in the following Examples and Comparative Examples were synthesized by the following method.
〈ポリマーA〉
11の反応容器に、スチレン5:l(0,5モル)、無
水マレイン酸49y(0,5モル)およびメチルエチル
ケトン401’を仕込み、均一に溶解混合後、重合開始
剤としてアゾビスイソブチロニトリル0.75 !?を
加え、窒素ガスを流しながら60°Cで3時間撹拌反応
させた。反射後室温に冷却し、6倍量のn−ヘキサン中
に激しく撹拌しながら滴下し、ポリマーを析出させた。<Polymer A> Styrene 5:l (0.5 mol), maleic anhydride 49y (0.5 mol) and methyl ethyl ketone 401' were charged in a reaction vessel No. 11, and after uniformly dissolving and mixing, azobis was added as a polymerization initiator. Isobutyronitrile 0.75! ? was added, and the mixture was stirred and reacted at 60°C for 3 hours while flowing nitrogen gas. After reflection, the mixture was cooled to room temperature and dropped into 6 times the amount of n-hexane with vigorous stirring to precipitate a polymer.
ろ過乾燥後のポリマーをさらにメチルエチルケトンとn
−へキサンとによる2回の再沈殿により精製した。The polymer after filtration and drying is further mixed with methyl ethyl ketone.
- It was purified by two reprecipitations with hexane.
このようにして得られたポリマーAは、スチレンと無水
マレイン酸との共重合比が1:1.3で、平均分子量が
約6万であり、収率は約9096であった。Polymer A thus obtained had a copolymerization ratio of styrene and maleic anhydride of 1:1.3, an average molecular weight of about 60,000, and a yield of about 9,096.
くポリマーB〉
11の反応容器に、ポリマーA30y、脱水したピリジ
ン450y、2−ヒドロキシエチルメタクリレート30
0y、イミダゾール0.57およびハイドロキノン9y
を加え、65°Cで6時間反応後室温に冷却した。この
反応溶液を6倍量の希酢酸水溶液(5〜8重量%濃度)
に滴下し、ポリマーを析出させ、ろ過乾燥した。その後
さらにメチルエチルケトンと希酢酸水溶液とにより2回
の再沈殿を繰り返してポリマーを精製した。Polymer B> In a reaction vessel of 11, 30y of polymer A, 450y of dehydrated pyridine, 30y of 2-hydroxyethyl methacrylate
0y, imidazole 0.57 and hydroquinone 9y
was added and reacted at 65°C for 6 hours, then cooled to room temperature. This reaction solution was mixed with 6 times the volume of dilute acetic acid aqueous solution (5 to 8% by weight).
was added dropwise to precipitate the polymer, which was then filtered and dried. Thereafter, reprecipitation was repeated twice using methyl ethyl ketone and a dilute acetic acid aqueous solution to purify the polymer.
このようにして得られたポリマーBは、元素分析により
、2−ヒドロキシエチルメタクリレートの導入率が約6
0%である、つまりポリマー中の酸無水物基の約60%
に上記メタクリレートが結合していることが確認された
。Elemental analysis revealed that the polymer B thus obtained had a 2-hydroxyethyl methacrylate introduction rate of approximately 6.
0%, i.e. about 60% of the acid anhydride groups in the polymer.
It was confirmed that the above methacrylate was bound to.
実施例1
ポリマー8100部、ペンタエリスリトールトリアクリ
レート100部、一般式(II) 、 (IIDで表わ
される混合有機色素(Y = S 、 R3= C2H
5、R4、Rs”H)4部、N−フェニルグリシン4部
およびメチルエチルケトン500部を均一に混合溶解し
て、この発明に係る高感度光重合性組成物の溶液とした
。Example 1 8100 parts of polymer, 100 parts of pentaerythritol triacrylate, mixed organic dye represented by general formula (II), (IID (Y = S, R3 = C2H)
5, R4, Rs"H), 4 parts of N-phenylglycine, and 500 parts of methyl ethyl ketone were uniformly mixed and dissolved to prepare a solution of the highly sensitive photopolymerizable composition according to the present invention.
