JPS6227355A - Production of mirror - Google Patents

Production of mirror

Info

Publication number
JPS6227355A
JPS6227355A JP16633985A JP16633985A JPS6227355A JP S6227355 A JPS6227355 A JP S6227355A JP 16633985 A JP16633985 A JP 16633985A JP 16633985 A JP16633985 A JP 16633985A JP S6227355 A JPS6227355 A JP S6227355A
Authority
JP
Japan
Prior art keywords
mirror
cleaning
glass substrate
film
cleaned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16633985A
Other languages
Japanese (ja)
Inventor
Yoshihiro Shirai
白井 芳博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP16633985A priority Critical patent/JPS6227355A/en
Publication of JPS6227355A publication Critical patent/JPS6227355A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/38Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal at least one coating being a coating of an organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

PURPOSE:To obtain a mirror having high reliability at and under a high temp. and high humidity by cleaning a glass substrate with a solvent or chemical then cleaning the substrate by an ion bombardment method (sputter etching) and successively forming a reflection film, protective film and backing coated film thereon. CONSTITUTION:The glass substrate 1 for the mirror or the under side of a cell is cleaned by using the solvent or chemical. The substrate after cleaning is further sputtered with Ar for several seconds and is thereby cleaned; thereafter a reflecting mirror 2 consisting of Al is formed to 1,000-3,000Angstrom by resistance heating or EB method, etc. The protective film 4 consisting of SiO2 is further formed on the mirror 2 to 1,000-3,000Angstrom thickness by an EB or sputtering method, etc. The backing coated film 3 is finally formed by back stop coating, for example, by coating an alkyd melamine resin on the rear and drying the same at 100 deg.C. The specular surface of the mirror formed by the above-mentioned method exhibits good durability and high reliability when subjected to the high-temp. and high-humidity aging test for 2,000hr at and under 70 deg.C and 95%.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は高信頼性ミラーの製置方法に関まるものである
DETAILED DESCRIPTION OF THE INVENTION <Industrial Field of Application> The present invention relates to a method for manufacturing a highly reliable mirror.

〈発明の概要〉 高耐久性を得るため、ガラス基板を溶剤または薬品によ
り洗浄後、さらにイオン衝撃法(スパッタエッチ)で洗
浄して、反射膜、保護膜及び裏打塗膜を順に形成する。
<Summary of the Invention> In order to obtain high durability, a glass substrate is cleaned with a solvent or a chemical, and then further cleaned by an ion bombardment method (sputter etch) to form a reflective film, a protective film, and a backing coating in this order.

〈従来の技術〉 第2図は、従来の、ガラス素基板または表面処理したガ
ラス基板の裏面に反射層を形成して裏打ちしたミラーで
ある。図において、■はガラス基板、2はアルミニウム
等からなる反射膜、3は裏打塗膜である。
<Prior Art> FIG. 2 shows a conventional mirror in which a reflective layer is formed on the back surface of a bare glass substrate or a surface-treated glass substrate for lining. In the figure, ■ is a glass substrate, 2 is a reflective film made of aluminum or the like, and 3 is a backing coating.

従来法は、 ■ 酸化セリウム水溶液でブラシ洗浄 ■ 流水でブラシ洗浄 ■ スポンジローラによる水切り ■ 100℃の熱風乾燥 (以上■〜■はガラス基板Iの洗浄) ■ 反射膜2の真空蒸着 ■ 裏止め塗装 ■ 裏止め乾燥 (■■は裏打塗膜3の形成) により製造される。The conventional method is ■ Brush cleaning with cerium oxide aqueous solution ■ Clean the brush with running water ■ Draining with sponge roller ■ 100℃ hot air drying (The above ■ to ■ are cleaning of glass substrate I) ■ Vacuum deposition of reflective film 2 ■ Back coating ■ Backing drying (■■ indicates formation of backing coating film 3) Manufactured by.

〈発明が解決しようとする問題点〉 しかし上記従来の製造方法によるミラーは、高温高湿で
の長期信頼性において、反射膜2のアルミニウム腐蝕お
よび裏打塗膜3のふくれ等が発生し易い。
<Problems to be Solved by the Invention> However, in the mirror produced by the conventional manufacturing method described above, corrosion of the aluminum of the reflective film 2 and blistering of the backing coating film 3 are likely to occur in long-term reliability under high temperature and high humidity.

本発明は高信頼性ミラーの製造方法を提供するものであ
る。
The present invention provides a method for manufacturing a highly reliable mirror.

く問題点を解決するだめの手段〉 ガラス基板を溶剤または薬品1こより洗浄後、さら≦こ
イオン衝撃法で洗浄する。そして反射膜、さらに保護膜
、さらに裏打塗膜を順に形成する。
[Means to Solve the Problem] After cleaning the glass substrate with a solvent or chemical, it is further cleaned using an ion bombardment method. Then, a reflective film, a protective film, and a backing film are formed in this order.

く作 用〉 上記製造法益こより、ガラス基板の表面をクリーンにし
て反射膜との密着企強固lこてき、また保護膜によって
裏打塗膜にピンホールがあった場合でも反射膜の腐蝕が
防止され、高温高温での信頼性を高める。
Effects> Due to the benefits of the above manufacturing method, the surface of the glass substrate is cleaned to strengthen the adhesion with the reflective film, and the protective film prevents corrosion of the reflective film even if there are pinholes in the backing coating. , improve reliability at high temperatures.

