JPS62269051A - Polymer gas sensor - Google Patents
Polymer gas sensorInfo
- Publication number
- JPS62269051A JPS62269051A JP11268086A JP11268086A JPS62269051A JP S62269051 A JPS62269051 A JP S62269051A JP 11268086 A JP11268086 A JP 11268086A JP 11268086 A JP11268086 A JP 11268086A JP S62269051 A JPS62269051 A JP S62269051A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas sensor
- added
- polyimide
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920000642 polymer Polymers 0.000 title claims abstract description 6
- 229920001721 polyimide Polymers 0.000 claims abstract description 8
- 239000004642 Polyimide Substances 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 6
- HENYYBLMWDENHQ-UHFFFAOYSA-N benzonitrile palladium Chemical compound [Pd].N#CC1=CC=CC=C1 HENYYBLMWDENHQ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000002904 solvent Substances 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 abstract description 20
- 230000035945 sensitivity Effects 0.000 abstract description 9
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 abstract description 6
- 238000010438 heat treatment Methods 0.000 abstract description 3
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 abstract description 2
- 239000003054 catalyst Substances 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract description 2
- 239000002341 toxic gas Substances 0.000 abstract description 2
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 abstract 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- CVIUJSXIENVAGJ-UHFFFAOYSA-N 1-methyl-2H-pyrrol-2-ide Chemical compound CN1C=CC=[C-]1 CVIUJSXIENVAGJ-UHFFFAOYSA-N 0.000 description 1
- 101100005001 Caenorhabditis elegans cah-5 gene Proteins 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
（産業 分野）
本発明はポリイミド樹脂を主成分とし、これに対し５ｎ
ＣＬ、および（ＣａＨｓＣＮ−ＰａＣｌ２）２を添加し
たものを基板上に塗布し、さらに熱処理してなる高分子
ガスセンサに関する。Detailed Description of the Invention (Industrial Field) The present invention has polyimide resin as its main component, and 5n
The present invention relates to a polymer gas sensor formed by coating a substrate with CL and (CaHsCN-PaCl2)2 added thereto and further heat-treating it.
（従来技術とその問題点）
Ｈｚ、ＣＨ４，ＣＯ，ＣｎＨｍなどの可燃性ガスのガス
検出には種々なセンナが提案乃至製品化されている。特
に、爆発の危険性が大である高分子ガスについては、表
面電位変化、電気伝導変化（表面）等を利用したものが
あるが、なお満足すべきガス感度のもの−は得られてい
ない。(Prior art and its problems) Various sensors have been proposed or commercialized for gas detection of combustible gases such as Hz, CH4, CO, and CnHm. In particular, with respect to polymer gases that have a high risk of explosion, there are methods that utilize changes in surface potential, changes in electrical conductivity (surface), etc., but no satisfactory gas sensitivity has yet been obtained.
（発明の目的）
本発明者等はこれらの問題点を解結し、可燃性ガスまた
は有毒ガスに対してすぐれたガス感度を有する高分子ガ
スセンサを提供すべく検討した結果、ポリイミドを主体
とし、これに触媒を添加したものを空気中で熱処理する
ことによって、すぐれたガス感度が得られることを見出
し、本発明に到達した。(Purpose of the Invention) The present inventors solved these problems and studied to provide a polymer gas sensor that has excellent gas sensitivity to flammable or toxic gases. It has been discovered that excellent gas sensitivity can be obtained by heat-treating this to which a catalyst has been added in air, and the present invention has been achieved based on this discovery.
（発明の構成）
すなわち、本発明によれば、主成分のポリイミドに対し
、１ｗｔ％〜１０ｗｔ％の５ｎＣ２４と０．５ｗｔ％〜
７ ｗ ｔ ％のベンゾニトリルパラジウム錯体を添加
し、これを溶媒に溶解して基板上に塗布し、スピナーを
かけて空気中３００℃〜５００℃の温度範囲で焼成して
なることを特命とする量分子ガスセンサ、が得られる。(Structure of the Invention) That is, according to the present invention, 5nC24 of 1 wt% to 10 wt% and 0.5 wt% to
The special mission is to add 7 wt % of benzonitrile palladium complex, dissolve it in a solvent, apply it on the substrate, and bake it in the air at a temperature range of 300°C to 500°C using a spinner. A quantitative molecular gas sensor is obtained.
次に、本発明を図面によって説明する。Next, the present invention will be explained with reference to the drawings.
第１図は本発明の一実施例作成のフローチャートであり
、第２図はポリイミドに５ｎＣＬ４４．Ｏｗ ｔ ’ｌ
ｐｔ （ＣａＨｓ ＣＮ−Ｐ ｂｅ ｔ２）２３．０
ｖｉ ｔ％ を添加し、４５０℃、２０分熱処理した
場合の水素ガスに対するガス感度一温度特性図、第３図
はポリイミ ドにＳ ｎ Ｃｔ４ ２．５ｗ ｔ ４ｇ
（Ｃｓ Ｈｓ ＣＮＰ ｄ Ｃ４）ｔ ３．Ｏｗ
ｔ％を添加し、４５０℃、２０分熱処理した場合のＣｔ
Ｈｓ Ｏｔ（、ＣＯ，ｎ−Ｃ４Ｈｔ。FIG. 1 is a flowchart for creating an embodiment of the present invention, and FIG. 2 is a flowchart showing the production of 5nCL44. Oh t'l
pt (CaHs CN-P be t2) 23.0
Fig. 3 shows the gas sensitivity vs. temperature characteristic diagram for hydrogen gas when S n Ct4 2.5wt 4g is added to polyimide and heat treated at 450°C for 20 minutes.
(Cs Hs CNP d C4)t 3. Ow
Ct when t% is added and heat treated at 450°C for 20 minutes
HsOt(,CO,n-C4Ht.
ガスに対するガス感度一温度特性図である。It is a gas sensitivity vs. temperature characteristic diagram for gas.
第１図において、主体をなすポリイミドに対し１ｗｔチ
〜ｌｏｗｔ％、好ましくは２．５ ｗ ｔ％のＳ ｎ
Ｃ４ａと（Ｌ５’、 ｗ ｔ −、７，ｗｔ酊好ましく
は３．０ｗｔ％のベンゾニトリルパラジウム錯体を添加
し、これをＮ−メチル−２−ピロリド７５５％、ジメチ
ルアセトアミド３５％、）ルエン１（ｌよりなる溶媒に
溶解して基板上に総高し、スピナーをかけて空気中で３
００〜５００℃、好ましくは４５０℃、２０分の熱処理
を施してセンサ紫子を作成した。In FIG. 1, 1wt% to lowt%, preferably 2.5wt% of S n is added to the main polyimide.
C4a and (L5', w t -, 7, wt %, preferably 3.0 wt % benzonitrile palladium complex, which is combined with 755% N-methyl-2-pyrrolid, 35% dimethylacetamide,) toluene 1 ( Dissolved in a solvent consisting of 100 ml and placed on a substrate, placed on a spinner and placed in air for 3 hrs.
A sensor purple was prepared by heat treatment at 00 to 500°C, preferably 450°C for 20 minutes.
第２図はＨＪＩＨｔｌＯＯＯｐｐｍｐ ３０００ｐｐｍ
。Figure 2 shows HJIHtlOOOOppmp 3000ppm
.
５００ｐｐｍ の場合について、それぞれ上記条件下
での温度−ガス感度特性図である。5 is a temperature-gas sensitivity characteristic diagram under the above conditions for the case of 500 ppm.
（発明の効果）
本発明は上記構成をとることによって、次の効果を示す
ものである。(Effects of the Invention) By adopting the above configuration, the present invention exhibits the following effects.
＋１１ 耐熱性のポリイミドを主体とするので、相当
の高温域を含む広い温度範囲での使用が可能である。+11 Since it is mainly made of heat-resistant polyimide, it can be used in a wide temperature range including considerably high temperatures.
（２）すぐれたガス感度を示す。(2) Shows excellent gas sensitivity.
第１図は本発明の一実施例作成のフローチャート、第２
図は水素濃度の異なる場合について、それぞれポリイミ
ドに対し、５ｎＣｔ、Ｈ，０４，０ｗｔ％、（ＣａＨ５
ＣＮ−ＰｄＣｔ＊）ｔ ３．０ｗｔ％を添加し、４５０
℃、２０分の熱処理を施した場合の己度−ガス感度特性
図、第３図はポリイミドに５ｎＣＬ４２．５ｗｔ％＋
（ＣａＨＩＩ ＣＮＰｄＣ４）！３．０ｗｔ４ を添加
し、４５０℃、２０分熱処理した場合のＣｔ Ｆ（ｓｏ
Ｈ，ＣＯ，ｎ Ｃ４ＨＩＯガスに対するガス感度一温
度特性図である。
＋２０ １６０ Ｚｏ
ｏ ２４０５Ａ 度 じＣ）Figure 1 is a flowchart for creating an embodiment of the present invention;
The figure shows 5nCt, H, 04, 0wt%, (CaH5
CN-PdCt*)t 3.0 wt% was added, 450
℃, 20 minutes of heat treatment, Fig. 3 is a graph of 5nCL42.5wt%+ on polyimide.
(CaHII CNPdC4)! Ct F(so
It is a gas sensitivity-temperature characteristic diagram for H, CO, n C4HIO gas. +20 160 Zo
o 2405A Degrees C)
Claims (1)
％のＳｎＣｌ＿４と０．５ｗｔ％〜７ｗｔ％ベンゾニト
リルパラジウム錯体を添加し、これを溶媒に溶解して基
板上に塗布し、スピナーをかけて空気中で３００℃〜５
００℃の温度範囲で熱処理してなることを特徴とする高
分子ガスセンサ。(1) 1wt% to 10wt based on the main component polyimide
% of SnCl_4 and 0.5 wt% to 7 wt% of benzonitrile palladium complex were dissolved in a solvent and applied onto the substrate, and heated in air at 300°C to 5% using a spinner.
A polymer gas sensor characterized by being heat-treated in a temperature range of 00°C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11268086A JPS62269051A (en) | 1986-05-19 | 1986-05-19 | Polymer gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11268086A JPS62269051A (en) | 1986-05-19 | 1986-05-19 | Polymer gas sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62269051A true JPS62269051A (en) | 1987-11-21 |
Family
ID=14592785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11268086A Pending JPS62269051A (en) | 1986-05-19 | 1986-05-19 | Polymer gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62269051A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5534193A (en) * | 1993-02-12 | 1996-07-09 | E. I. Du Pont De Nemours And Company | White electroconductive powders with antimony and tin oxides |
-
1986
- 1986-05-19 JP JP11268086A patent/JPS62269051A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5534193A (en) * | 1993-02-12 | 1996-07-09 | E. I. Du Pont De Nemours And Company | White electroconductive powders with antimony and tin oxides |
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