実施例2
有機色素を、一般式([1) 、 ([3で表わされる
混合有機色素[Y=S、R3=7セチル基、R4,R5
=CI!]4部に変更した以外は、実施例1と同様組成
の高感度光重合性組成物の溶液を得た。Example 2 An organic dye was mixed with a mixed organic dye represented by the general formula ([1), ([3] [Y=S, R3=7 cetyl group, R4, R5
=CI! ] A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 1 was obtained except that the amount was changed to 4 parts.
実施例3
有機色素を、一般式(口1 、 (IDで表わされる混
合有機色素[Y=0、R3= (CH2)30CH3、
R4=CH3,R5=H]4部に変更した以外は、実施
例1と同様組成の高感度光重合性組成物の溶液を得た。Example 3 An organic dye was mixed with a mixed organic dye represented by the general formula (1, (ID) [Y=0, R3= (CH2)30CH3,
R4=CH3, R5=H] A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 1 was obtained except that the composition was changed to 4 parts.
実施例4
有機色素を、一般式(1)で表わされる有機色素しY=
O1X = H、R、= C)T、、CH(OH) C
I−T、、、R,、=OCH1l ]4部に変更した以
外は、実施例1と同様組成の高感度光重合性組成物の溶
液を得た。Example 4 Organic dye is an organic dye represented by general formula (1) and Y=
O1X = H, R, = C) T,, CH(OH) C
A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 1 was obtained, except that the amount was changed to 4 parts.
実施例5
有機色素を、一般式(Ilで表わされる有機色素[Y=
O,X=Br 、 R4= (CH2)3N(C2H5
)2、R2=N(C2H5)2] 4部に変更した以外
は、実施例1と同様組成の高感度光重合性組成物の溶液
を得た。Example 5 An organic dye was converted into an organic dye represented by the general formula (Il [Y=
O, X=Br, R4= (CH2)3N(C2H5
)2, R2=N(C2H5)2] A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 1 was obtained except that the amount was changed to 4 parts.
実施例6
有機色素を、一般式CI)で表わされる有機色素[Y=
0、X=CI!、R,=CH2CH(C2H5)C+H
* 、R2= N(:C2H3)2] 4部に変更した
以外は、実施例1と同様組成の高感度光重合性組成物の
溶液を得た。Example 6 An organic dye represented by the general formula CI) [Y=
0,X=CI! ,R,=CH2CH(C2H5)C+H
*, R2=N(:C2H3)2] A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 1 was obtained, except that the amount was changed to 4 parts.
実施例7
有機色素を、一般式(1)で表わされる有機色素(Y=
S、 X=81 J=(CH2)30CH(CH+)
2、 Iく、=水素原子〕4部に変更した以外は、実施
例1と同様組成の高感度光重合性組成物の溶液を得た。Example 7 An organic dye represented by the general formula (1) (Y=
S, X=81 J=(CH2)30CH(CH+)
A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 1 was obtained, except that the amount was changed to 4 parts.
実施例8
有機色素を、一般式(I)で表わされる有機色素1Y=
S 1 X=Cff、 R,=(CH,)20CH3
、R2= C)I、 l 、!]部に変更した以外
は、実施例1と同様組成の高感度光重合性組成物の溶液
を得た。Example 8 An organic dye represented by the general formula (I) 1Y=
S 1 X=Cff, R,=(CH,)20CH3
, R2= C) I, l,! ] A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 1 was obtained, except that the composition was changed to .
実施例9
ペンタエリスリトールトリアクリレート100部の代わ
りに、トリメチロールプロパントリアクリレート100
部を用いた以外は、実施例1と同様組成の高感度光重合
性組成物の溶液を得た。Example 9 100 parts of trimethylolpropane triacrylate instead of 100 parts of pentaerythritol triacrylate
A solution of a high-sensitivity photopolymerizable composition having the same composition as in Example 1 was obtained, except that 50% of the photopolymerizable composition was used.
