JPS6228839U - - Google Patents

Info

Publication number
JPS6228839U
JPS6228839U JP11865685U JP11865685U JPS6228839U JP S6228839 U JPS6228839 U JP S6228839U JP 11865685 U JP11865685 U JP 11865685U JP 11865685 U JP11865685 U JP 11865685U JP S6228839 U JPS6228839 U JP S6228839U
Authority
JP
Japan
Prior art keywords
electrodes
disk
electrode
rotating shaft
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11865685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425223Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11865685U priority Critical patent/JPH0425223Y2/ja
Publication of JPS6228839U publication Critical patent/JPS6228839U/ja
Application granted granted Critical
Publication of JPH0425223Y2 publication Critical patent/JPH0425223Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP11865685U 1985-07-31 1985-07-31 Expired JPH0425223Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11865685U JPH0425223Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-07-31 1985-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11865685U JPH0425223Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-07-31 1985-07-31

Publications (2)

Publication Number Publication Date
JPS6228839U true JPS6228839U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-02-21
JPH0425223Y2 JPH0425223Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-06-16

Family

ID=31005316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11865685U Expired JPH0425223Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-07-31 1985-07-31

Country Status (1)

Country Link
JP (1) JPH0425223Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230096983A (ko) 2020-11-04 2023-06-30 에드워즈 가부시키가이샤 진공 펌프

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230096983A (ko) 2020-11-04 2023-06-30 에드워즈 가부시키가이샤 진공 펌프

Also Published As

Publication number Publication date
JPH0425223Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-06-16

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