〈実施例〉 @1図は本発明に係る製造法により作製された高耐久ミ
ラー、第3図は同高耐久ミラー付セル(例えば防眩ミラ
ー)である。セルは液晶(LC)セル、ELセルまたは
ECセル等であり、上下にガラス基板1 、li有し、
ミラーは下側のガラス基板裏面に形成される。
<Example> Fig. 1 shows a highly durable mirror produced by the manufacturing method according to the present invention, and Fig. 3 shows a cell with the same highly durable mirror (for example, an anti-glare mirror). The cell is a liquid crystal (LC) cell, EL cell, or EC cell, etc., and has glass substrates 1 and 1 on the top and bottom,
The mirror is formed on the back surface of the lower glass substrate.

■ まず、ミラーまたはセル下側のガラス基板1を溶剤
または薬品を用いて洗浄する。
(2) First, the glass substrate 1 on the lower side of the mirror or cell is cleaned using a solvent or a chemical.

溶剤としては、例えば、強アルカリまたはイソプロピル
アルコールなどに用いる。
As the solvent, for example, strong alkali or isopropyl alcohol is used.

■ 次に■で洗浄したガラス基板lを、さらにArを数
分間スパッタして洗浄する。すなわち、イオン衝撃法に
より洗浄を行なう。
(2) Next, the glass substrate l cleaned in (2) is further cleaned by sputtering Ar for several minutes. That is, cleaning is performed by ion bombardment.

■ これらの洗浄後、アルミニウムの反射膜2を100
0〜3000A”、抵抗加熱またはEB法などによシ形
成する。
■ After these cleanings, apply aluminum reflective film 2 to 100%
0 to 3000 A'', formed by resistance heating or EB method.

■ そしてこの反射膜2上に、さらに5iOzからなる
保護膜4を1000〜3000A0、EB法またはスパ
ッタ法などにより形成する。
(2) Then, on this reflective film 2, a protective film 4 of 5 iOz with a thickness of 1,000 to 3,000 A0 is further formed by the EB method or the sputtering method.

■ 最後に、裏止め塗装、例えばアルキドメラミン樹脂
塗布し、100℃で乾燥する。これ;こよシ裏打塗膜3
を形成する。
■Finally, apply a backing coating, such as alkyd melamine resin, and dry at 100°C. This: Koyoshi backing coating 3
form.

上記方法で形成されたミラー鏡面は、高温高温試験70
℃95%、2000間付のニーミングに対して耐久性が
良好であった。
The mirror surface formed by the above method was tested in the high temperature test 70
It had good durability against neaming for 2,000 degrees at 95% °C.

〈発明の効果〉 本発明は上述の如くであって、高信頼性のミラ、−が得
られる。
<Effects of the Invention> The present invention is as described above, and a highly reliable mirror can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

′第1図は本発明により作製された高耐久ミラーの断面
図、第2図は従来例?示すミラーの断面図、第3図は本
発明により作製された高耐久ミラー付セルの断面図であ
る。 lニガラス基板、2:反射膜、3:裏打塗膜、4:保護
膜 代理人 弁理士 福 士 愛 彦(他2名)、茅2 図 !
'Figure 1 is a cross-sectional view of a highly durable mirror manufactured according to the present invention, and Figure 2 is a conventional example. FIG. 3 is a cross-sectional view of a cell with a highly durable mirror manufactured according to the present invention. 1 Ni glass substrate, 2: Reflective film, 3: Backing coating film, 4: Protective film Agent Patent attorney Aihiko Fukushi (and 2 others), Kaya 2 Figure!

Claims (1)

【特許請求の範囲】[Claims] 1、ガラス基板を溶剤または薬品により洗浄後、さらに
イオン衝撃法で洗浄して、反射膜、保護膜及び裏打塗膜
を順に形成してなることを特徴とするミラーの製造方法
1. A method for manufacturing a mirror, which comprises cleaning a glass substrate with a solvent or a chemical, and then cleaning it with an ion bombardment method to form a reflective film, a protective film, and a backing coating in this order.
JP16633985A 1985-07-26 1985-07-26 Production of mirror Pending JPS6227355A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16633985A JPS6227355A (en) 1985-07-26 1985-07-26 Production of mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16633985A JPS6227355A (en) 1985-07-26 1985-07-26 Production of mirror

Publications (1)

Publication Number Publication Date
JPS6227355A true JPS6227355A (en) 1987-02-05

Family

ID=15829532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16633985A Pending JPS6227355A (en) 1985-07-26 1985-07-26 Production of mirror

Country Status (1)

Country Link
JP (1) JPS6227355A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01104760A (en) * 1987-10-16 1989-04-21 Canon Inc Manufacture of film for laser with high yield strength by substrate treatment
JP2015205808A (en) * 2014-04-22 2015-11-19 正達国際光電股▲ふん▼有限公司 Glass product

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01104760A (en) * 1987-10-16 1989-04-21 Canon Inc Manufacture of film for laser with high yield strength by substrate treatment
JP2608294B2 (en) * 1987-10-16 1997-05-07 キヤノン株式会社 Method of manufacturing high yield strength film for laser by substrate processing
JP2015205808A (en) * 2014-04-22 2015-11-19 正達国際光電股▲ふん▼有限公司 Glass product

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