JPS6228839U - - Google Patents
Info
- Publication number
- JPS6228839U JPS6228839U JP11865685U JP11865685U JPS6228839U JP S6228839 U JPS6228839 U JP S6228839U JP 11865685 U JP11865685 U JP 11865685U JP 11865685 U JP11865685 U JP 11865685U JP S6228839 U JPS6228839 U JP S6228839U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- disk
- electrode
- rotating shaft
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Description
第１図は本考案の一実施例を示す縦断面図、第
２図は要部分解斜視図、第３図は第１図の要部拡
大断面図、第４図は従来の技術を示す縦断面図で
ある。
Ａ……基板、１０……真空槽、１１……槽本体
、１３……軸受部、１５……原料ガス導管、２０
……一方電極、２１……極板、２２……永久磁石
、２３……内周磁性体、２４……外周磁性体、２
６……第１カバー、２７……第２カバー、３０…
…他方電極、４０……円板、５０……回転軸、５
１……冷水（加熱）機構、６０……駆動装置、６
１……モータ、７０……電力源。
Fig. 1 is a longitudinal sectional view showing an embodiment of the present invention, Fig. 2 is an exploded perspective view of the main part, Fig. 3 is an enlarged sectional view of the main part of Fig. 1, and Fig. 4 is a longitudinal sectional view showing the conventional technique. It is a front view. A... Substrate, 10... Vacuum tank, 11... Tank body, 13... Bearing section, 15... Raw material gas conduit, 20
... One electrode, 21 ... Pole plate, 22 ... Permanent magnet, 23 ... Inner circumference magnetic body, 24 ... Outer circumference magnetic body, 2
6...first cover, 27...second cover, 30...
...Other electrode, 40... Disc, 50... Rotating shaft, 5
1... Cold water (heating) mechanism, 60... Drive device, 6
1...Motor, 70...Power source.
Claims (1)
２０，３０と、 前記一対の電極が対向する領域内に配置され、
これら電極と平行であり、被加工基板Ａが取付可
能とされた円板４０と、 前記円板に基端部が固定され、一方電極２０を
挿通し、軸線まわりに回転可能に支持された回転
軸５０と、 前記回転軸に関して、円板４０とは反対側に配
置され、該回転軸５０をその軸線まわりに回転駆
動する駆動装置６０と、 前記電極間に可聴周波数の電力を供給する電力
源７０とを含み、 前記一方電極２０が周方向に分割されているこ
とを特徴とするプラズマ処理装置。[Claims for Utility Model Registration] A pair of parallel plate electrodes 20 and 30 that are arranged opposite to each other with an interval between them, and the pair of electrodes are arranged in opposing regions,
A disk 40 parallel to these electrodes and to which the substrate A to be processed can be attached; and a rotary disk 40 whose base end is fixed to the disk, through which the electrode 20 is inserted and which is supported rotatably around an axis. a shaft 50; a drive device 60 that is disposed on the opposite side of the rotating shaft from the disc 40 and drives the rotating shaft 50 to rotate about its axis; and a power source that supplies power at an audio frequency between the electrodes. 70, wherein the one electrode 20 is divided in the circumferential direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11865685U JPH0425223Y2 (en) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11865685U JPH0425223Y2 (en) | 1985-07-31 | 1985-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6228839U true JPS6228839U (en) | 1987-02-21 |
| JPH0425223Y2 JPH0425223Y2 (en) | 1992-06-16 |
Family
ID=31005316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11865685U Expired JPH0425223Y2 (en) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425223Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230096983A (en) | 2020-11-04 | 2023-06-30 | 에드워즈 가부시키가이샤 | vacuum pump |
-
1985
- 1985-07-31 JP JP11865685U patent/JPH0425223Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230096983A (en) | 2020-11-04 | 2023-06-30 | 에드워즈 가부시키가이샤 | vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425223Y2 (en) | 1992-06-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6228839U (en) | ||
| JPS6255562U (en) | ||
| JPS5926781Y2 (en) | rotating machine | |
| JPS61182705U (en) | ||
| JPH0339765U (en) | ||
| JPS61205284U (en) | ||
| JPH0214287U (en) | ||
| JPS61120285U (en) | ||
| JPS61192669U (en) | ||
| JPS629238U (en) | ||
| JPS61171898U (en) | ||
| JPS63137560U (en) | ||
| JPS6261158U (en) | ||
| JPS6427577U (en) | ||
| JPS646391U (en) | ||
| JPS6261160U (en) | ||
| JPH01177460U (en) | ||
| JPS61200925U (en) | ||
| JPH0193566U (en) | ||
| JPH0378259U (en) | ||
| JPH0330757U (en) | ||
| JPH0179385U (en) | ||
| JPS58105767U (en) | Rotation direction regulating device for small synchronous motors | |
| JPS63143070U (en) | ||
| JPS6363080U (en) |