JPS62271663A - Machining device - Google Patents
Machining deviceInfo
- Publication number
- JPS62271663A JPS62271663A JP61115347A JP11534786A JPS62271663A JP S62271663 A JPS62271663 A JP S62271663A JP 61115347 A JP61115347 A JP 61115347A JP 11534786 A JP11534786 A JP 11534786A JP S62271663 A JPS62271663 A JP S62271663A
- Authority
- JP
- Japan
- Prior art keywords
- horn
- hole
- machining
- attached
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 title claims abstract description 59
- 239000012530 fluid Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 abstract 5
- 230000001627 detrimental effect Effects 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
（産業上の利用分野）
本発明は、超音波振動を利用して被加工物を加工する加
工装置に関する。Detailed Description of the Invention 3. Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a processing device that processes a workpiece using ultrasonic vibration.
（従来の技術）
従来、このような加工装置は、被加工物の加工時に発生
する切くず等を排除する為に、加工工具と被加工物との
間に加工液を流入されていた。この加工液を供給する為
に、加工装置の加工工具取り付は位置近くに加工液供給
部品を具備する供給装置を設けて行うていた。(Prior Art) Conventionally, in such a machining device, a machining fluid was flowed between a machining tool and a workpiece in order to remove chips and the like generated during machining of the workpiece. In order to supply this machining fluid, the machining tool is attached to the machining device by providing a supply device equipped with a machining fluid supply component near the location.
（発明の解決しようとする問題点）
しかしながら、加工工具の振動状態が大振幅、大出力に
なるためには、ホーン自体の交換が望ましいが、前述の
ような加工液の供給装置にあっては先端の加工工具のみ
が交換可能であるので、加工工具の寸法、形状、振幅に
制限がなされ、被加工物の加工が限定されてしまう欠点
があった。また、ホーンの振動振幅の腹の近くの部分に
前述したような加工液の供給装置を取り付けるので、加
工液供給部品のシール材等により振動効率が低下させら
れる欠点があった。(Problems to be Solved by the Invention) However, in order to increase the vibration state of the machining tool to a large amplitude and high output, it is desirable to replace the horn itself, but in the machining fluid supply device as described above, Since only the processing tool at the tip is replaceable, there are restrictions on the size, shape, and amplitude of the processing tool, which has the drawback of limiting the processing of the workpiece. Furthermore, since the machining fluid supply device as described above is attached to a portion near the antinode of the vibration amplitude of the horn, there is a drawback that the vibration efficiency is reduced by the sealing material of the machining fluid supply component.
（問題点を解決するための手段）
本発明は、加工工具を取りつけるホーンの振動振幅が零
となる位置にフランジ部を設け、このフランジ部の側面
に、ホーン先端から軸方向に明けられた第一貫通孔に連
通ずる第二貫通孔を複数個設け、そこに加工液を供給す
るようにしている。(Means for Solving the Problems) The present invention provides a flange portion at a position where the vibration amplitude of a horn to which a processing tool is attached becomes zero, and a hole provided in the side surface of the flange portion in the axial direction from the tip of the horn. A plurality of second through holes communicating with the through hole are provided, and machining fluid is supplied thereto.
（作用）
本発明は、加工工具を取りつけるホーンに貫通孔を設け
、そこに加工液を流すようにした為に、従来のように供
給装置を特別設ける必要がなく、上記欠点を解決できる
。(Function) In the present invention, a through hole is provided in the horn to which the machining tool is attached, and the machining fluid is allowed to flow therethrough, so that there is no need to provide a special supply device as in the prior art, and the above-mentioned drawbacks can be solved.
（実施例）
第１図（ａ）は、本発明の実施例である加工装置のホー
ン取り付は部の断面図、第１図（ｂ）はホーンの振動状
態を表す状態図である。(Embodiment) FIG. 1(a) is a cross-sectional view of a horn attachment part of a processing apparatus according to an embodiment of the present invention, and FIG. 1(b) is a state diagram showing the vibration state of the horn.
超音波振動子１は、円筒状に形成され、その一部にジル
コン・チタン酸鉛（ＰＺＴ）などの電歪または磁歪振動
子があり、それら振動子に交流電源１０から電流が供給
されて超音波振動するように構成されている。ホーン２
は、円錐状に形成され、その先端に加工用工具が取り付
は可能となっている。また、このホーン２にはフランジ
部３が形成されている。このフランジ部３は、超音波振
動子１とホーン２とがねじ結合された際に、超音波振動
の振幅が零となる位置（ノードの位Ｍ）に設けられてい
る。ホーン支持部材４は、フランジ部３と同様に円環状
に形成され、ホーンに形成されたフランジ部３を、周上
に配置された複数の支持部４ａにより上、下から挟持し
ている。このホーン（超音波振動子１とホーン２とが結
合された状−）は、フランジ部３に取り付けられたホー
ン支持部材４を介して、複数のねじ８により加工装置本
体６に固定されている。このねじ８は、フランジ部３の
支持部４ａにより支持された周上の第二貫通孔２ｂをさ
けた位置に設けられた貫通孔を貫通している。この加工
装置本体６には、ホーンに加工液（研削液等）Ａを送る
加工液供給部品５が固定されている。このホーンとホー
ン支持部材４とから成る加工系は、加工液供給部品５に
取り付けられた加工装置本体６に、ねじ８により着脱可
能に設けられている。また、加工装置本体６が回転体と
なっている回転系の趨音波加ニジステムも考えられる。The ultrasonic vibrator 1 is formed into a cylindrical shape, and a part thereof includes an electrostrictive or magnetostrictive vibrator made of zircon lead titanate (PZT), and a current is supplied to these vibrators from an AC power source 10 to generate ultrasonic waves. It is configured to vibrate acoustically. horn 2
is formed into a conical shape, and a machining tool can be attached to its tip. Further, this horn 2 has a flange portion 3 formed therein. This flange portion 3 is provided at a position (node position M) where the amplitude of ultrasonic vibration becomes zero when the ultrasonic vibrator 1 and the horn 2 are screwed together. The horn support member 4 is formed in an annular shape like the flange part 3, and the flange part 3 formed in the horn is held between upper and lower sides by a plurality of support parts 4a arranged on the circumference. This horn (a state in which the ultrasonic vibrator 1 and the horn 2 are combined) is fixed to the processing device main body 6 with a plurality of screws 8 via a horn support member 4 attached to the flange portion 3. . This screw 8 passes through a through hole provided on the circumference supported by the support portion 4a of the flange portion 3 at a position avoiding the second through hole 2b. A machining fluid supply component 5 that supplies machining fluid (grinding fluid, etc.) A to the horn is fixed to the machining device main body 6. The machining system consisting of this horn and the horn support member 4 is removably attached to a machining device main body 6 attached to a machining fluid supply component 5 with screws 8. Further, a rotating sonication system in which the processing device main body 6 is a rotating body is also considered.
次に、加工液Ａの流出経路が形成されたホーン２の構造
及び加工液供給部品５の構造を説明する。Next, the structure of the horn 2 in which an outflow path for the machining fluid A is formed and the structure of the machining fluid supply component 5 will be described.
ホーン２には、その先端からホーンの軸方向に第一貫通
孔２ａが形成され、且つ第一貫通孔２ａに連通す、るよ
うに、フランジ部３の側面から径方向に第二貫通孔２ｂ
が形成されている。また、フランジ部３に設けられたホ
ーン支持部材４にも第二貫通孔２ｂに連通ずる孔４ｂが
形成されている。A first through hole 2a is formed in the horn 2 in the axial direction of the horn from its tip, and a second through hole 2b is formed in the radial direction from the side surface of the flange portion 3 so as to communicate with the first through hole 2a.
is formed. Further, a hole 4b communicating with the second through hole 2b is also formed in the horn support member 4 provided on the flange portion 3.
ホーン支持部材４が２つの０リング７を介して嵌合して
いる加工液供給部品５にも、孔４ｂに連通ずるように貫
通孔５ｂが形成され、その貫通孔は０リング７の間に位
置している。The machining fluid supply component 5 into which the horn support member 4 is fitted via the two O-rings 7 is also formed with a through hole 5b so as to communicate with the hole 4b, and the through hole is formed between the O-rings 7. positioned.
このように、ホーン２及びホーン支持部材４及び加工液
供給部品５に貫通孔が形成されているので、加工液供給
部品５の貫通孔５ｂを介して加工液Ａがホーン２の貫通
孔２ａから加工工具と被加工物との間に流入させられる
。また、このホーンと加工工具との組み合わせを数種類
用意しておけば、被加工物の加工形状にすべて対応でき
、この場合でもホーンのノード位置は変わらないので、
加工装置本体６に取り付けた場合にも加工液Ａの供給孔
（貫通孔）５ｂが変化することがない。As described above, the through holes are formed in the horn 2, the horn support member 4, and the machining fluid supply component 5, so that the machining fluid A flows from the through hole 2a of the horn 2 through the through hole 5b of the machining fluid supply component 5. It flows between the machining tool and the workpiece. In addition, if you prepare several combinations of this horn and machining tool, you can handle all machining shapes of the workpiece, and even in this case, the node position of the horn does not change.
Even when attached to the processing device main body 6, the supply hole (through hole) 5b for the processing fluid A does not change.