実施例10
ペンタエリスリトールトリアクリレート100部の代わ
りに、オリゴエステルアクリレートとして市販されてい
る東亜合成化学工業社製の商品名アロニックスM −8
030を100部用いた以外は、実施例1と同様組成の
高感度光重合性組成物の溶液を得た。Example 10 Instead of 100 parts of pentaerythritol triacrylate, Aronix M-8 (trade name, manufactured by Toagosei Chemical Industry Co., Ltd.), which is commercially available as oligoester acrylate, was used.
A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 1 was obtained except that 100 parts of 030 was used.
比較例1
ポリマーB100部の代わりに、ポリマーA100部を
用いた以外は、実施例1と同様組成の光重合性組成物の
溶液を得た。Comparative Example 1 A solution of a photopolymerizable composition having the same composition as in Example 1 was obtained, except that 100 parts of Polymer A was used instead of 100 parts of Polymer B.
上記実施例1〜10および比較例1に係る各溶液を用い
て、表面が清浄化されたプリント基板の銅張り積層板の
銅面に2μの薄肉の光重合性組成物層および20/”以
上となる厚肉の光重合性組成物層を形成し、以下の如き
感度特性試験に供した。Using each of the solutions according to Examples 1 to 10 and Comparative Example 1, a photopolymerizable composition layer with a thickness of 2μ or more was applied to the copper surface of a copper-clad laminate of a printed circuit board whose surface had been cleaned. A thick photopolymerizable composition layer was formed and subjected to the following sensitivity characteristic test.
なお、2μの薄肉の光重合性組成物層の形成は、上記積
層板の銅面に各溶液を直接塗布し、s o ’cで1分
間乾燥する方法で行った。一方 、2Q )ty+以上
となる厚肉の光重合性組成物層の形成は、厚さ25/”
の透明ポリエステルフィルム上に各溶液を所定厚みとな
るように塗布し、80°Cで3分間乾燥してドライフィ
ルムフォトレジストとし、これを上記積層板の銅面に1
00°Cの熱ロールによりラミネートする方法で行った
。The 2μ thin photopolymerizable composition layer was formed by applying each solution directly to the copper surface of the laminate and drying it in an SO'C for 1 minute. On the other hand, the formation of a thick photopolymerizable composition layer having a thickness of 2Q) ty+ or more requires a thickness of 25/''
Each solution was applied to a specified thickness on a transparent polyester film and dried at 80°C for 3 minutes to form a dry film photoresist.
This was done by laminating using a hot roll at 00°C.
〈感度特性試験〉
プリント基板の銅面に形成された光重合性組成物層に2
.5WのArイオンレーザの波長488nmの光源を用
いてビーム径1.25++mで露光量を変えてスポット
露光した。この露光後3重服%のメタケイ酸ナトリウム
水溶液により未露光部分を除去して現像し、得られたス
ポットの径がビーム径(1,25mm)と一致する上記
露光量を感度とした。<Sensitivity characteristic test>
.. Spot exposure was carried out using a 5W Ar ion laser light source with a wavelength of 488 nm with a beam diameter of 1.25++ m and varying the exposure amount. After this exposure, the unexposed portions were removed and developed using a triple dose % sodium metasilicate aqueous solution, and the exposure amount at which the diameter of the obtained spot coincided with the beam diameter (1.25 mm) was defined as the sensitivity.
結果は、下記の第1表に示されるとおりであった。The results were as shown in Table 1 below.
第 1 表
上記の結果から明らかなように、比較例1の光重合性組
成物では厚みが厚くなると感度特性が著しく低下するの
に対し、この発明の実施例1〜10に係る光重合性組成
物では厚みが増しても高感度であり、厚肉とすることが
要求されるドライフィルムフォトレジストとしても充分
に適用可能であることか判る。Table 1 As is clear from the above results, the sensitivity characteristics of the photopolymerizable composition of Comparative Example 1 decrease significantly as the thickness increases, whereas the photopolymerizable compositions of Examples 1 to 10 of the present invention It can be seen that the photoresist exhibits high sensitivity even when the thickness of the photoresist increases, and that it can be sufficiently applied as a dry film photoresist that requires a thick layer.
実施例11
N−フェニルグリシン4部の代わりに、2・4・6−ド
リストリクロロメチルー1・3・5−トリアジン2部を
用いた以外は、実施例1と同様組成の高感度光重合性組
成物の溶液を得た。Example 11 Highly sensitive photopolymerizable product having the same composition as Example 1 except that 2 parts of 2,4,6-dolystrichloromethyl-1,3,5-triazine was used instead of 4 parts of N-phenylglycine. A solution of the composition was obtained.
実施例12
有機色素を、一般式(I)で表わされる有機色素[Y=
0. X=H,R1=C)12CH(OH)CH3、R
2=OCH3]4部に変更した以外は、実施例11と同
様組成の高感度光重合性組成物の溶液を得た。Example 12 An organic dye represented by the general formula (I) [Y=
0. X=H, R1=C)12CH(OH)CH3, R
A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 11 was obtained, except that the amount was changed to 4 parts [2=OCH3].
実施例13
有機色素を、一般式(I)で表わされる有機色素〔Y=
O,X=C1%R1=(CH2)20部%R2=N(C
2H3)2 ]4部に変更した以外は、実施例11と同
様組成の高感度光重合性組成物の溶液を得た。Example 13 An organic dye represented by general formula (I) [Y=
O,X=C1%R1=(CH2)20 parts%R2=N(C
A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 11 was obtained, except that the amount was changed to 4 parts.
実施例14
有機色素を、一般式CI+で表わされる有機色素[Y=
O1X=Ce、 R,=CH2CH(C,、R5) C
4)1. 、R2= N(C,、H,ル」4部に変更し
た以外は、実施例11と同様組成の高感度光重合性組成
物の溶液を得た。Example 14 An organic dye represented by the general formula CI+ [Y=
O1X=Ce, R,=CH2CH(C,,R5) C
4)1. , R2=N(C,,H,R) A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 11 was obtained, except that the amount was changed to 4 parts.
実施例15
ペンタエリスリトールトリアクリレート100部の代わ
りに、トリメチロールプロパントリアクリレート100
部を用いた以外は、実施例11と同様組成の高感度光重
合性組成物の溶液を得た。Example 15 100 parts of trimethylolpropane triacrylate instead of 100 parts of pentaerythritol triacrylate
A solution of a high-sensitivity photopolymerizable composition having the same composition as in Example 11 was obtained, except that 50% of the photopolymerizable composition was used.
実施例16
N−フェニルグリシン4部の代わりに、2−メチル〜4
・6−ピスドリクロロメチルー1・3・5−トリアジン
2部を用いた以外は、実施例1と同様組成の高感度光重
合性組成物の溶液を得た。Example 16 Instead of 4 parts of N-phenylglycine, 2-methyl~4
- A solution of a highly sensitive photopolymerizable composition having the same composition as in Example 1 was obtained, except that 2 parts of 6-pisdolichloromethyl-1,3,5-triazine was used.
実施例17
N〜フェニルグリシン4部の代わりに、2・4・6−ド
リストリブロモメチルー1・3・5−トリアジン2部を
用いた以外は、実施例1と同様組成の高感度光重合性組
成物の溶液を得た。Example 17 High-sensitivity photopolymerization with the same composition as in Example 1, except that 2 parts of 2,4,6-dolystribromomethyl-1,3,5-triazine was used instead of 4 parts of N-phenylglycine. A solution of the sexual composition was obtained.
実施例18
N−フェニルグリシン4部の代わりに、2・4・6−ド
リスジクロロメチルー1・3・5−トリアジン2部を用
いた以外は、実施例1と同様組成の高感度光重合性組成
物の溶液を得た。Example 18 Highly sensitive photopolymerizable product having the same composition as Example 1, except that 2 parts of 2,4,6-dolysdichloromethyl-1,3,5-triazine was used instead of 4 parts of N-phenylglycine. A solution of the composition was obtained.
