JPS62287116A - 容量型位置測定トランスデユ−サ - Google Patents
容量型位置測定トランスデユ−サInfo
- Publication number
- JPS62287116A JPS62287116A JP13089286A JP13089286A JPS62287116A JP S62287116 A JPS62287116 A JP S62287116A JP 13089286 A JP13089286 A JP 13089286A JP 13089286 A JP13089286 A JP 13089286A JP S62287116 A JPS62287116 A JP S62287116A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- electrode
- receiving
- scale
- transmitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 3
- 238000005259 measurement Methods 0.000 claims description 53
- 230000008878 coupling Effects 0.000 claims description 17
- 238000010168 coupling process Methods 0.000 claims description 17
- 238000005859 coupling reaction Methods 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 8
- 238000003491 array Methods 0.000 abstract 4
- 239000011295 pitch Substances 0.000 description 21
- 238000001514 detection method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13089286A JPS62287116A (ja) | 1986-06-04 | 1986-06-04 | 容量型位置測定トランスデユ−サ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13089286A JPS62287116A (ja) | 1986-06-04 | 1986-06-04 | 容量型位置測定トランスデユ−サ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62287116A true JPS62287116A (ja) | 1987-12-14 |
| JPH0435690B2 JPH0435690B2 (enrdf_load_stackoverflow) | 1992-06-11 |
Family
ID=15045151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13089286A Granted JPS62287116A (ja) | 1986-06-04 | 1986-06-04 | 容量型位置測定トランスデユ−サ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62287116A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04320913A (ja) * | 1991-04-19 | 1992-11-11 | Mitsutoyo Corp | 絶対測定用変位測定装置 |
| JPH0580849A (ja) * | 1991-02-27 | 1993-04-02 | Mitsutoyo Corp | アブソリユートエンコーダ |
| JP2009053183A (ja) * | 2007-07-31 | 2009-03-12 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
-
1986
- 1986-06-04 JP JP13089286A patent/JPS62287116A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0580849A (ja) * | 1991-02-27 | 1993-04-02 | Mitsutoyo Corp | アブソリユートエンコーダ |
| JPH04320913A (ja) * | 1991-04-19 | 1992-11-11 | Mitsutoyo Corp | 絶対測定用変位測定装置 |
| JP2009053183A (ja) * | 2007-07-31 | 2009-03-12 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0435690B2 (enrdf_load_stackoverflow) | 1992-06-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |