JPS6226752A - 高強度軟ｘ線発生方法 - Google Patents
高強度軟ｘ線発生方法Info
- Publication number
- JPS6226752A JPS6226752A JP16704185A JP16704185A JPS6226752A JP S6226752 A JPS6226752 A JP S6226752A JP 16704185 A JP16704185 A JP 16704185A JP 16704185 A JP16704185 A JP 16704185A JP S6226752 A JPS6226752 A JP S6226752A
- Authority
- JP
- Japan
- Prior art keywords
- soft
- rays
- magnetic field
- waves
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 15
- 239000007789 gas Substances 0.000 claims abstract description 25
- 238000010438 heat treatment Methods 0.000 claims abstract 2
- 238000004846 x-ray emission Methods 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 235000006693 Cassia laevigata Nutrition 0.000 description 2
- 241000522641 Senna Species 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229940124513 senna glycoside Drugs 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000005461 Bremsstrahlung Effects 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000002083 X-ray spectrum Methods 0.000 description 1
- 230000005260 alpha ray Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- X-Ray Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16704185A JPS6226752A (ja) | 1985-07-29 | 1985-07-29 | 高強度軟ｘ線発生方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16704185A JPS6226752A (ja) | 1985-07-29 | 1985-07-29 | 高強度軟ｘ線発生方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6226752A true JPS6226752A (ja) | 1987-02-04 |
| JPH0449240B2 JPH0449240B2 (enExample) | 1992-08-10 |
Family
ID=15842286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16704185A Granted JPS6226752A (ja) | 1985-07-29 | 1985-07-29 | 高強度軟ｘ線発生方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6226752A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008277204A (ja) * | 2007-05-07 | 2008-11-13 | Japan Atomic Energy Agency | レーザー駆動の小型・高コントラスト・コヒーレントｘ線発生装置及びその発生方法 |
| JP2012079857A (ja) * | 2010-09-30 | 2012-04-19 | Kansai Univ | 半導体リソグラフィ用光源装置 |
-
1985
- 1985-07-29 JP JP16704185A patent/JPS6226752A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008277204A (ja) * | 2007-05-07 | 2008-11-13 | Japan Atomic Energy Agency | レーザー駆動の小型・高コントラスト・コヒーレントｘ線発生装置及びその発生方法 |
| JP2012079857A (ja) * | 2010-09-30 | 2012-04-19 | Kansai Univ | 半導体リソグラフィ用光源装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449240B2 (enExample) | 1992-08-10 |
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