比較例2
ポリマーB100部の代わりに、ポリマーA100部を
用いた以外は、実施例11と同様組成の光重合性組成物
の溶液を得た。Comparative Example 2 A solution of a photopolymerizable composition having the same composition as in Example 11 was obtained, except that 100 parts of Polymer A was used instead of 100 parts of Polymer B.
上記の実施例11〜18および比較例2に係る各溶液を
用いて、前述の場合と同様にして所定厚みの光重合性組
成物層を形成し、この層につき前記同様にして感度特性
試験を行った結果は、つきの@2表に示されるとおりで
あった。Using each of the solutions of Examples 11 to 18 and Comparative Example 2, a photopolymerizable composition layer of a predetermined thickness was formed in the same manner as described above, and a sensitivity characteristic test was conducted on this layer in the same manner as described above. The results were as shown in the accompanying @2 table.
7、・′
7/″
/′
第 2 表
上記の結果から明らかなように、有機色素との併用成分
として2・4・6−置換−1・3・5−トリアジン化合
物を用いた実施例11〜18の光重合性組成物において
も、前記N−フェニルグリシン類を用いた実施例1〜1
0の場合と同様のすぐれた感度特性か得られるものであ
ることか判る。7,・′ 7/″ /′ Table 2 As is clear from the above results, Example 11 using a 2,4,6-substituted-1,3,5-triazine compound as a combined component with an organic dye Also in the photopolymerizable compositions of ~18, Examples 1 to 1 using the N-phenylglycines
It can be seen that the same excellent sensitivity characteristics as in the case of 0 can be obtained.
Claims (1)
る炭素−炭素二重結合を少なくとも1個有するモノマー
ないしオリゴマーおよび光重合開始剤を含む光重合性組
成物において、上記の高分子物質がスチレンと無水マレ
イン酸との共重合物に分子内に水酸基を有する(メタ)
アクリル酸エステル系モノマーを反応させて得られるポ
リマーからなり、かつ上記の光重合開始剤がつぎの式(
I )、(II)(III); ▲数式、化学式、表等があります▼・・・( I ) ▲数式、化学式、表等があります▼・・・(II) ▲数式、化学式、表等があります▼・・・(III) 〔式中、R_1はアルキル基または置換アルキル基、R
_2は水素原子、メチル基、アルコキシ基またはアミノ
基(置換アミノ基を含む)、R_3はアルキル基、置換
アルキル基またはアセチル基、R_4は水素原子、ハロ
ゲン原子またはメチル基、R_5は水素原子、ハロゲン
原子、メチル基、アルコキシ基またはアミノ基(置換ア
ミノ基を含む)、Xは水素原子またはハロゲン原子、Y
は酸素原子または硫黄原子である〕 で表わされる有機色素のうちの少なくとも1種とN−フ
ェニルグリシン類および/または2・4・6−置換−1
・3・5−トリアジン化合物とからなることを特徴とす
る高感度光重合性組成物。(1) In a photopolymerizable composition containing a film-forming polymer substance, a monomer or oligomer having at least one addition-polymerizable carbon-carbon double bond in one molecule, and a photopolymerization initiator, the above polymer The substance is a copolymer of styrene and maleic anhydride with a hydroxyl group in the molecule (meth)
It consists of a polymer obtained by reacting an acrylic acid ester monomer, and the above photopolymerization initiator has the following formula (
I ), (II) (III); ▲There are mathematical formulas, chemical formulas, tables, etc.▼...(I) ▲There are mathematical formulas, chemical formulas, tables, etc.▼...(II) ▲There are mathematical formulas, chemical formulas, tables, etc. Yes▼...(III) [In the formula, R_1 is an alkyl group or a substituted alkyl group, R
_2 is a hydrogen atom, methyl group, alkoxy group or amino group (including substituted amino groups), R_3 is an alkyl group, substituted alkyl group or acetyl group, R_4 is a hydrogen atom, halogen atom or methyl group, R_5 is a hydrogen atom, halogen atom, methyl group, alkoxy group or amino group (including substituted amino groups), X is a hydrogen atom or a halogen atom, Y
is an oxygen atom or a sulfur atom] and N-phenylglycines and/or 2,4,6-substituted-1