（発明の効果）
以上のように本発明によれば、ホーンのノード位置にフ
ランジ部を設け、このフランジ部に加工液の貫通孔を設
けてい・る為に、超音波振動に影響されることなく、ス
ムースに加工液を流すことができるように成っている。(Effects of the Invention) As described above, according to the present invention, since the flange portion is provided at the node position of the horn and the through hole for machining fluid is provided in this flange portion, it is not affected by ultrasonic vibration. This allows the machining fluid to flow smoothly.
また、ホーンのノード位置は変わらないので、ホーンと
加工工具との組み合わせを数種類用意しても取替に際し
て加工液供給部品を変えることがなく好都合である。ま
た、ホーンのノード位置に加工液供給部品を設けている
為に、その加工液供給部品のシール材等が振動に悪影響
することがない。Further, since the node position of the horn does not change, it is convenient that even if several combinations of horns and machining tools are prepared, there is no need to change the machining fluid supply part when replacing the horn. Furthermore, since the machining fluid supply component is provided at the node position of the horn, the sealing material of the machining fluid supply component, etc. does not have an adverse effect on vibration.
尚、実施例によれば、加工系（ホーンとホーン支持部材
４）を数種類容易すれば、加工形状により最適な加工工
具を使い分けられることになり、その場合でも加工液の
供給される孔の位置は変わらないので加エエ興の取替に
よる加工液供給部品等の取替が不要となり、加工系の交
換が容易に行えると言う利点がある。また、実施例のよ
うに、加工系と加工装置本体６とがねじ結合により行わ
れているが、ねじ結合以外の簡易の結合方法を使用すれ
ば、マシニングセンターに用いられるＡＴＣ（自動工具
交換機能）を応用し、この加工装置をＦＭＳラインの一
部として採用することも可能である。According to the example, if several types of machining systems (horns and horn support members 4) are used, the optimal machining tool can be used depending on the machining shape, and even in that case, the position of the hole to which machining fluid is supplied can be changed. Since this does not change, there is no need to replace machining fluid supply parts, etc. by replacing the machining equipment, and there is an advantage that the machining system can be easily replaced. In addition, as in the embodiment, the machining system and the machining device main body 6 are connected by screws, but if a simple connection method other than screw connection is used, ATC (automatic tool change function) used in machining centers can be achieved. It is also possible to apply this processing equipment and adopt it as part of an FMS line.
第１図（ａ）は、本発明の実施例である加工装置のホー
ン取り付は部の断面図、第１図（ｂ）はホーンの振動状
態を表す状態図である。
（主要部分の符号の説明）FIG. 1(a) is a cross-sectional view of a horn attachment part of a processing apparatus according to an embodiment of the present invention, and FIG. 1(b) is a state diagram showing the vibration state of the horn. (Explanation of symbols of main parts)
Claims (1)
いて、 超音波振動を発生する超音波振動子と、 前記超音波振動子の振幅を拡大するために前記超音波振
動子が結合され、且つ加工工具が取りつけられるホーン
を有し、 前記ホーンは、振動振幅のほぼ零となるノード位置にフ
ランジ部が形成され、 前記ホーンにはその先端に取り付けられた前記加工工具
に加工液を送出する第一貫通孔が軸方向に形成されると
共に、該フランジ部にはその側面より軸中心に向かって
該第一貫通孔に連通し、前記加工液を送出する第二貫通
孔が形成されることを特徴とする加工装置。[Claims] A processing device that processes a workpiece using ultrasonic vibrations, comprising: an ultrasonic vibrator that generates ultrasonic vibrations; The horn has a horn to which a vibrator is coupled and a processing tool is attached, the horn has a flange portion formed at a node position where the vibration amplitude is approximately zero, and the processing tool is attached to the tip of the horn. A first through hole is formed in the axial direction to send out the machining fluid, and a second through hole is formed in the flange portion to communicate with the first through hole from the side toward the axial center and to send out the machining fluid. A processing device characterized in that a hole is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61115347A JPS62271663A (en) | 1986-05-20 | 1986-05-20 | Machining device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61115347A JPS62271663A (en) | 1986-05-20 | 1986-05-20 | Machining device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62271663A true JPS62271663A (en) | 1987-11-25 |
Family
ID=14660275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61115347A Pending JPS62271663A (en) | 1986-05-20 | 1986-05-20 | Machining device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62271663A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6135339A (en) * | 1998-01-26 | 2000-10-24 | Esec Sa | Ultrasonic transducer with a flange for mounting on an ultrasonic welding device, in particular on a wire bonder |
-
1986
- 1986-05-20 JP JP61115347A patent/JPS62271663A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6135339A (en) * | 1998-01-26 | 2000-10-24 | Esec Sa | Ultrasonic transducer with a flange for mounting on an ultrasonic welding device, in particular on a wire bonder |
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