- A highly sensitive photopolymerizable composition comprising a 3,5-triazine compound.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13258986A JPS62288603A (en) | 1986-06-06 | 1986-06-06 | Highly sensitive photopolymerizable composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13258986A JPS62288603A (en) | 1986-06-06 | 1986-06-06 | Highly sensitive photopolymerizable composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62288603A true JPS62288603A (en) | 1987-12-15 |
Family
ID=15084875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13258986A Pending JPS62288603A (en) | 1986-06-06 | 1986-06-06 | Highly sensitive photopolymerizable composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62288603A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0315988A2 (en) * | 1987-11-10 | 1989-05-17 | Nippon Paint Co., Ltd. | Photopolymerizable composition |
JPH02157761A (en) * | 1988-12-10 | 1990-06-18 | Toyobo Co Ltd | Photopolymerizable composition |
JPH0519471A (en) * | 1991-07-11 | 1993-01-29 | Fuji Photo Film Co Ltd | Photosensitive composition |
JPH06148881A (en) * | 1992-10-30 | 1994-05-27 | Nippon Synthetic Chem Ind Co Ltd:The | Photosensitive resin composition |
-
1986
- 1986-06-06 JP JP13258986A patent/JPS62288603A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0315988A2 (en) * | 1987-11-10 | 1989-05-17 | Nippon Paint Co., Ltd. | Photopolymerizable composition |
JPH02157761A (en) * | 1988-12-10 | 1990-06-18 | Toyobo Co Ltd | Photopolymerizable composition |
JPH0519471A (en) * | 1991-07-11 | 1993-01-29 | Fuji Photo Film Co Ltd | Photosensitive composition |
JPH06148881A (en) * | 1992-10-30 | 1994-05-27 | Nippon Synthetic Chem Ind Co Ltd:The | Photosensitive resin composition |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SU618064A3 (en) | Composition sensitive to irradiation | |
KR960016468B1 (en) | Polymerisable compounds | |
US5049479A (en) | Photopolymerizable mixture and recording material produced therefrom | |
US5221595A (en) | Photopolymerizable mixture and recording material prepared therefrom | |
JPS591504A (en) | Photopolymerization initiator composition | |
JPH0743896A (en) | Photopolymerizable composition | |
JPH0635189A (en) | Photopolymerizable mixture and recording material prepared from said mixture | |
JPS62299840A (en) | Photosensitive recording element | |
JPH0829973A (en) | Photopolymerized composition | |
JPS5810737A (en) | Photosensitive resin composition | |
JPS62288603A (en) | Highly sensitive photopolymerizable composition | |
JP3153862B2 (en) | Styrene / maleate terpolymer | |
WO2022186389A1 (en) | Photosensitive resin multilayer body and method for producing same | |
JPH04306659A (en) | Photopolymerization compound | |
JPH0421183B2 (en) | ||
JPS6332541A (en) | Photopolymerizable composition | |
JPS589936B2 (en) | Photopolymerizable composition | |
JPS60166306A (en) | Photo-polymerization initiator | |
JPS62291633A (en) | Photosensitive recording element | |
JPS61123603A (en) | Photo-polymerizable composition | |
JPH0321615A (en) | Dhotocuring elastomer mixture for manufacture of relief printing plate and recording material obtained from said mixture | |
JPS6076735A (en) | Photosetting resin composition | |
JPS63254111A (en) | Photopolymerization catalyst for hydrophilic (meth) acrylic acid derivative monomer | |
JPH0392860A (en) | Photosensitive resin composition | |
JPS6317903A (en) | Photo-setting resin composition |